IP Library › Granted Patent US 9,281,297
Granted Patent B2
US 9,281,297 · App. 14/449,573 · Granted Mar 8, 2016

Solution for reducing poor contact in info packages

Inventors: Jing-Cheng Lin (Chu Tung Zhen, TW); Chen-Hua Yu (Hsin-Chu, TW); Szu Wei Lu (Hsin-Chu, TW); Shih Ting Lin (Taipei, TW); Shin-Puu Jeng (Hsin-Chu, TW)
Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
H01L25/0657H01L21/565H01L21/76802H01L21/76877H01L22/14H01L23/3107H01L23/481H01L24/09H01L24/17H01L24/19H01L24/20H01L24/81H01L25/105H01L25/50H01L23/3128H01L2224/023H01L2224/0401H01L2224/04042H01L2224/12105H01L2224/13024H01L2224/32145H01L2224/32225H01L2224/73265H01L2224/81815H01L2225/0651H01L2225/06517H01L2225/06548H01L2225/06568H01L2225/1035H01L2225/1041H01L2225/1058H01L2225/1082H01L2924/15311H01L2924/181
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Quick Facts
Patent No.
US 9,281,297
App. No.
14/449,573
Granted
Mar 8, 2016
Kind
B2
Abstract

A package includes a first package including a device die, a molding compound molding the device die therein, a through-via penetrating through the molding compound, and a first plurality of Redistribution Lines (RDLs) and a second plurality of RDLs on opposite sides of the molding compound. The through-via electrically couples one of the first plurality of RDLs to one of the second plurality of RDLs. The package further includes a second package bonded to the first package, a spacer disposed in a gap between the first package and the second package, and a first electrical connector and a second electrical connector on opposite sides of the spacer. The first electrical connector and the second electrically couple the first package to the second package. The spacer is spaced apart from the first electrical connector and the second electrical connector.

Claims (52)

1. A method comprising:

forming a first package, wherein the first package comprises:

a dielectric layer;

a plurality of redistribution lines in the dielectric layer;

a device die over and electrically coupled to the plurality of redistribution lines;

a molding material molding the device die therein; and

a through-via penetrating through the molding material;

disposing a spacer to attach to a first one of the first package and a second package;

disposing an additional spacer attached to a second one of the first package and the second package; and

bonding the first package to the second package, with the spacer aligned to the additional spacer, wherein the spacer is located between the first package and the second package.

2. The method of claim 1 , wherein the disposing the spacer comprises:

dispensing an organic material, with the organic material being a non-solid material; and

curing the organic material to convert the spacer as a solid material.

3. The method of claim 1 , wherein the disposing the spacer comprises mounting a pre-formed spacer to the first one of the first package and the second package.

4. The method of claim 1 , wherein the first package further comprises a plurality of electrical connectors, wherein the plurality of electrical connectors and the device die are on different sides of the plurality of redistribution lines, and wherein the method further comprises:

performing a functional test comprising pressing probe pins of a socket against the plurality of electrical connectors.

5. The method of claim 1 further comprising:

disposing a second dielectric layer over the device die; and

forming a plurality of solder regions penetrating through the second dielectric layer, wherein the bonding the first package to the second package comprises reflowing the plurality of solder regions.

6. A method comprising:

forming a first package, wherein the first package comprises:

an encapsulating material encapsulating a device die therein; and

a through-via penetrating through the encapsulating material;

disposing a first spacer onto a side of the first package;

disposing a second spacer onto a second package, wherein the first spacer and the second spacer are encircled by a plurality of solder regions; and

bonding the first package to the second package through a plurality of solder regions, wherein the first spacer and the second spacer are in a space between the first package and the second package.

7. The method of claim 6 , wherein the first spacer and the second spacer are physically spaced apart from the plurality of solder regions.

8. The method of claim 6 , wherein the first spacer and the second spacer are in contact with each other.

9. The method of claim 6 , wherein the first spacer and the second spacer are spaced apart from each other by a gap.

10. The method of claim 9 further comprising probing the first package, wherein during the probing, the first spacer is pushed to contact the second spacer.

11. The method of claim 9 further comprising filling an underfill between the first package and the second package, wherein the gap is an air gap encircled by the underfill.

12. The method of claim 9 further comprising filling an underfill between the first package and the second package, wherein the underfill is further filled into the gap.

13. The method of claim 6 , wherein the disposing the first spacer comprises:

dispensing a non-solid material on the first package; and

curing the non-solid material as a solid material to form the first spacer.

14. A method comprising:

forming a passivation layer on a first package, wherein the first package comprises:

an encapsulating material encapsulating a device die therein;

a plurality of through-vias penetrating through the encapsulating material; and

a plurality of metal pads on a side of the encapsulating material, wherein the plurality of metal pads is electrically coupled to the plurality of through-vias;

dispensing a non-solid material on the passivation layer;

curing the non-solid material to form a first spacer;

forming a plurality of openings in the passivation layer to reveal the plurality of metal pads; and

forming solder regions in the plurality of openings.

15. The method of claim 14 further comprising bonding the first package to a second package through the solder regions.

16. The method of claim 15 , wherein the first spacer is spaced apart from the second package, and the method further comprises probing the first package, wherein during the probing, the first spacer is pushed to contact the second package.

17. The method of claim 15 further comprising:

disposing a second spacer on the second package, wherein after the bonding, both the first spacer and the second spacer are between the first package and the second package, and the first spacer is spaced apart from the second spacer; and

probing the first package, wherein during the probing, the first spacer is pushed to contact the second spacer.

18. The method of claim 14 , wherein the solder regions are spaced apart from the first spacer.

19. The method of claim 1 , wherein the spacer is between the additional spacer and one of the first package and the second package.

20. The method of claim 6 , wherein the first spacer is between the second spacer and one of the first package and the second package.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Aug 1, 2014
From: LIN, JING-CHENG; YU, CHEN-HUA; LU, SZU WEI; LIN, SHIH TING; JENG, SHIN-PUU
To: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
Reel/Frame 033445/0461 →
Continuity (2)
Provisional Application 61949843 · Mar 7, 2014
Related Publication 20150255432A1 · Sep 10, 2015