Thin film transistor, method for manufacturing the same, and semiconductor device
In a thin film transistor, an increase in off current or negative shift of the threshold voltage is prevented. In the thin film transistor, a buffer layer is provided between an oxide semiconductor layer and each of a source electrode layer and a drain electrode layer. The buffer layer includes a metal oxide layer which is an insulator or a semiconductor over a middle portion of the oxide semiconductor layer. The metal oxide layer functions as a protective layer for suppressing incorporation of impurities into the oxide semiconductor layer. Therefore, in the thin film transistor, an increase in off current or negative shift of the threshold voltage can be prevented.
1. A method of manufacturing a semiconductor device comprising the steps of:
forming an oxide semiconductor film over an insulating layer by a vacuum evaporation method, a pulsed laser deposition method, an ion plating method, or a metal organic chemical vapor deposition method;
forming a first conductive layer after forming the oxide semiconductor film;
forming a second conductive layer after forming the first conductive layer by a vacuum evaporation method, a pulsed laser deposition method, an ion plating method, or a metal organic chemical vapor deposition method;
forming a source electrode layer and a drain electrode layer by processing the second conductive layer;
forming a metal oxide layer between the source electrode layer and the drain electrode layer; and
performing a heat treatment after forming the metal oxide layer, whereby a first region having a lower oxygen concentration than the oxide semiconductor film is formed between the source electrode layer and the oxide semiconductor film and a second region having a lower oxygen concentration than the oxide semiconductor film is formed between the drain electrode layer and the oxide semiconductor film.
2. The method of manufacturing a semiconductor device according to claim 1 , wherein the first conductive layer is formed by a vacuum evaporation method, a pulsed laser deposition method, an ion plating method, or a metal organic chemical vapor deposition method.
3. The method of manufacturing a semiconductor device according to claim 1 , wherein the first conductive layer contains at least one of titanium, copper, zinc, and aluminum.
4. The method of manufacturing a semiconductor device according to claim 1 , wherein the metal oxide layer is formed by oxidizing the first conductive layer.
5. The method of manufacturing a semiconductor device according to claim 1 , wherein the heat treatment is performed at 200° C. to 400° C.
6. The method of manufacturing a semiconductor device according to claim 1 , wherein the oxide semiconductor film contains indium, gallium, and zinc.
7. The method of manufacturing a semiconductor device according to claim 1 , wherein the oxide semiconductor film is formed by the metal organic chemical vapor deposition method.
8. A method of manufacturing a semiconductor device comprising the steps of:
forming a gate insulating layer by a vacuum evaporation method, a pulsed laser deposition method, an ion plating method, or a metal organic chemical vapor deposition method;
forming an oxide semiconductor film over the gate insulating layer by a vacuum evaporation method, a pulsed laser deposition method, an ion plating method, or a metal organic chemical vapor deposition method;
forming a first conductive layer after forming the oxide semiconductor film;
forming a second conductive layer after forming the first conductive layer by a vacuum evaporation method, a pulsed laser deposition method, an ion plating method, or a metal organic chemical vapor deposition method;
forming a source electrode layer and a drain electrode layer by processing the second conductive layer;
forming a metal oxide layer between the source electrode layer and the drain electrode layer; and
performing a heat treatment after forming the metal oxide layer, whereby a first region having a lower oxygen concentration than the oxide semiconductor film is formed between the source electrode layer and the oxide semiconductor film and a second region having a lower oxygen concentration than the oxide semiconductor film is formed between the drain electrode layer and the oxide semiconductor film.
9. The method of manufacturing a semiconductor device according to claim 8 , wherein the first conductive layer is formed by a vacuum evaporation method, a pulsed laser deposition method, an ion plating method, or a metal organic chemical vapor deposition method.
10. The method of manufacturing a semiconductor device according to claim 8 , wherein the first conductive layer contains at least one of titanium, copper, zinc, and aluminum.
11. The method of manufacturing a semiconductor device according to claim 8 , wherein the metal oxide layer is formed by oxidizing the first conductive layer.
12. The method of manufacturing a semiconductor device according to claim 8 , wherein the heat treatment is performed at 200° C. to 400° C.
13. The method of manufacturing a semiconductor device according to claim 8 , wherein the oxide semiconductor film contains indium, gallium, and zinc.
14. The method of manufacturing a semiconductor device according to claim 8 , wherein the oxide semiconductor film is formed by the metal organic chemical vapor deposition method.