Helmholtz type differential acoustic resonator detection device

1. A microelectronic photoacoustic detection device comprising

at least one substrate comprising cavities forming a Helmholtz type differential acoustic resonator;

acoustic detectors coupled to two of said cavities forming chambers of the resonator;

a light source capable of emitting a light beam at at least one given wavelength;

an optical waveguide comprising a first end optically coupled to the light source and a second end optically coupled to a first of the two chambers;

in which the second end comprises, at an interface with the first chamber, a width of value greater than that of the width of the first end and greater than that of said at least one given wavelength, and/or in which the photoacoustic detection device comprises at least one diffraction grating arranged in the second end of the waveguide and capable of diffracting a first part of the light beam towards a lower reflective layer arranged under the second end and a second part of the light beam towards an upper reflective layer arranged at an upper wall of the first chamber.

2. Device according to claim 1 , in which the ratio between the width of the second end at the interface with the first chamber and the width of the first end is greater than or equal to 3.

3. Device according to claim 1 , in which the second end forms a portion of the waveguide of which the width increases from a first value equal to that of the width of the first end up to a second value equal to that of the width of the second end at the interface with the first chamber.

4. Device according to claim 3 , in which the width of the second end increases on a part, called first part, of the second end of which the length is greater than or equal to around ten times the width of the second end at the interface with the first chamber.

5. Device according to claim 1 , in which the diffraction grating is arranged in a part, called second part, of the second end of which the width is substantially constant and equal to that at the interface with the first chamber.

6. Device according to claim 1 , in which the diffraction grating is arranged at an interface between a core layer of the waveguide and a lower cladding layer of the waveguide, the lower cladding layer being arranged between the core layer and the lower reflective layer.

7. Device according to claim 1 , in which the diffraction grating is capable of diffracting the light beam such that the first or the second part of the light beam reaches, after a reflection on the lower reflective layer and/or the upper reflective layer, a bottom wall of the first chamber which is opposite to that in contact with the second end of the waveguide.

8. Device according to claim 1 , in which the acoustic detectors are arranged in a first substrate and coupled to the chambers of the resonator formed in a second substrate made integral with the first substrate, volumes of the chambers communicating together via capillaries formed in a third substrate made integral with the second substrate.

9. Device according to claim 1 , in which the acoustic detectors are arranged in a first substrate and coupled to the chambers of the resonator formed in a second substrate made integral with the first substrate, volumes of the chambers communicating together via capillaries formed in the second substrate, the second substrate having a thickness less than 300 μm.

10. Device according to claim 1 , further comprising trenches filled with at least one optically reflective material and arranged around the first chamber.

11. Device according to claim 1 , in which the two chambers comprise dimensions different to each other.

12. Device according to claim 1 , in which the acoustic detectors comprise beam type piezoresistive microphones.

13. A gas detection device, comprising at least one microelectronic photoacoustic detection device according to claim 1 and further comprising gas inlet and outlet channels communicating with the chambers of the resonator and in which the wavelength intended to be emitted by the light source corresponds to an absorption wavelength of a gas intended to be detected.

14. A method of producing a microelectronic photoacoustic detection device, comprising at least the steps of:

forming, in at least one substrate, an optical waveguide comprising a first end and a second end,

forming a light source capable of emitting a light beam at at least one given wavelength and such that the light source is optically coupled to the first end of the waveguide,

forming, in said at least one substrate, cavities forming a Helmholtz type differential acoustic resonator, two of said cavities forming chambers of the resonator such that a first of the two chambers is optically coupled with the second end of the waveguide,

coupling of the acoustic detectors with the chambers of the resonator,

in which the second end comprises, at an interface with the first chamber, a width of value greater than that of the width of the first end and greater than that of said at least one given wavelength, and/or in which the method comprises the formation of at least one diffraction grating in the second end of the waveguide capable of diffracting a first part of the light beam towards a lower reflective layer arranged under the second end and a second part of the light beam towards an upper reflective layer arranged at an upper wall of the first chamber.