Display substrate including a thin film transistor and method of manufacturing the same
A display substrate includes a gate electrode on a base substrate, an active pattern which overlaps the gate electrode and includes a metal oxide semiconductor, an insulation pattern on the active pattern, a source electrode which contacts the active pattern, a drain electrode which contacts the active pattern and is spaced apart from the source electrode, and a first passivation layer which covers the active pattern and the insulation pattern, and includes fluorine, where the active pattern includes a first portion which directly contacts the insulation pattern and overlaps the gate electrode and the insulation pattern, a second portion which contacts the first passivation layer and has an electrical conductivity substantially larger than that of the first portion, a third portion which contacts the first passivation layer, has an electrical conductivity substantially larger than that of the first portion and is spaced apart from the second portion.
1. A display substrate, comprising
a gate electrode on a base substrate;
an active pattern which overlaps the gate electrode and comprises a metal oxide semiconductor;
an insulation pattern on the active pattern;
a source electrode which contacts the active pattern;
a drain electrode which contacts the active pattern and is spaced apart from the source electrode; and
a first passivation layer which covers the active pattern and the insulation pattern, and comprises fluorine,
wherein the active pattern comprises:
a first portion which directly contacts the insulation pattern and overlaps the gate electrode and the insulation pattern;
a second portion which contacts the first passivation layer and has an electrical conductivity substantially larger than an electrical conductivity of the first portion;
a third portion which contacts the first passivation layer, has an electrical conductivity substantially larger than the electrical conductivity of the first portion and is spaced apart from the second portion;
a fourth portion contacting the second portion and overlapping the source electrode; and
a fifth portion contacting the third portion and overlapping the drain electrode,
wherein the fourth portion and the fifth portion comprise a p-type semiconductor and include fluorine contents smaller than those of the second portion and third portion.
2. The display substrate of claim 1 , wherein the first passivation layer further comprises fluorinated silicon oxide, fluorinated silicon nitride, fluorinated silicon carbide, fluorinated silicon oxy-nitride, fluorinated silicon oxy-carbide, or any combinations thereof.
3. The display substrate of claim 1 , wherein
the first portion comprises a p-type semiconductor, and
the second portion and the third portion comprise an n-type semiconductor.
4. The display substrate of claim 1 , wherein the second portion and the third portion include a fluorine content larger than that of the first portion.
5. The display substrate of claim 1 , wherein the source electrode and the drain electrode are exposed by the insulation pattern.
6. The display substrate of claim 1 , wherein the metal oxide semiconductor includes a tin content thereof between about 1 wt % to about 10 wt %.
7. The display substrate of claim 1 , wherein the second portion and the third portion have a carrier density of between about 1E18/cm 3 to about 1E22/cm 3 .
8. The display substrate of claim 1 , wherein the gate electrode is disposed between the base substrate and the active pattern.
9. The display substrate of claim 1 , wherein the active pattern is disposed between the base substrate and the gate electrode.
10. The display substrate of claim 1 , wherein openings which expose the second portion and the third portion of the active pattern are defined in the insulation pattern.
11. The display substrate of claim 1 , wherein the insulation pattern has an isolated island shape.
12. The display substrate of claim 1 , wherein the second portion and the third portion of the active pattern are exposed by the insulation pattern, the source electrode and the drain electrode.
13. The display substrate of claim 1 , further comprising a second passivation layer disposed on the first passivation layer.
14. The display substrate of claim 13 , wherein the second passivation layer comprises silicon oxide or silicon nitride.
15. A method of manufacturing a display substrate, the method comprising:
forming a gate electrode on a base substrate;
forming an active pattern overlapping the gate electrode, the active pattern comprising:
a metal oxide semiconductor;
a first portion which directly contacts the insulation pattern and overlaps the gate electrode and the insulation pattern;
a second portion which contacts the first passivation layer;
a third portion which contacts the first passivation layer, the third portion spaced apart from the second portion;
a fourth portion contacting the second portion and overlapping the source electrode; and
a fifth portion contacting the third portion and overlapping the drain electrode,
wherein the fourth portion and the fifth portion comprise a p-type semiconductor and include fluorine contents smaller than those of the second portion and third portion;
forming an insulation pattern partially covering the active pattern;
forming a source electrode and a drain electrode contacting the active pattern; and
forming a first passivation layer to cover the active pattern and the insulation pattern, the first passivation layer comprising fluorine,
wherein
the forming the active pattern comprises forming a metal oxide semiconductor layer including a p-type semiconductor, and
the forming the first passivation layer comprises implanting fluorine atoms into portions of the active pattern, thereby converting the p-type semiconductor of the active pattern to an n-type semiconductor.
16. The method of claim 15 , further comprising forming a second passivation layer on the first passivation layer.