Amorphous oxide and thin film transistor
The present invention relates to an amorphous oxide and a thin film transistor using the amorphous oxide. In particular, the present invention provides an amorphous oxide having an electron carrier concentration less than 10 18 /cm 3 , and a thin film transistor using such an amorphous oxide. In a thin film transistor having a source electrode 6 , a drain electrode 5 , a gate electrode 4 , a gate insulating film 3 , and a channel layer 2 , an amorphous oxide having an electron carrier concentration less than 10 18 /cm 3 is used in the channel layer 2.
1. A thin film transistor device comprising:
a drain electrode;
a source electrode;
a channel layer contacting the drain electrode and the source electrode,
wherein the channel layer is formed of an amorphous In x Sn 1−x Oxide (0.8≦x ≦0.9) consisting of SnO 2 in the presence of In 2 O 3 as a host oxide, further the channel layer is prepared by a sputtering method or a pulsed laser deposition method using a In 2 O 3 —SnO 2 polycrystalline sinter as a target in an atmosphere containing oxygen gas, and
the channel layer having a transparent, semi-insulating property represented by the electron mobility is more than 1 cm 2 /(V·sec) and the electron carrier concentration is 10 18 /cm 3 or less as measured by Hall-effect measurement at room temperature;
a gate electrode; and
a gate insulating film positioned between the gate electrode and the channel.