Process for producing structure with metal film, mother die for use in the process, and structure produced by the process
The invention provides is a process for producing a structure ( 22 ) with a metal film, including the steps of preparing a mother die ( 10 ) in which a first metal film ( 16 ) is formed on the surface of a base ( 12 ) on which a concave and convex pattern ( 14 ) is formed, forming a second metal film ( 18 ) on the first metal film ( 16 ), adhering a support member ( 20 ) to the second metal film ( 18 ), and separating the second metal film ( 18 ) to which the concave and convex pattern has been transferred to the second metal film ( 18 ) together with the support member from the first metal film ( 16 ). Preferably, the first metal film ( 16 ) is a film containing Cr and Al, and the second metal film ( 18 ) is a film containing at least one metal selected from the group consisting of Au, Ag, Cu, Al, and Pt.
1. A process for producing a structure with a metal film, comprising:
preparing a mother die in which a first metal film is formed on a surface of a base on which a concave and convex pattern is formed, wherein the base is a glassy carbon processed by electron cyclotron resonance (ECR) ion beam processing and the metal of the first metal film forms an intermediate layer of a metal carbide between the first metal film and said surface of the base as a result of reaction between the metal of the first metal film with carbon of the glassy carbon of the base,
forming a second metal film on the first metal film so that the concave and convex pattern is transferred to the second metal film,
adhering a support member to the second metal film, and
separating the second metal film and the support member from the first metal film without removing the first metal film from the base, wherein the first metal film has a metal oxide film at an outermost surface of the first metal film, the support member is one selected from the group consisting of resin and glass, and a smallest gap between the convex portions of the concave and convex pattern is in a range of from 30 nm to 110 nm.
2. The process for producing a structure with a metal film according to claim 1 , wherein the first metal film is a film containing chromium or aluminum.
3. The process for producing a structure with a metal film according to claim 1 , wherein the second metal film is a film containing at least one metal selected from the group consisting of Au, Ag, Cu, Al, and Pt.
4. The process for producing a structure with a metal film according to claim 1 , wherein the second metal film is formed by vapor deposition, coating, or plating.
5. The process for producing a structure with a metal film according to claim 1 , further comprising supplying a mold release agent between the first metal film and the second metal film.
6. The process for producing a structure with a metal film according to claim 1 , wherein the concave and convex pattern is a pattern containing projections having a shape in which the diameter decreases towards a top end.