Display unit, method of manufacturing the same, and electronic apparatus
A display unit includes: a display layer including a pixel electrode; a semiconductor layer provided in a layer below the display layer, the semiconductor layer including a wiring layer that includes a material removable by an etchant by which the pixel electrode is also removable; and a terminal section configured to electrically connect the semiconductor layer to an external circuit, the terminal section including a first electrically-conductive layer made of a material same as a material of the wiring layer.
1. A display unit comprising:
a display layer including a pixel electrode;
a semiconductor layer provided in a layer below the display layer, the semiconductor layer including a wiring layer; and
a terminal section configured to electrically connect the semiconductor layer to an external circuit, the terminal section including a first electrically-conductive layer,
wherein the wiring layer and the first electrically-conductive layer each have a laminated structure including a first Ti layer, an Al layer, and a second Ti layer in order, and
wherein the pixel electrode has a configuration in which indium tin oxide (ITO) and one of aluminum (Al) or an aluminum alloy are laminated.
2. The display unit according to claim 1 , wherein
the semiconductor layer includes a gate electrode and a pair of source-drain electrodes, and
the terminal section is configured of the first electrically-conductive layer comprising a same material as a material of one of the gate electrode or the pair of source-drain electrodes.
3. The display unit according to claim 2 , wherein
the semiconductor layer includes a multilayer wiring layer, and
the terminal section is configured of the first electrically-conductive layer cmprising a same material as a material of a metal film of the multilayer wiring layer.
4. The display unit according to claim 1 , wherein the terminal section is configured of one of the first electrically-conductive layer or a laminated structure including the first electrically-conductive layer and a second electrically-conductive layer, the first electrically-conductive layer being made of one or more materials same as the material of the gate electrode, the material of the pair of source-drain electrodes, or the material of the metal film, the second electrically-conductive layer including a material configuring the pixel electrode.
5. The display unit according to claim 1 , wherein
each of the pixel electrode and the second electrically-conductive layer in the terminal section has a laminated structure including a transparent electrode film and a reflective electrode film, and
the transparent electrode film in the second electrically-conductive layer of the terminal section includes an opening.
6. The display unit according to claim 1 , wherein the terminal section has a protective film at least on both ends of the terminal section.
7. The display unit according to claim 1 , wherein the wiring layer includes a material removable by an etchant that is one of an acetic-acid-phosphoric-acid-nitric-acid-based aqueous solution, a hydrofluoric-acid-nitric-acid-based aqueous solution, or an ammonia-hydrogen-peroxide-based aqueous solution.
8. The display unit according to claim 1 , wherein the terminal section includes one or more of aluminum (Al), silver (Ag), and molybdenum (Mo).
9. The display unit according to claim 1 , wherein the terminal section includes one or both of tantalum (Ta) and tungsten (W).
10. The display unit according to claim 1 , wherein the terminal section includes one or more of titanium (Ti), titanium nitride (TiN), and copper (Cu).
11. The display unit according to claim 1 , wherein one or both of the pixel electrode and the wiring layer have a configuration in which layers having different etching characteristics are laminated.
12. The display unit according to claim 1 , wherein the semiconductor layer includes a gate electrode, a semiconductor film, and a pair of source-drain electrodes in order, or includes a semiconductor film, a gate electrode, and a pair of source-drain electrodes in order.
13. An electronic apparatus with a display unit, the display unit comprising:
a display layer including a pixel electrode;
a semiconductor layer provided in a layer below the display layer, the semiconductor layer including a wiring layer; and
a terminal section configured to electrically connect the semiconductor layer to an external circuit, the terminal section including a first electrically-conductive layer,
wherein the wiring layer and the first electrically-conductive layer each have a laminated structure including a first Ti layer, an Al layer, and a second Ti layer in order, and
wherein the pixel electrode has a configuration in which indium tin oxide (ITO) and one of aluminum (Al) or an aluminum alloy are laminated.