Solid-state imaging apparatus and method for manufacturing the same
The present invention reduces color mixture (cross talk) and the degradation of sensitivity in a peripheral region of a pixel area to achieve a reduction of sensitivity irregularity in the pixel area. A solid-state imaging apparatus having a pixel area including a plurality of photoelectric conversion elements includes: a semiconductor substrate in which the plurality of photoelectric conversion elements are formed; a plurality of air gap formed layers which are arranged above the semiconductor substrate, and correspond to the photoelectric conversion elements in the plurality of photoelectric conversion elements, respectively; and air gaps arranged between the air gap formed layers in the plurality of air gap formed layers, respectively, wherein the air gap in a peripheral region B of the pixel area has a width larger than the air gap in a central region A of the pixel area.
1. A solid-state imaging apparatus having a pixel area including a plurality of light receiving elements, comprising:
a semiconductor substrate in which the plurality of light receiving elements are formed, and
an air gap layer arranged above the semiconductor substrate, and including a plurality of portions arranged correspondingly to the plurality of light receiving elements and air gaps arranged between the plurality of portions and having a refractive index lower than that of the plurality of portions, wherein
a width of the air gaps gradually increases from a central region in the pixel area toward a peripheral region in the pixel area, the widths are to be measured at the same point along the height of each of the air gaps.
2. The solid-state imaging apparatus according to claim 1 , wherein one of the plurality of portions arranged in the central region in the pixel area has a width larger than a width of another one of the plurality of portions arranged in the peripheral region in the pixel area.
3. The solid-state imaging apparatus according to claim 1 , wherein widths of the air gaps increases gradually in a direction from the central region in the pixel area to the peripheral region in the pixel area.
4. The solid-state imaging apparatus according to claim 1 , wherein the plurality of portions comprises a plurality of layers including a color filter layer that is spaced apart by the air gaps.
5. The solid-state imaging apparatus according to claim 1 , wherein the plurality of portions consist of a color filter layer that is spaced apart by the air gaps.
6. A manufacturing method of a solid-state imaging apparatus having a pixel area including a plurality of light receiving elements, comprising:
forming the plurality of light receiving elements in a semiconductor substrate;
forming a layer arranged above the semiconductor substrate; and
forming air gaps in the layer, such that a width of the air gaps gradually increases from a central region in the pixel area toward a peripheral region in the pixel area, the widths are to be measured at the same point along the height of each of the air gaps.
7. The manufacturing method according to claim 6 , wherein a first portion of the layer between the air gaps in the central region in the pixel area has a width larger than a width of a second portion of the layer between the air gaps in the peripheral region in the pixel area.
8. The manufacturing method according to claim 6 , wherein the forming air gaps includes removing a part of the layer by an etching process.