Vertical memory devices and methods of manufacturing the same
A semiconductor device includes a substrate, a plurality of insulating layers vertically stacked on the substrate, a plurality of channels arranged in vertical openings formed through at least some of the plurality of insulating layers, and a plurality of portions alternatingly positioned with the plurality of insulating layers in the vertical direction. At least some of the portions are adjacent corresponding channels of the plurality of channels. Each of the portions includes a conductive barrier pattern formed on an inner wall of the portion, a filling layer pattern positioned in the portion on the conductive barrier pattern, and a gate electrode positioned in a remaining area of the portion not occupied by the conductive barrier or filling layer pattern.
1. A method for manufacturing a semiconductor device, the method comprising:
alternately stacking a plurality of insulation layers and a plurality of sacrificial layers on a substrate;
forming a plurality of holes through the plurality of insulation and sacrificial layers to the substrate;
forming a semiconductor pattern in a bottom portion of each of the plurality of holes;
depositing at least one insulating layer on sidewalls and on the semiconductor pattern in each of the plurality of holes;
forming openings at a side of and spaced apart from each of the plurality of holes;
removing the sacrificial layers through the openings to form a plurality of open portions;
depositing a barrier layer on an inner wall of each of the open portions; and
forming a filling layer in each open portion on the barrier layer.
2. The method of claim 1 , wherein the barrier layer comprises a conductive metal nitride.
3. The method of claim 1 , wherein the barrier layer is formed on top and bottom walls of each open portion, and on at least one sidewall of each open portion adjacent a corresponding hole.
4. The method of claim 1 , wherein the filling layer comprises polysilicon.
5. The method of claim 1 , further comprising removing a portion of the filling layer from each open portion.
6. The method of claim 5 , wherein the barrier layer is a first barrier layer, and the method further comprises forming a second barrier layer on the first barrier layer and on a remaining portion of the filling layer in the open portion.
7. The method of claim 5 , further comprising forming a gate electrode layer in a remaining area of the open portion not occupied by the barrier layer or the filling layer.
8. The method of claim 6 , further comprising forming a gate electrode layer in a remaining area of the open portion not occupied by the first and second barrier layers or the filling layer.
9. The method of claim 7 , wherein the gate electrode layer includes tungsten.
10. The method of claim 1 , wherein at least some of the holes are arranged in a zigzag configuration.
11. The method of claim 1 , further comprising forming a division layer pattern between top portions of two lines of holes, wherein the two lines of holes are symmetrically positioned about the division layer pattern.
12. The method of claim 1 , further comprising removing a portion of the at least one insulating layer on the semiconductor pattern and forming a recess in the semiconductor pattern corresponding to the removed portion of the at least one insulating layer.
13. The method of claim 1 , further comprising depositing a blocking layer on an inner wall of each of the open portions prior to depositing the barrier layer.
14. A computer system comprising a semiconductor device having a circuit layout manufactured by the method of claim 1 , wherein the computer system is one of a mobile device, a desktop computer, an application chipset, a camera image sensor, a camera image signal processor, and an input/output device.
15. A system for transmitting or receiving data, the system comprising:
a memory device for storing a program; and
a processor in communication with the memory device, wherein the memory device comprises a circuit layout manufactured by the method of claim 1 .
16. The system according to claim 15 , wherein the system comprises at least one of a mobile device, a desktop computer, an application chipset, a camera image sensor, a camera image signal processor, an input/output device, or a memory card.
17. A semiconductor memory card, comprising:
an interface part that interfaces with a host; and
a controller that communicates with the interface part and a memory device via a bus, wherein the memory device comprises a circuit layout manufactured by the method of claim 1 .