Semiconductor light emitting device and semiconductor light emitting apparatus having the same
In example embodiments, a semiconductor light emitting device includes a light emitting structure, first and second insulating layers, a barrier metal layer, and an electrode. The light emitting structure includes an active layer between a first and second conductivity-type semiconductor layer. The first insulating layer is on the light emitting structure and defines a first one and a second one of first openings that respectively expose the first and second conductivity-type semiconductor layers. The barrier metal layer is on the first insulating layer and electrically connected to the first and second conductivity-type semiconductor layers through the first and second one of the first openings. The second insulating layer is on the barrier metal layer and defines a second opening that partially exposes the barrier metal layer. The electrode is on the barrier metal layer and electrically connected to the first and second conductivity-type semiconductor layers through the barrier metal layer.
1. A semiconductor light emitting device comprising:
a light emitting structure, the light emitting structure including a first conductivity-type semiconductor layer, an active layer on the first conductivity-type semiconductor layer, and a second conductivity-type semiconductor layer on the active layer;
a first insulating layer on the light emitting structure, the first insulating layer defining a plurality of first openings, a first one of the plurality of first openings exposing the first conductivity-type semiconductor layer and a second one of the plurality of first openings exposing the second conductivity-type semiconductor layer;
a barrier metal layer on the first insulating layer, the barrier metal layer being electrically connected to the first conductivity-type semiconductor layer and the second conductivity-type semiconductor layer through the first one and the second one of the plurality of first openings;
a second insulating layer on the barrier metal layer, the second insulating layer defining a second opening that partially exposes the barrier metal layer; and
an electrode on the barrier metal layer, the electrode being electrically connected to the first conductivity-type semiconductor layer and the second conductivity-type semiconductor layer through the barrier metal layer and the second opening, and
at least one of the first and second insulating layers and the barrier metal layer are between the electrode and the light emitting structure.
2. The semiconductor light emitting device of claim 1 , wherein at least part of the second insulating layer is over a portion of the barrier metal layer in the first one and the second one of the plurality of first openings.
3. The semiconductor light emitting device of claim 1 , wherein the plurality of first openings and the second opening do not overlap with each other.
4. The semiconductor light emitting device of claim 1 , wherein
the light emitting structure includes a plurality of mesa regions partially demarcated by an etched region, and
the etched region is defined by a trench in the second conductivity-type semiconductor layer, the active layer, and the first conductivity-type semiconductor layer.
5. The semiconductor light emitting device of claim 4 , wherein
the etched region extends from one side of the light emitting structure to an other side of the light emitting structure that is opposite the one side, and
the etched region is one of a plurality of etched regions that are parallel to each other.
6. The semiconductor light emitting device of claim 4 , further comprising:
a first contact electrode on an upper surface of the first conductivity-type semiconductor layer exposed by the etched region, wherein
the first contact electrode is connected to the first conductivity-type semiconductor layer, and
the first contact electrode is connected to the electrode through the barrier metal layer.
7. The semiconductor light emitting device of claim 6 , wherein
the first contact electrode includes a plurality of pad portions and a plurality of finger portions, and
the plurality of finger portions respectively extend from the plurality of pad portions in the etched region.
8. The semiconductor light emitting device of claim 7 , wherein
the plurality of pad portions are directly connected to the barrier metal layer.
9. The semiconductor light emitting device of claim 4 , further comprising:
a second contact electrode on an upper surface of the plurality of mesa regions, wherein
the second contact electrode is connected to the second conductivity-type semiconductor layer, and the second contact electrode is connected to the electrode through the barrier metal layer.
10. The semiconductor light emitting device of claim 9 , wherein the second contact electrode includes a reflective metal layer.
11. The semiconductor light emitting device of claim 10 , wherein the second contact electrode includes a coating metal layer on the reflective metal layer.
12. The semiconductor light emitting device of claim 4 , further comprising:
a passivation layer on a lateral surface of the mesa region, wherein
the passivation layer covers a part of the active layer exposed by the etched region.
