IP Library › Granted Patent US 9,261,699
Granted Patent B2
US 9,261,699 · App. 12/926,928 · Granted Feb 16, 2016

Microscope apparatus and storage medium storing microscope apparatus control program

Inventors: Yumiko Ouchi (Yokohama, JP); Takashi Kawahito (Fujisawa, JP)
Assignee: NIKON CORPORATION
G02B27/0068G02B7/008G02B21/16G02B2207/113
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Quick Facts
Patent No.
US 9,261,699
App. No.
12/926,928
Granted
Feb 16, 2016
Kind
B2
Abstract

A microscope apparatus includes a monitoring optical system, an imaging unit capturing an image of an observation target through the monitoring optical system to generate a plurality of images, a correction unit disposed in the optical monitoring system and correcting various aberrations which occur due to an observation condition, and a decision unit deciding a correction amount of the correction unit based on the plurality of images generated by the imaging unit, whereby an image deterioration ascribable to the aberration occurring due to the observation condition in the microscope apparatus is appropriately and easily corrected according to a use condition of the microscope apparatus.

Claims (40)

1. A microscope apparatus comprising:

a monitoring optical system including an objective lens;

a setting unit setting a focal position such that a focus of the objective lens is on an observation target;

a changing unit changing the focal position set by the setting unit along an optical axis of the monitoring optical system;

an imaging unit capturing an image of the observation target generated in the monitoring optical system to generate an image in a first state in which the focal position is moved by the changing unit by a first distance in a first direction, and capturing an image of the observation target generated in the monitoring optical system to generate an image in a second state in which the focal position is moved by the changing unit by the first distance in a second direction, the second direction being opposite to the first direction;

a correction collar correcting aberration that occurs when the focus of the objective lens is positioned at the observation target: and

an adjusting unit adjusting a rotation position of the correction collar, wherein the adjusting unit

(i) calculates a difference of an image intensity distribution between a first area of the image generated in the first state and a second area of the image generated in the second state as a first difference when the rotation position of the correction collar is at a first rotation position, in which positions on the image of the first area and the second area correspond,

(ii) calculates a difference of an image intensity distribution between the first area of the image generated in the first state and the second area of the image generated in the second state as a second difference when the rotation position of the correction collar is at a second rotation position,

(iii) calculates a difference of an image intensity distribution between the first area of the image generated in the first state and the second area of the image generated in the second state as a third difference when the rotation position of the correction collar is at a third rotation position that is between the first rotation position and the second rotation position, and

resets the third rotation position to one of the first rotation position and the second rotation position based on the first difference, the second difference, and the third difference and repeats the processes (i) to (iii).

2. The microscope apparatus according to claim 1 , wherein the adjusting unit

calculates a similarity degree between the first difference and the third difference as a first similarity degree,

calculates a similarity degree between the second difference and the third difference as a second similarity degree, and

resets the third rotation position to the second rotation position when the second similarity degree is larger than the first similarity degree.

3. The microscope apparatus according to claim 1 , wherein the adjusting unit

calculates a similarity degree between the first difference and the third difference as a first similarity degree,

calculates a similarity degree between the second difference and the third difference as a second similarity degree, and

resets the third rotation position to the first rotation position when the first similarity degree is larger than the second similarity degree.

4. The microscope apparatus according to claim 1 , wherein the adjusting unit sets the rotation position of the correction collar to the third rotation position and ends the processes when the third difference becomes a predetermined value.

5. A microscope apparatus comprising;

a monitoring optical system including an objective lens;

a changing unit changing a focal position of the objective lens along an optical axis of the monitoring optical system;

an imaging unit capturing an image of an observation target generated in the monitoring optical system while changing the focal position by the changing unit to generate a plurality of images;

a correction collar correcting aberration that occurs when a focus of the objective lens is positioned at the observation target; and

an adjusting unit adjusting a rotation position of the correction collar, wherein the adjusting unit

generates an image of a cross section in a direction parallel to the optical axis of the monitoring optical system from the plurality of images captured by the imaging unit while changing the focal position,

(i) calculates a symmetry degree of intensity distribution in the optical axis of the image of the cross section as a first symmetry degree when the rotation position of the correction collar is at a first rotation position,

(ii) calculates a symmetry degree of intensity distribution in the optical axis of the image of the cross section as a second symmetry degree when the rotation position of the correction collar is at a second rotation position,

(iii) calculates a symmetry degree of intensity distribution in the optical axis of the image of the cross section as a third symmetry degree when the rotation position of the correction collar is at a third rotation position, and

resets the third rotation position to one of the first rotation position and the second rotation position based on the first symmetry degree, the second symmetry degree, and the third symmetry degree and repeats the processes (i) to (iii).

6. The microscope apparatus according to claim 5 , wherein the adjusting unit

calculates a similarity degree between the first symmetry degree and the third symmetry degree as a first similarity degree,

calculates a similarity degree between the second symmetry degree and the third symmetry degree as a second similarity degree, and

resets the third rotation position to the second rotation position when the second similarity degree is larger than the first similarity degree.

7. The microscope apparatus according to claim 5 , wherein the adjusting unit

calculates a similarity degree between the first symmetry degree and the third symmetry degree as a first similarity degree,

calculates a similarity degree between the second symmetry degree and the third symmetry degree as a second similarity degree, and

resets the third rotation position to the first rotation position when the first similarity degree is larger than the second similarity degree.

8. The microscope apparatus according to claim 5 , wherein the adjusting unit sets the rotation position of the correction collar to the third rotation position and ends the processes when the third symmetry degree becomes a predetermined value.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Feb 23, 2011
From: OUCHI, YUMIKO; KAWAHITO, TAKASHI
To: NIKON CORPORATION
Reel/Frame 025849/0074 →
Priority Claims (1)
JP 2008-158033 · Jun 17, 2008 · national
Continuity (2)
Continuation PCTJP2009002296 · May 25, 2009
Related Publication 20110141260A1 · Jun 16, 2011