Duplexer
A duplexer includes a transmitting filter including serial resonators and parallel resonators connected in a ladder configuration, and a receiving filter. A resonator of the serial resonators and the parallel resonators in the transmitting filter that is arranged closest to a common terminal of the transmitting filter and the transmitting filter includes a surface acoustic wave resonator, and at least one resonator excluding the resonator that is arranged closest to the common terminal includes a film bulk acoustic wave resonator.
1. A duplexer comprising:
a transmitting filter including serial resonators and parallel resonators connected in a ladder configuration; and
a receiving filter; wherein
a resonator of the serial resonators and the parallel resonators in the transmitting filter that is arranged closest to a common terminal of the transmitting filter and the receiving filter includes a surface acoustic wave resonator;
at least one resonator excluding the resonator that is arranged closest to the common terminal is defined by a film bulk acoustic wave resonator;
the film bulk acoustic wave resonator defining at least one of the serial resonators and the parallel resonators in the transmitting filter comprises:
a substrate; and
a vibrator having a piezoelectric thin film arranged between a pair of electrodes on one of the main surfaces of the substrate, and being acoustically isolated from the substrate; and
any two adjacent sides of the vibrator including the pair of electrodes with the piezoelectric thin film sandwiched therebetween are connected to each other in a smoothly curved corner when viewed in the direction of thickness of the vibrator.
2. The duplexer according to claim 1 , wherein
the resonator that is arranged closest to the common terminal includes a parallel resonator; and
each of the parallel resonator and a serial resonator of the serial resonators in the transmitting filter that is arranged closest to the common terminal includes a surface acoustic wave resonator.
3. The duplexer according to claim 1 , wherein
the pair of electrodes have approximately the same thickness.
4. The duplexer according to claim 3 , wherein
the vibrator of the film bulk acoustic wave resonator defining at least one of the serial resonators and the parallel resonators in the transmitting filter further comprises a pair of insulating layers arranged respectively on the pair of electrodes; and
each of the pair of insulating layers has approximately the same thickness.
5. The duplexer according to claim 1 , wherein the film bulk acoustic wave resonator defining at least one of the serial resonators and the parallel resonators in the transmitting filter, further comprises:
routing wiring routed to the pair of electrodes; and
the routing wiring includes a curved portion extending smoothly along an outline of the vibrator when viewed in a direction of thickness of the vibrator and connected to the pair of electrodes with the piezoelectric thin film sandwiched therebetween.