IP Library Granted Patent US 9,335,629
Granted Patent B2
US 9,335,629 · App. 13/546,378 · Granted May 10, 2016

Self-assembly of block copolymers on topographically patterned polymeric substrates

Inventors: Thomas P. Russell (Amherst, MA); Soojin Park (Ulsan, KR); Dong Hyun Lee (Amherst, MA); Ting Xu (Berkeley, CA)
Assignees: THE UNIVERSITY OF MASSACHUSETTS; THE REGENTS OF THE UNIVERSITY OF CALIFORNIA
G03F7/0002B81C1/00031B82Y10/00B82Y40/00B81C2201/0149Y10T428/24802Y10T428/249953
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Quick Facts
Patent No.
US 9,335,629
App. No.
13/546,378
Granted
May 10, 2016
Kind
B2
Abstract

Highly-ordered block copolymer films are prepared by a method that includes forming a polymeric replica of a topographically patterned crystalline surface, forming a block copolymer film on the topographically patterned surface of the polymeric replica, and annealing the block copolymer film. The resulting structures can be used in a variety of different applications, including the fabrication of high density data storage media. The ability to use flexible polymers to form the polymeric replica facilitates industrial-scale processes utilizing the highly-ordered block copolymer films.

Claims (15)

1. A layered article, comprising:

a polymer layer comprising a topographically patterned surface formed by contact with a topographically patterned surface of a single crystal substrate; wherein the topographically patterned surface of the single crystal substrate is a substantially planar surface at least one degree removed from any crystallographic plane of the single crystal substrate; and

a block copolymer film comprising a surface in contact with the patterned surface of the polymer layer; wherein the block copolymer film consists of a block copolymer selected from the group consisting of polystyrene-b-poly(4-vinylpyridine)s, polystyrene-b-poly(2-vinylpyridine)s, and polystyrene-b-poly(ethylene oxide)s wherein the block copolymer film is an annealed block copolymer film and the annealed block copolymer film comprises a hexagonal array of cylindrical microdomains.

2. The layered article of claim 1 , wherein the hexagonal array of cylindrical microdomains exhibits an orientation order of at least 0.9 over an area of at least 1 centimeter 2 .

3. The layered article of claim 1 , wherein the hexagonal array of cylindrical microdomains exhibits an orientation order greater than that of the topographically patterned surface of the polymer layer.

4. The layered article of claim 1 , wherein the cylindrical microdomains are separated by a nearest-neighbor distance of about 10 to about 100 nanometers.

5. The layered article of claim 1 , wherein the topographically patterned surface of the polymer layer comprises a sawtooth pattern characterized by a peak-to-peak separation, L R ; wherein the block copolymer film comprises a hexagonal array of cylindrical microdomains characterized by a nearest-neighbor microdomain separation, L BCP ; and wherein L R /L BCP has a value of about 1 to about 10.

6. The layered article of claim 1 , wherein the topographically patterned surface of the polymer layer comprises a sawtooth pattern characterized by a period of about 24 to about 200 nanometers and an amplitude of about 3 to about 20 nanometers.

7. The layered article of claim 1 , wherein the topographically patterned surface of the polymer layer comprises a grooved pattern characterized by a groove depth of about 3 to about 20 nanometers and a groove-to-groove separation of about 24 to about 200 nanometers.

8. The layered article of claim 1 , wherein the block copolymer film is an annealed and solvent-reconstructed block copolymer film.

9. The layered article of claim 1 ,

wherein the block copolymer film comprises a polystyrene-b-poly(ethylene oxide);

wherein the polystyrene-b-poly(ethylene oxide) comprises a polystyrene block having a number average molecular weight of 6,000 to 30,000 atomic mass units and a poly(ethylene oxide) block having a number average molecular weight of 2,000 to 10,000 atomic mass units; and

wherein a ratio of the number average molecular weight of the polystyrene block to the number average molecular weight of the poly(ethylene oxide) block is 2:1 to 6:1.

10. The layered article of claim 1 , wherein the block copolymer film has a thickness of about 10 to about 100 nanometers.

Assignments (2)
CONFIRMATORY LICENSE Recorded Aug 2, 2016
From: UNIVERSITY OF MASSACHUSETTS, AMHERST
To: NATIONAL SCIENCE FOUNDATION
Reel/Frame 039310/0272 →
CONFIRMATORY LICENSE Recorded Jul 24, 2012
From: UNIVERSITY OF MASSACHUSETTS
To: NATIONAL SCIENCE FOUNDATION
Reel/Frame 028622/0456 →
Continuity (4)
Division 12553484 · Sep 3, 2009
Provisional Application 61170707 · Apr 20, 2009
Provisional Application 61098253 · Sep 19, 2008
Related Publication 20120276346A1 · Nov 1, 2012