Complex inspection device for printed-substrate
A complex inspection device provided with an optical image pickup unit, an X-ray camera, and an X-ray irradiation unit is provided. An arrival path is defined as a route of an X-ray that arrives at the X-ray camera from the X-ray irradiation unit. The arrival path is shortened for a close-up in a close-up position. In a non-close-up position, the arrival path is longer than that in the close-up position. When the X-ray irradiation unit and/or the X-ray camera needs to move toward the close-up position, the optical pickup unit is moved out in advance so that the X-ray irradiation unit and the X-ray camera relatively move toward the close-up position.
1. A complex inspection device for a printed substrate,
comprising:
a substrate table configured to support a printed substrate on which a plurality of electronic components are mounted;
an optical imaging apparatus configured to capture an optical image of an inspection object portion of the printed substrate placed on the substrate table;
an X-ray irradiation unit configured to irradiate X-rays onto the inspection object portion;
an X-ray camera configured to capture an X-ray image of the inspection object portion from X-rays traveling through the printed substrate;
a magnification changing unit configured to change a magnification of the X-ray image by relatively displacing the X-ray irradiation unit and the X-ray camera within a range between a close-up position where an arrival path of X-rays arriving at the X-ray camera from the X-ray irradiation unit has a first distance for close-up imaging, and a non-close-up position where the arrival path has a distance longer than the first distance;
a drive unit configured to move the optical imaging apparatus between an imaging position where the optical imaging apparatus faces the inspection object portion at a space between the X-ray irradiation unit and the X-ray camera, and a withdrawn position to which the optical imaging apparatus is moved out from the imaging position so that the X-ray irradiation unit and the X-ray camera are enabled to relatively move toward the close-up position;
an imaging position control unit configured to control the drive unit such that, where at least one of the X-ray irradiation unit or the X-ray camera is required to move, the optical imaging apparatus is moved out in advance to the withdrawn position;
a table-driving mechanism configured to move the substrate table in a plane parallel to the substrate table, such that the optical imaging apparatus placed in the withdrawn position is allowed to capture an image of the inspection object portion; and
a table movement control configured to control the table-driving mechanism so as to capture an image of the inspection object portion at the withdrawn position, where the optical imaging apparatus has moved out to the withdrawn position.
2. The complex inspection device for a printed substrate according to claim 1 , wherein, where the optical imaging apparatus has moved out to the withdrawn position, the X-ray irradiation unit and the X-ray camera are configured to be relatively positioned to the close-up position, the substrate table is configured to be positioned between the X-ray irradiation unit and the X-ray camera, and thereby carrying out X-ray imaging of the inspection object portion.
3. The complex inspection device for a printed substrate according to claim 1 , configured to carry out X-ray imaging of the inspection object portion by relatively setting the X-ray irradiation unit and the X-ray camera to the non-close-up position and positioning the substrate table between the X-ray irradiation unit and the X-ray camera, and configured to carry out optical imaging of the inspection object portion by moving the optical imaging apparatus in the imaging position.
4. The complex inspection device for a printed substrate according to claim 1 , further comprising an X-ray camera movement unit for moving the X-ray camera in both of the directions in a plane parallel to the printed substrate, wherein
where capturing an oblique image is required, the oblique image being referred to as an image is captured by an X-ray traveling through the inspection object portion along a traveling direction, the traveling direction being determined for each inspection object portion, determination of the traveling direction being on a basis of a predetermined direction angle about a vertical axis wherein the respective inspection object portions are defined as an origin of the vertical axis, and on a basis of an angle of inclination with respect to the vertical axis at each inspection object portion,
the imaging position control unit is configured to control the drive unit such that the optical imaging apparatus is moved out in advance to the withdrawn position,
the table-driving mechanism is configured to position the substrate table such that X-rays are traveling through the inspection object portion along the traveling direction; and
the X-ray camera movement unit is configured to position the X-ray camera such that X-rays are traveling through the inspection object portion along the traveling direction, in a state where the X-ray irradiation unit is positioned in either one of the non-close-up position and the close-up position.
5. The complex inspection device for a printed substrate according to claim 4 , wherein the X-ray irradiation unit comprises an R axis motor configured to rotate an X-ray radiation apparatus irradiating X-rays about a vertical axis,
the complex inspection device further comprising a control unit for controlling rotation of the R axis motor such that directional characteristics of the X-ray radiation apparatus fits the traveling direction of the oblique image, when capturing the oblique image.
6. The complex inspection device for a printed substrate according to claim 2 , configured to carry out X-ray imaging of the inspection object portion by relatively setting the X-ray irradiation unit and the X-ray camera to the non-close-up position and positioning the substrate table between the X-ray irradiation unit and the X-ray camera, and configured to carry out optical imaging of the inspection object portion by moving the optical imaging apparatus in the imaging position.
7. The complex inspection device for a printed substrate according to claim 2 , further comprising an X-ray camera movement unit for moving the X-ray camera in both of the directions in a plane parallel to the printed substrate, wherein
where capturing an oblique image is required, the oblique image being referred to as an image is captured by an X-ray traveling through the inspection object portion along a traveling direction, the traveling direction being determined for each inspection object portion, determination of the traveling direction being on a basis of a predetermined direction angle about a vertical axis wherein the respective inspection object portions are defined as an origin of the vertical axis, and on a basis of an angle of inclination with respect to the vertical axis at each inspection object portion,
the imaging position control unit is configured to control the drive unit such that the optical imaging apparatus is moved out in advance to the withdrawn position,
the table-driving mechanism is configured to position the substrate table such that X-rays are traveling through the inspection object portion along the traveling direction; and
the X-ray camera movement unit is configured to position the X-ray camera such that X-rays are traveling through the inspection object portion along the traveling direction, in a state where the X-ray irradiation unit is positioned in either one of the non-close-up position and the close-up position.
8. The complex inspection device for a printed substrate according to claim 3 , further comprising an X-ray camera movement unit for moving the X-ray camera in both of the directions in a plane parallel to the printed substrate, wherein
where capturing an oblique image is required, the oblique image being referred to as an image is captured by an X-ray traveling through the inspection object portion along a traveling direction, the traveling direction being determined for each inspection object portion, determination of the traveling direction being on basis of a predetermined direction angle about a vertical axis wherein the respective inspection object portions are defined as an origin of the vertical axis, and on a basis of an angle of inclination with respect to the vertical axis at each inspection object portion,
the imaging position control unit is configured to control the drive unit such that the optical imaging apparatus is moved out in advance to the withdrawn position,
the table-driving mechanism is configured to position the substrate table such that X-rays are traveling through the inspection object portion along the traveling direction; and
the X-ray camera movement unit is configured to position the X-ray camera such that X-rays are traveling through the inspection object portion along the traveling direction, in a state where the X-ray irradiation unit is positioned in either one of the non-close-up position and the close-up position.