Semiconductor packages including a multi-layered dielectric layer and methods of manufacturing the same
The embedded package includes a semiconductor chip having contact portions disposed on a top surface thereof, a first dielectric layer substantially surrounding sidewalls of the semiconductor chip and including first fillers dispersed therein, a second dielectric layer substantially covering the top surface of the semiconductor chip and including second fillers dispersed therein, and first external interconnection portions disposed on the second dielectric layer and electrically connected to the contact portions, wherein an average size of the first fillers is different from that of the second fillers.
1. A method of manufacturing an embedded package, the method comprising:
providing a first dielectric layer including first fillers over a semiconductor chip and stacking a second dielectric layer including second fillers having a different average size from the first fillers on the first dielectric layer;
laminating the first and second dielectric layers on the semiconductor chip to embed the semiconductor chip in the first dielectric layer;
patterning the second dielectric layer to expose contact portions of the semiconductor chip; and
forming first external interconnection portions electrically connected to the contact portions on the second dielectric layer.
2. The method of claim 1 , wherein the second fillers have an average size which is less than 1 micrometer and the first fillers have an average size which is equal to or greater than 1 micrometer.
3. The method of claim 1 , wherein the first dielectric layer further includes a reinforcing agent having one selected from the group consisting of glass fiber, woven fiber, and carbon fiber.
4. The method of claim 1 , further comprising forming a cavity in the first dielectric layer before the first and second dielectric layers are laminated on the semiconductor chip,
wherein the semiconductor chip is inserted into the cavity during lamination of the first and second dielectric layers.
5. The method of claim 1 , further comprising forming a first conductive layer on the second dielectric layer before the first and second dielectric layers are laminated on the semiconductor chip,
wherein the first conductive layer acts as a seed layer when the first external interconnection portions are formed.
6. The method of claim 1 , further comprising mounting the semiconductor chip on a second conductive layer before the first and second dielectric layers are provided over the semiconductor chip,
wherein the second conductive layer acts as a seed layer when second external interconnection portions are formed on a bottom surface of the second conductive layer substantially opposite to the semiconductor chip.
7. The method of claim 1 , wherein each of the contact portions is formed to include a chip pad on a top surface of the semiconductor chip and a bump on a top surface of the chip pad substantially opposite to the semiconductor chip.
8. A method of manufacturing an embedded package, the method comprising:
sequentially stacking a first dielectric layer including first fillers and a second dielectric layer including second fillers that have a different average size from the first fillers;
embedding a semiconductor chip in the first and second dielectric layers such that the first dielectric layer substantially surrounds sidewalls of the semiconductor chip and the second dielectric layer substantially covers a top surface of the semiconductor chip; and
forming first external interconnection portions on the second dielectric layer,
wherein the first external interconnection portions are electrically connected to contact portions of the semiconductor chip.
9. The method of claim 8 , further comprising forming a cavity in the first dielectric layer before the semiconductor chip is embedded in the first and second dielectric layers,
wherein the semiconductor chip is inserted into the cavity when the semiconductor chip is embedded in the first and second dielectric layers.