Semiconductor buffer structure, semiconductor device including the semiconductor buffer structure, and method of manufacturing the semiconductor device using the semiconductor buffer structure
A semiconductor buffer structure includes a silicon substrate, a nucleation layer formed on the silicon substrate, and a buffer layer formed on the nucleation layer. The buffer layer includes a first layer formed of a nitride semiconductor material having a uniform composition rate, a second layer formed of the same material as the nucleation layer on the first layer, and a third layer formed of the same material with the same composition ratio as the first layer on the second layer.
1. A semiconductor buffer structure between a silicon substrate and a nitride semiconductor layer comprising:
a nucleation layer directly on the silicon substrate, the nucleation layer including a material having a uniform composition ratio; and
a buffer layer directly on the nucleation layer, the buffer layer including:
a first layer including a nitride semiconductor material having a uniform composition ratio, the first layer having a first lattice constant which is smaller than a lattice constant of the nitride semiconductor layer;
a second layer, including a same material as the nucleation layer, directly on the first layer, the second layer having a second lattice constant which is equal to a lattice constant of the nucleation layer; and
a third layer, including a same material and a same composition ratio as the first layer, directly on the second layer, the third layer having a third lattice constant which is equal to the first lattice constant,
wherein the nitride semiconductor layer is disposed directly on the third layer.
2. The semiconductor buffer structure of claim 1 , wherein the nucleation layer comprises AlN.
3. The semiconductor buffer structure of claim 1 , wherein a thickness of the first layer is in a range of 50 nm-500 nm.
4. The semiconductor buffer structure of claim 1 , wherein the first layer comprises BxAlyInzGa1-x-y-zN (0≦x<1, 0<y<1, 0≦z<1, and 0≦x+y+z<1).
5. The semiconductor buffer structure of claim 1 , wherein a thickness of the second layer is in a range of 1 nm-200 nm.
6. The semiconductor buffer structure of claim 1 , wherein compressive stress is formed on the buffer layer.
7. A semiconductor device comprising:
a silicon substrate;
a nucleation layer directly on the silicon substrate, the nucleation layer including a material having a uniform composition ratio; and
a buffer layer directly on the nucleation layer, the buffer layer including:
a first layer including a nitride semiconductor material having a uniform composition ratio;
a second layer, including a same material as the nucleation layer, directly on the first layer; and
a third layer, including a same material and a same composition ratio as the first layer, directly on the second layer;
a nitride semiconductor layer directly on the third layer, wherein
the first layer has a first lattice constant which is smaller than a lattice constant of the nitride semiconductor layer, the second layer has a second lattice constant which is equal to a lattice constant of the nucleation layer, and the third layer has a third lattice constant which is equal to the first lattice constant.
8. The semiconductor device of claim 7 , wherein the nucleation layer comprises AlN.
9. The semiconductor device of claim 7 , wherein the first layer comprises BxAlyInzGa1-x-y-zN (0≦x<1, 0<y<1, 0≦z<1, and 0≦x+y+z<1).
10. The semiconductor device of claim 7 , wherein a thickness of the second layer is in a range of 1 nm-200 nm.
11. The semiconductor device of claim 7 , wherein the buffer layer applies compressive stress to the nitride semiconductor layer.
12. The semiconductor device of claim 7 , further comprising a device layer on the nitride semiconductor layer.
13. The semiconductor device of claim 12 , wherein the device layer comprises one of a Light Emitting Diode (LED), a Laser Diode (LD), a Field Effect Transistor (FET), a High Electron Mobility Transistor (HEMT), and a Schottky diode.
14. A semiconductor device comprising:
a silicon substrate;
a nucleation layer directly on the silicon substrate, the nucleation layer including a material having a uniform composition ratio; and
a buffer layer directly on the nucleation layer, the buffer layer including:
a first layer including a nitride semiconductor material having a uniform composition ratio;
a second layer, including a same material as the nucleation layer, directly on the first layer;
a third layer, including a same material and a same composition ratio as the first layer, directly on the second layer;
a fourth layer, including the same material as the nucleation layer, directly on the third layer; and
a fifth layer, including the same material with the same composition ratio as the first layer, directly on the fourth layer;
a nitride semiconductor layer directly on the fifth layer, wherein
the first layer has a first lattice constant which is smaller than a lattice constant of the nitride semiconductor layer, the second layer has a second lattice constant which is same as a lattice constant of the nucleation layer, and the third layer has a third lattice constant which is same as the first lattice constant.
15. A method of manufacturing a semiconductor device, the method comprising:
providing a silicon substrate;
forming a nucleation layer including a material having a uniform composition ratio, directly on the silicon substrate;
forming a buffer layer directly on the nucleation layer, in which the buffer layer comprises a first layer formed of a nitride semiconductor material having a uniform composition rate, a second layer formed of the same material as the nucleation layer directly on the first layer, and a third layer formed of the same material with the same composition ratio as the first layer directly on the second layer; and
forming a nitride semiconductor layer directly on the third layer, wherein
the first layer has a first lattice constant which is smaller than a lattice constant of the nitride semiconductor layer, the second layer has a second lattice constant which is equal to a lattice constant of the nucleation layer, and the third layer has a third lattice constant which is equal to the first lattice constant.
16. The method of claim 15 , further comprising:
forming a device layer on the nitride semiconductor layer.
17. The method of claim 15 , further comprising:
removing the silicon substrate.
18. The method of claim 17 , wherein at least a portion of the nucleation layer and the buffer layer is removed together when the silicon substrate is removed.
19. The method of claim 18 , further comprising:
forming a concave-convex pattern on a surface exposed by removal of the silicon substrate.