Apparatus for detecting a 3D structure of an object
An apparatus for detecting a 3D structure of an object. The apparatus has first and second laser emitters which generate laser radiation having first and second wavelengths, respectively, the first wavelength being different from the second wavelength. Optical devices are disclosed, including a beam splitter, which splits the laser radiation of the laser emitters in each case into a reference radiation and an illuminating radiation. The illuminating radiation impinges upon the object to be measured, is reflected by the object as object radiation and interferes with the reference radiation. A detector receives the interference patterns. The laser emitters are located such that the illuminating radiation of the first and second laser emitters impinge upon the object at different angles of incidence. Also discussed is a measuring device which measures the two wavelengths of the laser radiation of the laser emitters and influences the recording of the interference patterns.
1. Apparatus for detecting a 3D structure of an object, comprising:
a first laser emitter which generates laser radiation having a first wavelength and a second laser emitter which generates laser radiation having a second wavelength different than the first wavelength, wherein the first and second lasers are positioned such that the illuminating radiation of the first laser emitter and the illuminating radiation of the second laser emitter impinge upon the object at different angles of incidence;
optical devices, including a beam splitter which splits the laser radiation from each of the first and second laser emitters into reference radiation and illuminating radiation, wherein the illuminating radiation impinges upon the object to be measured, is reflected by the object as object radiation, and interferes with the reference radiation to form interference patterns;
a detector which records the interference patterns; and
a measuring device which measures the two wavelengths of the laser radiation of the laser emitters and influences the recording of the interference patterns.
2. The apparatus according to claim 1 , wherein the measuring device measures the time behavior of the wavelengths of the laser radiation of the laser emitters, the apparatus further comprising a control device that actuates the detector in the event of substantially constant wavelengths and triggers a recording of the interference patterns.
3. The apparatus according to claim 2 , further comprising a regulating device which, as a function of the measurement results of the measuring device, regulates the laser emitters such that the wavelengths of the emitted laser radiation are substantially constant.
4. The apparatus according to claim 2 , wherein the measuring device comprises a Fabry Perot interferometer.
5. The apparatus according to claim 1 , wherein the first laser emitter and the second laser emitter are located on a common emitter chip and spaced apart from one another.
6. The apparatus according to claim 1 , wherein at least one of the optical devices is configured to reflect the reference radiation such that the reference radiation of the individual laser emitters is incident on the detector at different reference angles of incidence.
7. The apparatus according to claim 1 , wherein at least one of the optical devices is a hologram which deflects the illuminating radiation in such a manner that it impinges upon the object as one or more illuminating strips.
8. The apparatus according to claim 1 , wherein a micro-optic array comprises the beam splitter which splits the laser radiation of the laser emitters into the reference radiation and the illuminating radiation and supplies both sets of radiation with different radiation profiles.
9. The apparatus according to claim 8 , wherein the micro-optic array comprises at least one polarizer configured to polarize the illuminating radiation.
10. The apparatus according to claim 8 , wherein the micro-optic array comprises at least one polarizer configured to polarize the reference radiation of the laser emitters.
11. The apparatus according to claim 8 , wherein the micro-optic array comprises at least one hologram.
12. The apparatus according to claim 1 , wherein at least one of the optical devices is configured as a chromatically dispersive lens or as a chromatically dispersive minor.
13. The apparatus according to claim 1 , further comprising two emitter chips and wherein the detector comprises two detectors, wherein the laser radiation of the laser emitters located on one of the two emitter chips impinges upon the one detector and the laser radiation of the laser emitters located on the other of the two emitter chips impinges upon the other detector.
14. The apparatus according to claim 1 , further comprising a measuring unit configured to measure the thickness of a layer located on the object.
15. The apparatus according to claim 14 , wherein the measuring unit comprises a white light point sensor, which operates according to the principle of frequency-scanning interferometry.
16. The apparatus according to claim 14 , wherein the measuring unit is configured to determine the thickness of the layer located on the object based on the principle of ellipsometry.
17. The apparatus according to claim 1 , further comprising optics configured to be inserted into the inner mouth region of a patient or into a bore.
18. Apparatus for detecting a 3D structure of an object, comprising:
a first laser emitter which generates laser radiation having a first wavelength and a second laser emitter which generates laser radiation having a second wavelength different than the first wavelength, wherein the first and second lasers are positioned such that the illuminating radiation of the first laser emitter and the illuminating radiation of the second laser emitter impinge upon the object at different angles of incidence;
optical devices, including a beam splitter which splits the laser radiation from each of the first and second laser emitters into reference radiation and illuminating radiation, wherein the illuminating radiation impinges upon the object to be measured, is reflected by the object as object radiation, and interferes with the reference radiation to form interference patterns;
a detector which records the interference patterns; and
a measuring device which measures the two wavelengths of the laser radiation of the laser emitters and influences the recording of the interference patterns;
wherein the first laser emitter and the second laser emitter are located on a common emitter chip and spaced apart from one another.