Apparatus for manufacturing a mask
A method of manufacturing a mask includes dividing an upper surface of a template having a design pattern into a plurality of regions, the template being arranged over a polymer layer on a mask substrate, correcting a distorted region among the regions, pressing the polymer layer with the template to form a mask pattern corresponding to the design pattern on the polymer layer; and curing the mask pattern.
1. An apparatus for manufacturing a mask, the apparatus comprising:
a template having a design pattern;
a correcting unit that divides an upper surface of the template into a plurality of regions, the correcting unit being connected to each of the regions to selectively correct a distorted region among the regions;
a pressing unit that presses a polymer layer with the template to form a mask pattern corresponding to the design pattern on the polymer layer; and
a curing unit that cures the mask pattern.
2. The apparatus as claimed in claim 1 , wherein the correcting unit includes a plurality of piezo actuators.
3. The apparatus as claimed in claim 2 , wherein each of the piezo actuators is connected to one of the regions of the upper surface of the template.
4. The apparatus as claimed in claim 3 , wherein the piezo actuators are movable along two horizontal axes substantially perpendicular to each other.
5. The apparatus as claimed in claim 4 , wherein the piezo actuators are movable along a vertical axis.
6. The apparatus as claimed in claim 1 , wherein the curing unit is arranged at side of the mask pattern.
7. The apparatus as claimed in claim 6 , wherein the curing unit includes an ultraviolet light-irradiating member that irradiates an ultraviolet light to a side surface of the mask pattern.
8. The apparatus as claimed in claim 1 , wherein the correcting unit is between the upper surface of the template and the pressing unit.
9. The apparatus as claimed in claim 8 , wherein the correcting unit includes a plurality of piezo actuators between the upper surface of the template and the pressing unit.
10. The apparatus as claimed in claim 1 , wherein the correcting unit includes a plurality of piezo actuators and divides the entire upper surface of the template into a plurality of regions, a number of the piezo actuators being equal to a number of the divided regions.
11. The apparatus as claimed in claim 10 , wherein each of the piezo actuators is connected to a corresponding region of the upper surface of the template, the plurality of piezo actuators being independent of each other.
12. The apparatus as claimed in claim 1 , wherein the correcting unit divides the entire upper surface of the template into a plurality of identical regions.
13. The apparatus as claimed in claim 1 , wherein the correcting unit divides the entire upper surface of the template into a plurality of regions, the plurality of regions being arranged into a matrix pattern.
14. The apparatus as claimed in claim 13 , wherein the correcting unit includes a plurality of piezo actuators arranged in a matrix pattern corresponding to the matrix pattern of the plurality of regions.
15. The apparatus as claimed in claim 1 , wherein the correcting unit selectively corrects only a distorted region among the plurality of regions.
16. The apparatus as claimed in claim 1 , wherein the correcting unit overlaps a center of the upper surface of the template.