Deposition mask, producing method therefor and forming method for thin film pattern
A deposition mask for forming a thin film pattern having a predetermined shape on a substrate by deposition, includes a resin film that transmits visible light and has an opening pattern penetrating through the resin film and having the same shape and dimension as those of the thin film pattern so as to correspond to a preliminarily determined forming region of the thin film pattern on the substrate.
1. A method for producing a deposition mask, in which the deposition mask is produced by forming through a resin film that transmits visible light an opening pattern having the same shape and dimension as those of a thin film pattern so as to correspond to a preliminarily determined forming region of the thin film pattern on a substrate,
the method comprising:
a first step of bringing the film into close contact with a substrate on which the thin film pattern is to be formed, or with a reference substrate provided with a plurality of reference patterns having the same pitch as that of the thin film pattern and having the same shape and dimension of those of the thin film pattern; and
a second step of processing a portion of the film corresponding to the forming region of the thin film pattern on the substrate on which the thin film pattern is to be formed or the reference patterns on the reference substrate, to form an opening pattern having the same shape and dimension as those of the thin film pattern.
2. The method for producing a deposition mask according to claim 1 , wherein the first step is performed, after bringing a metal member having an opening formed so as to correspond to the thin film pattern and having a shape and size greater than those of the thin film pattern, into close contact with one surface of the film, thereby forming a masking member, by aligning the masking member so that the region corresponding to the forming region of the thin film pattern on the substrate on which the thin film pattern is to be formed, or the reference patterns on the reference substrate is within the openings.
3. The method for producing a deposition mask according to claim 2 , wherein the masking member is formed by thermo compression bonding the metal member with the film under a predetermined temperature and pressure.
4. The method for producing a deposition mask according to claim 2 , wherein the masking member is formed by adhesive bonding the metal member with the film.
5. The method for producing a deposition mask according to claim 2 , wherein the masking member is formed by press-bonding the metal member with a resin for the film, that has been applied on an upper surface of a flat plate-shaped substrate and dried into a semi-dry state, followed by completely drying the resin.
6. The method for producing a deposition mask according to claim 2 , wherein the masking member is formed by applying a resin solution for the film on an upper surface of the metal member placed on an upper surface of a flat plate-shaped substrate, and drying the solution into a film.
7. The method for producing a deposition mask according to claim 2 , wherein the masking member is formed by plating one surface of the film with the metal member.
8. The method for producing a deposition mask according to claim 7 , wherein the film is retained on a stage having a flat surface by electrostatic attraction.
9. The method for producing a deposition mask according to claim 7 , wherein the film is formed by applying a resin transmitting visible light on a flat plate-shaped substrate, and drying the resin.
10. The method for producing a deposition mask according to claim 2 , wherein the first step includes etching a surface of the film of the masking member to reduce the thickness of at least a portion of the film corresponding to the opening of the metal member, followed by performing the alignment of the masking member to the substrate on which the thin film pattern is to be formed or the reference substrate.
11. The method for producing a deposition mask according to claim 2 , wherein
the metal member is made of a magnetic material or a non-magnetic material, and
the first step includes placing the substrate on which the thin film pattern is to be formed or the reference substrate on a stage having a chucking device provided therein, and attracting the metal member on to the substrate on which the thin film pattern is to be formed or the reference substrate by the chucking device to thereby sandwich the film.
12. The method for producing a deposition mask according to claim 2 , wherein
the reference substrate is a transparent substrate of which one surface is provided with the reference patterns, and
the second step includes aligning the metal member to the reference substrate placed on the stage so that the reference patterns are on an under side of the reference substrate, so that the reference patterns are present in the openings of the metal member, followed by bringing the film into close contact with the other surface of the reference substrate and irradiating, with laser light, portions of the film corresponding to the reference patterns in the openings of the metal member, to form the opening pattern.
13. The method for producing a deposition mask according to claim 12 , wherein the second step includes scanning the metal member, the film and the reference substrate together, meanwhile capturing images of the reference patterns by an image capturing device provided to be capable of capturing images of positions on the upstream side of an irradiation position of the laser light in the scanning direction, detecting the reference patterns based on the captured images, and performing the second step while controlling irradiation timings of the laser light based on the detection times.
14. The method for producing a deposition mask according to claim 13 , wherein the second step is performed while confirming that the position error amount between the center of the opening of the metal member and the center of the reference pattern of the reference substrate is within a tolerable range based on a captured image of the image capturing device.
