Semiconductor element, display device, method for manufacturing semiconductor element, and method for manufacturing display device
A semiconductor element includes a semiconductor layer, a first and a second conductive unit, a gate electrode, and a gate insulating film. The semiconductor layer includes a first portion, a second portion, and a third portion provided between the first portion and the second portion. The first conductive unit is electrically connected to the first portion. The second conductive unit is electrically connected to the second portion. The gate electrode is separated from the first conductive unit, the second conductive unit, and the third portion. The gate electrode opposes the third portion. The gate insulating film is provided between the third portion and the gate electrode. A concentration of nitrogen of the first portion is higher than a concentration of nitrogen of the third portion. A concentration of nitrogen of the second portion is higher than the concentration of nitrogen of the third portion.
1. A semiconductor element comprising:
a semiconductor layer g a first portion, a second portion arranged with the first portion in a first direction, a third portion provided between the first portion and the second portion, and a fourth portion, the semiconductor layer including an oxide semiconductor;
a first conductive unit electrically connected to the first portion;
a second conductive unit separated from the first conductive unit and electrically connected to the second portion;
a gate electrode separated from the first conductive unit, the second conductive unit, and the third portion, the gate electrode opposing the third portion; and
a gate insulating film provided between the third portion and the gate electrode,
a concentration of nitrogen of the first portion being higher than a concentration of nitrogen of the third portion,
a concentration of nitrogen of the second portion being higher than the concentration of nitrogen of the third portion,
the first portion being on top of the fourth portion, and
the concentration of nitrogen of the first portion being higher than a concentration of nitrogen of the fourth portion.
2. The element according to claim 1 , wherein
the first portion is provided to extend along a second direction perpendicular to the first direction, and
the second portion is provided to extend along the second direction.
3. The element according o claim 1 , wherein
the semiconductor layer further includes a fifth portion,
the second portion is provided between the second conductive unit and the fifth portion, and
the concentration of nitrogen of the second portion is higher than a concentration of nitrogen of the fifth portion.
4. The element according to claim 1 , further comprising:
an interlayer insulating film provided between the semiconductor layer and the first conductive unit and between the semiconductor layer and the second conductive unit,
the interlayer insulating film including a first opening exposing at least a part of the first portion and a second opening exposing at least a part of the second portion,
the first conductive unit being electrically connected to at least the part of the first portion exposed by the first opening, and
the second conductive unit being electrically connected to at least the part of the second portion exposed by the second opening.
5. The element according to claim 4 , wherein
the interlayer insulating film includes a first region and a second region, the second region being provided between the semiconductor layer and the first region, and
a concentration of nitrogen of the first region is higher than a concentration of nitrogen of the second region.
6. The element according to claim 1 , wherein
the gate insulating film is provided on the gate electrode,
the semiconductor layer is provided on the gate insulating film,
the first conductive unit is provided on the first portion, and
the second conductive unit is provided on the second portion.
7. The element according to claim 6 , wherein the gate electrode opposes the entirety of the semiconductor layer.
8. The element according to claim 1 , wherein
the gate insulating film is provided on the third portion,
the gate electrode is provided on the gate insulating film,
the first conductive unit is provided on the first portion, and
the second conductive unit is provided on the second portion.
9. The element according to claim 1 , wherein the oxide semiconductor includes at least one of indium, gallium, zinc, and tin.
10. The element according to claim 1 , wherein:
a composition ratio of nitrogen in the first portion is more than 0 atomic % and 3 atomic % or less, and
a composition ratio of nitrogen in the second portion is more than 0 atomic % and 3 atomic % or less.
11. The element according to claim 1 , wherein
a resistivity of the first portion is higher than a resistivity of the third portion, and
a resistivity of the second portion is higher than the resistivity of the third portion.
12. The element according to claim 11 , wherein
the resistivity of the first portion is 10 Ω·cm or more and 10 8 Ω·cm or less,
the resistivity of the second portion is 10 Ω·cm or more and 10 8 Ω·cm or less, and
the resistivity of the third portion is 10 −4 Ω·cm or more and 100 Ω·cm or less.
13. The element according to claim 3 , wherein
a thickness of the second portion is more than 0 and 5 nm or less.
14. A display device comprising:
a semiconductor element including:
a semiconductor layer including a first portion, a second portion arranged with the first portion in a first direction, a third portion provided between the first portion and the second portion, and a fourth portion, the semiconductor layer including an oxide semiconductor;
a first conductive unit electrically connected to the first portion;
a second conductive unit separated from the first conductive unit and electrically connected to the second portion;
a gate electrode separated from the first conductive unit, the second conductive unit, and the third portion, the gate electrode opposing the third portion; and
a gate insulating film provided between the third portion and the gate electrode,
a concentration of nitrogen of the first portion being higher than a concentration of nitrogen of the third portion, and a concentration of nitrogen of the second portion being higher than the concentration of nitrogen of the third portion; and
a pixel unit including a first electrode electrically connected to the first conductive unit, a second electrode opposing the first electrode, and an organic light emitting layer provided between the first electrode and the second electrode, at least one of the first electrode and the second electrode having optical transmissivity,
the first portion being provided on top of the fourth portion, and
the concentration of nitrogen of the first portion being higher than a concentration of nitrogen of the fourth portion.
15. The element according to claim 1 , wherein
a thickness of the first portion is more than 0 and 5 nm or less.
16. The device according to claim 14 , wherein
a resistivity of the first portion is higher than a resistivity of the third portion, and
a resistivity of the second portion is higher than the resistivity of the third portion.
17. The device according to claim 16 , wherein
the resistivity of the first portion is 10 Ω·cm or more and 10 8 Ω·cm or less,
the resistivity of the second portion is 10 Ω·cm or more and 10 8 Ω·cm or less, and
the resistivity of the third portion is 10 −4 Ω·cm or more and 100 Ω·cm or less.