Method for improving surface quality of spalled substrates
A compliant material is formed between a base substrate and a support structure prior to performing a controlled spalling process. By positioning the compliant material between the base substrate and the support structure, the localized effects of surface perturbations (particles, wafer artifacts, etc.) on spalling mode fracture can be reduced. The method of the present disclosure thus leads to improved surface quality of the spalled material layer and the remaining base substrate. Moreover, the method of the present disclosure can reduce the density of cleaving artifacts.
1. A method for removing a material layer from a base substrate, said method comprising:
forming a plating seed layer on a surface of a metal-containing adhesion layer, said metal-containing adhesion layer is located atop a first surface of a base substrate;
forming a stressor layer atop an exposed surface of the plating seed layer;
depositing a compliant layer directly on a second surface of the base substrate that is opposite to said first surface prior to contacting with an underlying support structure;
securing the base substrate to said support structure, wherein said compliant layer is interposed between the second surface of the base substrate and the support structure; and
removing a material layer of said base substrate by spalling, wherein said material layer is attached to at least said stressor layer.
2. The method of claim 1 , further comprising forming an edge exclusion material on the first surface of the base substrate and at each vertical edge of the base substrate prior to forming the stressor layer.
3. The method of claim 2 , wherein said edge exclusion material comprises a photoresist material, a polymer, a hydrocarbon material, an ink, a metal, or a paste.
4. The method of claim 3 , wherein said edge exclusion material comprises said ink, and said ink is selected from alcohol and water-based inks.
5. The method of claim 1 , wherein the stressor layer comprises a metal, a polymer, a spalling inducing tape or any combination thereof.
6. The method of claim 1 , further comprises forming a handle substrate on an exposed surface of the stressor layer.
7. The method of claim 1 , wherein said spalling is performed at room temperature.
8. The method of claim 1 , wherein the stressor layer is comprised of Ni.
9. The method of claim 6 , wherein said spalling comprises pulling or peeling the handle substrate.
10. The method of claim 1 , further comprising removing at least said stressor layer from said material layer.
11. The method of claim 1 , wherein said support structure is a vacuum chuck or an electrostatic chuck.
12. The method of claim 1 , wherein said compliant layer comprises an elastomer having a Young's modulus less than the Young's modulus of the support structure, wherein said elastomer is selected from natural or synthetic rubbers, silicones, adhesives, viscoelastic gels, polyimides polyesters, polyolefins, polyacrylates, polyurethane, polyvinyl acetate, and polyvinyl chloride.
13. The method of claim 1 , wherein said compliant layer comprises a tape.
14. A method for removing a material layer from a base substrate, said method comprising:
forming a plating seed layer on a surface of a metal-containing adhesion layer, said metal-containing adhesion layer is located atop a first surface of a base substrate;
forming a stressor layer atop an exposed surface of the plating seed layer;
depositing a compliant layer directly on a second surface of the base substrate that is opposite to said first surface prior to contacting with an underlying support structure;
securing the base substrate to said support structure, wherein said compliant layer is interposed between the second surface of the base substrate and the support structure;
forming a handle substrate atop said metal stressor layer; and
removing a material layer of said base substrate by spalling, wherein said material layer is attached to at least said stressor layer, and wherein said spalling comprises pulling or peeling said handle substrate from atop said metal stressor layer.
15. The method of claim 14 , further comprising forming an edge exclusion material on the first surface of the base substrate and at each vertical edge of the base substrate prior to forming the metal stressor layer.
16. The method of claim 15 , wherein said edge exclusion material comprises a photoresist material, a polymer, a hydrocarbon material, an ink, a metal, or a paste.
17. The method of claim 16 , wherein said edge exclusion material comprises said ink, and said ink is selected from alcohol and water-based inks.
18. The method of claim 14 , wherein the metal stressor layer comprises Ni.
19. The method of claim 14 , wherein said spalling is performed at room temperature.
20. The method of claim 14 , further comprising removing at least said metal stressor layer from said material layer.
21. The method of claim 14 , wherein said support structure is a vacuum chuck or an electrostatic chuck.
22. The method of claim 14 , wherein said compliant layer comprises an elastomer having a Young's modulus less than the Young's modulus of the support structure.
23. The method of claim 14 , wherein said compliant layer comprises a tape.
24. A method for removing a material layer from a base substrate, said method comprising:
forming a plating seed layer on a surface of a metal-containing adhesion layer, said metal-containing adhesion layer is located atop a first surface of a base substrate;
forming a stressor layer atop an exposed surface of the plating seed layer;
securing a second surface of the base substrate, which is opposite said first surface of the base substrate, to a support structure, wherein a porous compliant layer is formed interposed between the second surface of the base substrate and the support structure, said porous compliant layer comprising an array of openings within a compliant material and having sidewall edges that are vertical coincident to sidewall edges of at least said base substrate; and
removing a material layer of said base substrate by spalling, wherein said material layer is attached to at least said stressor layer.