15. The method for producing a deposition mask according to claim 12 , which includes peeling the film from the reference substrate after the second step.
16. A method for forming the thin film pattern, in which the thin film pattern is formed by using the deposition mask that has been produced by forming, through the resin film that transmits visible light, the opening pattern having the same shape and dimension as those of the thin film pattern so as to correspond to a preliminarily determined forming region of the thin film pattern on the substrate, by the method according to claim 2 ;
wherein the method for forming the thin film pattern comprises:
a third step of placing on the substrate the deposition mask that has been produced by providing a metal member on the outside portion of the opening pattern of the film, in a state in which the opening pattern is aligned to the forming region of the thin film pattern on the substrate; and
a fourth step of performing deposition on the forming region of the thin film pattern on the substrate through the opening pattern of the deposition mask to form the thin film pattern.
17. The method for forming the thin film pattern according to claim 16 , wherein the metal member is a thin plate having an opening having a shape and dimension greater than those of the opening pattern so as to correspond to the opening pattern, and the metal member is brought into close contact with one surface of the film.
18. The method for forming the thin film pattern according to claim 16 , wherein the metal member is a plurality of thin pieces provided so as to be distributed on one surface of the film or inside of the film.
19. The method for forming the thin film pattern according to claim 16 , wherein the third step includes retaining the deposition mask so that the metal member side thereof is attracted to contact a flat surface of a retaining device, meanwhile aligning the deposition mask so that the opening pattern is aligned to the forming region of the thin film pattern of the substrate placed on a chucking device, followed by attracting the metal member by the chucking device to transfer the deposition mask from the retaining device to on the substrate.
20. The method for forming the thin film pattern according to claim 16 , wherein the thin film pattern is a plurality of sorts of thin film patterns and the opening pattern is formed through the film so as to correspond to one sort of thin film pattern among the plurality of sorts of thin film patterns and
wherein the method for forming the thin film pattern further comprises:
a step of peeling the deposition mask from the substrate after performing the first and the second steps to form one sort of thin film pattern;
a step of aligning the opening pattern of the deposition mask to the forming region of another thin film pattern of the substrate, and placing the deposition mask onto the substrate; and
a step of performing deposition on a forming region of another thin film pattern through the opening pattern of the deposition mask, to form another thin film pattern.
21. The method for forming the thin film pattern according to claim 20 , wherein the substrate is a TFT substrate for an organic EL display, and the plurality of sorts of thin film patterns are organic EL layers for three colors.
22. The method for forming the thin film pattern according to claim 16 , wherein the thin film pattern is a plurality of sorts of thin film patterns formed so as to be arranged at a predetermined pitch, and the opening pattern formed through the film is one formed so as to correspond to one sort of thin film pattern among the plurality of sorts of thin film patterns, and
wherein the method for forming the thin film pattern further comprises:
a step of sliding the deposition mask on the substrate along an arrangement direction of the plurality of sorts of thin film patterns by the same distance as the arrangement pitch of the plurality of sorts of thin film patterns after performing the third step and the fourth step to form one sort of thin film pattern; and
a step of performing deposition on a forming region of another thin film pattern through the opening pattern of the deposition mask, to form another thin film pattern.
23. The method for forming the thin film pattern according to claim 22 , wherein the substrate is a TFT substrate for an organic EL display, and the plurality of sorts of thin film patterns are organic EL layers for three colors.
24. The method for producing a deposition mask according to claim 1 , wherein the second step is performed by irradiating the portion of the film with laser light.
25. The method for producing a deposition mask according to claim 24 , wherein the second step includes irradiating the film with laser light having a predetermined energy density to process the film at a predetermined speed to form a hole of a predetermined depth, followed by irradiating a bottom portion of the hole with laser light having a lowered energy density to process the portion at a lower speed than the above speed to make the hole penetrate through the film.
26. The method for producing a deposition mask according to claim 25 , wherein the irradiation with laser light having a lowered energy density is performed in a reactive gas atmosphere that reacts with carbon of the film to evaporate the carbon.
27. The method for producing a deposition mask according to claim 24 , wherein the laser light has a wavelength of 400 nm or shorter.
28. The method for producing a deposition mask according to claim 1 , wherein the second step includes irradiating the film with laser light having a predetermined energy density to form the hole in the film, followed by etching the bottom portion of the hole by using a reactive gas that reacts with the carbon of the film to evaporate the carbon, or by using radical ions produced by ionizing the reactive gas, to make the hole penetrate through the film.