Method of manufacturing semiconductor device using the same
Provided are a deposition apparatus and a method of manufacturing a semiconductor device. In the method, a reaction chamber provided with a gaseous source supply unit and a liquid source supply unit is prepared, and an etch stop layer is formed on a substrate by using a gaseous source. Then, an interlayer insulation layer is formed on the etch stop layer by using a vaporized liquid source and a vaporized dopant source. In this way, the etch stop layer and the interlayer insulation layer are formed in-situ in the same reaction chamber.
1. A method of manufacturing a semiconductor device by using a deposition apparatus in which a gaseous source supply unit configured to store and supply a silicon-containing gaseous source and a nitrogen source each in a respective storing part, and a liquid source supply unit configured to store and supply a silicon-containing liquid source, an oxygen source, and a carbon-containing dopant source in a respective storing part are installed to be separated from each other and connected to a reaction chamber in which a reaction space is formed,
the method comprising:
forming an etch stop layer on a substrate by supplying the silicon-containing gaseous source and the nitrogen source from the gaseous source supply unit into the reaction chamber; and
forming an interlayer insulation layer on the etch stop layer by vaporizing the silicon-containing liquid source from the liquid source supply unit, supplying the vaporized silicon-containing liquid source, the oxygen source, and the dopant source into the reaction chamber,
wherein the etch stop layer and the interlayer insulation layer are formed in-situ in the reaction chamber: and
wherein the silicon-containing gaseous source is a gas containing SiH 4 and the nitrogen, the silicon-containing liquid source includes tetraethylorthosilicate (TEOS), and the reactive gas is carbon-containing gas or nitrogen-containing gas; and
the deposition apparatus further includes a reaction gas supply unit configured to store and supply a reaction gas, the method further comprising forming a liner on the etch stop layer by supplying the reaction gas from the reaction gas supply unit, the vaporized silicon-containing liquid source, and the oxygen source from the liquid source supply unit into the reaction chamber.
2. The method of claim 1 , wherein the etch stop layer, the liner, and the interlayer insulation layer are formed in-situ in the reaction chamber.
3. The method of claim 1 , the deposition apparatus further including a reaction gas supply unit configured to store and supply a reaction gas, the method further comprising forming a liner on the substrate by supplying reaction gas from the reaction gas supply unit, the vaporized silicon-containing liquid source, and the oxygen source from the liquid source supply unit into the reaction chamber.
4. The method of claim 3 , wherein the liner, the etch stop layer, and the interlayer insulation layer are formed consecutively in-situ in the reaction chamber.