Method of manufacturing semiconductor laser
A method of manufacturing a semiconductor laser according to an aspect of the present invention includes (a) sequentially epitaxially growing a first cladding layer, an active layer and a second cladding layer on a semiconductor substrate composed of InP or GaAs and having a plane index of (100), (b) forming a plurality of growth start surfaces having a plane index greater than (100) in an upper surface of the second cladding layer, and (c) epitaxially growing a third cladding layer containing zinc in the plurality of growth start surfaces of the second cladding layer.
1. A method of manufacturing a semiconductor laser, comprising:
(a) sequentially epitaxially growing a first cladding layer, an active layer and a second cladding layer on a semiconductor substrate composed of InP or GaAs and having a plane index of (100);
(b) forming a plurality of growth start surfaces having a plane index greater than (100) along a waveguide direction of the semiconductor laser in an upper surface of the second cladding layer by forming a plurality of irregularities in the upper surface of the second cladding layer; and
(c) epitaxially growing a third cladding layer containing zinc in the plurality of growth start surfaces of the second cladding layer.
2. The method of manufacturing a semiconductor laser according to claim 1 , wherein a surface of the semiconductor substrate is tilted in a range of ±1° from (100).
3. The method of manufacturing a semiconductor laser according to claim 1 , wherein the plane index of the plurality of growth start surfaces of the second cladding layer is (311) or (411).
4. The method of manufacturing a semiconductor laser according to claim 3 , wherein a surface having a plane index of (100) and the plurality of growth start surfaces are provided in the upper surface of the second cladding layer.
5. The method of manufacturing a semiconductor laser according to claim 3 , wherein: in the step (b), the plurality of growth start surfaces are formed in the upper surface of the second cladding layer so that the upper surface of the second cladding layer includes a surface having a plane index of (100) and the plurality of growth start surfaces.
6. The method of manufacturing a semiconductor laser according to claim 1 , wherein a growth rate of the third cladding layer in the step (c) is smaller than a growth rate of the second cladding layer in the step (a).
7. The method of manufacturing a semiconductor laser according to claim 1 , wherein a difference between a refractive index of the second cladding layer and a refractive index of the third cladding layer is 1.0% or less.
8. The method of manufacturing a semiconductor laser according to claim 1 , further comprising (d) forming a fourth cladding layer on the second and third cladding layers.
9. The method of manufacturing a semiconductor laser according to claim 8 , further comprising (e) etching the first cladding layer, the active layer, the second cladding layer, the third cladding layer and the fourth cladding layer to form a mesa including them in a stripe shape.
10. The method of manufacturing a semiconductor laser according to claim 9 , further comprising (f) forming a first buried layer on both sides of the mesa in a stripe shape.
11. The method of manufacturing a semiconductor laser according to claim 10 , further comprising (g) forming a second buried layer on the first buried layer.
12. The method of manufacturing a semiconductor laser according to claim 11 , further comprising (h) forming a fifth cladding layer on the second buried layer and the fourth cladding layer.
13. The method of manufacturing a semiconductor laser according to claim 12 , further comprising (i) forming a contact layer on the fifth cladding layer.
14. The method of manufacturing a semiconductor laser according to claim 1 , wherein the first, second and third cladding layers are composed of InP.
15. The method of manufacturing a semiconductor laser according to claim 1 , wherein in the step (a), the first cladding layer is formed so as to include a diffraction grating having a periodic structure along the waveguide direction of the semiconductor laser.