Scintillator panel and radiation detection device
A scintillator panel for converting radiation into scintillation light, includes a substrate having a front surface and a back surface, a plurality of scintillator sections formed on the front surface of the substrate so as to be separate from one another, and having upper surfaces and side surfaces extending from the upper surfaces toward the front surface of the substrate, solvent permeation blocking film formed on the upper surfaces and the side surfaces of the scintillator sections so as to cover the upper surfaces and the side surfaces of the scintillator sections, and a light shielding layer formed on the solvent permeation blocking film, that is for shielding the scintillation light, and the scintillator section is composed of a plurality of columnar crystals of a scintillator material, the solvent permeation blocking film is formed so as not to fill gaps between the side surfaces of the adjacent scintillator sections.
1. A scintillator panel for converting radiation into scintillation light, the scintillator panel comprising:
a substrate having a front surface and a back surface;
a plurality of scintillator sections formed on the front surface of the substrate so as to be separate from one another, and having upper surfaces and side surfaces extending from the upper surfaces toward the front surface of the substrate;
a solvent permeation blocking film formed on the upper surfaces and the side surfaces of the scintillator sections so as to cover the upper surfaces and the side surfaces of the scintillator sections; and
a light shielding layer formed on the solvent permeation blocking films, and for shielding the scintillation light;
wherein each scintillator section is composed of a plurality of columnar crystals of a scintillator material,
the solvent permeation blocking film is formed so as not to fill gaps between the side surfaces of the scintillator sections adjacent to one another,
the light shielding layer is formed on the solvent permeation blocking films on the side surfaces of the scintillator sections so as to fill the gaps,
the solvent permeation blocking film is integrally formed on both the upper surface and the side surface of each scintillator section and the solvent permeation blocking film is transparent to scintillation light,
the gap between the portions of the solvent permeation blocking film on the side surfaces of the scintillator section is tapered and
the scintillator sections are formed periodically in a two-dimensional array.
2. The scintillator panel according to claim 1 , wherein the light shielding layer is formed on the solvent permeation blocking film on the side surfaces of the scintillator sections, so as to cover the side surfaces of the scintillator sections.
3. The scintillator panel according to claim 1 , wherein the light shielding layer is further formed on the solvent permeation blocking film on the upper surfaces of the scintillator sections, so as to cover the upper surfaces of the scintillator sections.
4. The scintillator panel according to claim 1 , wherein a plurality of convex portions are formed periodically in a two-dimensional array and projecting from the front surface in a direction from the back surface toward the front surface of the substrate, and concave portion defined by the convex portions are formed on the substrate, and
the scintillator sections are respectively formed on the upper surfaces of the convex portions.
5. The scintillator panel according to claim 4 , wherein the solvent permeation blocking film is further formed on side surfaces of the convex portions so as to cover the side surfaces of the convex portions.
6. The scintillator panel according to claim 4 , wherein the solvent permeation blocking film is further formed on a bottom surface of the concave portion so as to cover the bottom surface of the concave portion.
7. A radiation detection device comprising:
a substrate having a plurality of photoelectric conversion elements, a front surface, and a back surface;
a plurality of scintillator sections formed on the front surface of the substrate so as to be separate from one another, and having upper surfaces and side surfaces extending from the upper surfaces toward the front surface of the substrate, the scintillator sections optically coupled to the photoelectric conversion elements,
a solvent permeation blocking film formed on the upper surfaces and the side surfaces of the scintillator sections so as to cover the upper surfaces and the side surfaces of the scintillator sections; and
a light shielding layer formed on the solvent permeation blocking films, and for shielding the scintillation light;
wherein each scintillator section is composed of a plurality of columnar crystals of a scintillator material,
the solvent permeation blocking film is formed so as not to fill gaps between the side surfaces of the scintillator sections adjacent to one another, and
the light shielding layer is formed on the solvent permeation blocking films on the side surfaces of the scintillator sections so as to fill the gaps,
the solvent permeation blocking film is integrally formed on both the upper surface and the side surface of each scintillator section and the solvent permeation blocking film is transparent to scintillation light,
the gap between the portions of the solvent permeation blocking film on the side surfaces of the scintillator section is tapered, and
the scintillator sections are formed periodically in a two-dimensional array.
8. The radiation detection device according to claim 7 , wherein the light shielding layer is formed on the solvent permeation blocking film on the side surfaces of the scintillator sections, so as to cover the side surfaces of the scintillator sections.
9. The radiation detection device according to claim 7 , wherein the light shielding layer is further formed on the solvent permeation blocking film on the upper surfaces of the scintillator sections, so as to cover the upper surfaces of the scintillator sections.
10. The radiation detection device according to claim 7 , wherein a plurality of convex portions are formed periodically in a two-dimensional array and projecting from the front surface in a direction from the back surface toward the front surface of the substrate, and concave portion defined by the convex portions are formed on the substrate,
the convex portions are formed so as to correspond to each of the photoelectric conversion elements, and
the scintillator sections are respectively formed on the upper surfaces of the convex portions.
11. The radiation detection device according to claim 10 , wherein the solvent permeation blocking film is further formed on side surfaces of the convex portions so as to cover the side surfaces of the convex portions.
12. The radiation detection device according to claim 10 , wherein the solvent permeation blocking film is further formed on a bottom surface of the concave portion so as to cover the bottom surface of the concave portion.