13. The semiconductor light emitting device of claim 1 , wherein the electrode includes at least one first electrode and at least one second electrode.
14. A semiconductor light emitting device comprising:
a light emitting structure,
the light emitting structure including a stacked structure of a first conductivity-type semiconductor layer, an active layer on the first conductivity-type semiconductor layer, and a second conductivity-type semiconductor layer on the active layer, and
the light emitting structure including a mesa region partially demarcated by an etched region, the etched region being defined by a trench in the second conductivity-type semiconductor layer, the active layer, and the first conductivity-type semiconductor layer;
a first insulating layer on the light emitting structure;
a barrier metal layer on the first insulating layer, the barrier metal layer penetrating through the first insulating layer and being electrically connected to the first conductivity-type semiconductor layer and the second conductivity-type semiconductor layer;
a second insulating layer on the barrier metal layer; and
an electrode on a portion of the barrier metal layer exposed from the second insulating layer, the electrode being electrically connected to the first conductivity-type semiconductor layer and the second conductivity-type semiconductor layer through the barrier metal layer,
the electrode over the light emitting structure, and
the first insulating layer and the barrier metal layer or the barrier metal layer and the second insulating layer being between the electrode and the light emitting structure.
15. The semiconductor light emitting device of claim 14 , wherein
the first insulating layer defines a plurality of first openings,
a first one of the plurality of first openings exposes the first conductivity-type semiconductor layer,
a second one of the plurality of first openings exposes the second conductivity-type semiconductor layer,
the second insulating layer defines a second opening that partially exposes the barrier metal layer, and
the plurality of first openings and the second opening do not overlap with each other.
16. A semiconductor light emitting device comprising:
a light emitting structure;
a dual-barrier structure on the light emitting structure,
the dual-barrier structure including a barrier metal layer on a first insulating layer;
the first insulating layer defining openings that expose a first portion and a second portion, respectively, of the light emitting structure,
the barrier metal layer including a first barrier metal layer and a second barrier metal layer that are electrically connected to the first portion and the second portion, respectively, of the light emitting structure through different ones of the openings defined by the first insulating layer;
a second insulating layer on the dual-barrier structure,
the second insulating layer defining at least one opening that exposes the first barrier metal layer and at least one opening that exposes the second barrier metal layer;
an electrode on the dual-barrier structure and at least part of the second insulating layer such that the barrier metal layer and at least one of the first and second insulating layers are between the electrode and the light emitting structure.
17. The semiconductor light emitting device of claim 16 , wherein
the light emitting structure includes a first conductivity type semiconductor layer, an active layer on the first conductivity-type semiconductor layer, and a second conductivity type semiconductor layer on the active layer,
the first conductivity-type semiconductor layer and the second conductivity-type semiconductor layer are different conductivity types,
the light emitting structure includes a mesa region demarcated by a trench that extends through the active layer and the second conductivity-type semiconductor layer to the first conductivity-type semiconductor layer,
the electrode includes at least one first electrode that is spaced apart from at least one second electrode,
the first portion of the light emitting structure is an area of the first conductivity-type semiconductor layer that is exposed by the trench,
the at least one first electrode is electrically connected to the first portion of the light emitting structure through the first barrier metal layer,
the second portion of the light emitting structure is an area of the second conductivity-type semiconductor layer exposed by at least one of the openings defined by the first insulating layer, and
the least one second electrode is electrically connected to the second portion of the light emitting structure through the second barrier metal layer.
18. The semiconductor light emitting device of claim 16 , wherein the second insulating layer extends over the openings defined by the first insulating layer.
19. The semiconductor light emitting device of claim 16 , wherein the openings defined by the first insulating layer do not overlap with the at least one opening that exposes the first barrier metal layer defined by the second insulating layer and the at least one opening that exposes the second barrier metal layer defined by the second insulating layer.
20. The semiconductor light emitting device of claim 16 , further comprising:
a passivation layer covering a lateral surface of the trench.