Substrate processing apparatus
A substrate processing apparatus capable of removing deposits attached on a component of a lower temperature in a gap between two components, temperatures of which are greatly different from each other, without degrading a working ratio of the substrate processing apparatus. In the substrate processing apparatus, a chamber receives a wafer, a focus ring surrounds the wafer disposed in the chamber, a side surface protective member transmits a laser beam, a laser beam irradiating apparatus irradiates the laser beam to the side surface protective member, an inner focus ring of the focus ring is disposed adjacent to the wafer and is cooled down and an outer focus ring surrounds the inner focus ring and is not cooled down in a focus ring, and a facing surface of the side surface protective member faces a gap between the inner focus ring and the outer focus ring.
1. A substrate processing apparatus comprising:
a processing chamber which receives a substrate;
a focus ring which surrounds a periphery of the substrate disposed in the processing chamber;
a laser beam transmission member which transmits a laser beam; and
a laser beam irradiating apparatus which irradiates a laser beam to the laser beam transmission member,
wherein the focus ring comprises an inner focus ring which is disposed adjacent to the substrate and is cooled down, and an outer focus ring that surrounds the inner focus ring and is not cooled down,
a gap is provided between the inner focus ring and the outer focus ring, and
the laser beam transmission member is provided only below the outer focus ring and has a slant facing surface that faces a side surface of the inner focus ring such that the laser beam is irradiated toward the side surface of the inner focus ring from the slant facing surface.
2. The substrate processing apparatus of claim 1 , wherein the laser beam transmission member is formed of quartz, the outer focus ring is formed of silicon or silicon carbide, and the laser beam has a wavelength of 1100 nm or less.
3. The substrate processing apparatus of claim 2 , wherein the laser beam irradiating apparatus also irradiates laser beams that are different from the laser beam having the wavelength of 1100 nm or less.
4. The substrate processing apparatus of claim 1 , wherein the inner focus ring and the outer focus ring are formed of silicon or silicon carbide, and the laser beam has a wavelength greater than 1100 nm.