Nonvolatile semiconductor memory
A nonvolatile semiconductor memory according to an embodiment includes: a semiconductor region; a first insulating film formed on the semiconductor region; a charge storage film formed on the first insulating film; a hydrogen diffusion preventing film formed on the charge storage film; a second insulating film formed on the hydrogen diffusion preventing film; a control gate electrode formed on the second insulating film; a hydrogen discharge film formed on the control gate electrode; and a sidewall formed on a side surface of a multilayer structure including the first insulating film, the charge storage film, the hydrogen diffusion preventing film, the second insulating film, and the control gate electrode, the sidewall containing a material for preventing hydrogen from diffusing.
1. A nonvolatile semiconductor memory comprising:
a multilayer structure in which control gate electrodes and interelectrode insulating films are alternately stacked, the multilayer structure having a through-hole extending in a stacking direction of the multilayer structure;
a semiconductor region provided in the through-hole and extending in a direction along which the through-hole extends;
a first insulating film provided between the semiconductor region and the multilayer structure;
a charge storage film provided between the first insulating film and the multilayer structure;
a second insulating film provided between the charge storage film and the multilayer structure; and
a film provided on an outer periphery of the multilayer structure in a direction along which the through-hole extends, the film including a silicon nitride film with boron and extending along the control gate electrodes and interelectrode insulating films.
2. A memory according to claim 1 , wherein the film has a density of 2.6 g/cm 2 or less.
3. A memory according to claim 1 , wherein the semiconductor region has a column shape and the through-hole is filled with the semiconductor region.
4. A memory according to claim 1 , wherein each of the first insulating film, the charge storage film, and the second insulating film has a cylindrical shape.
5. A memory according to claim 1 , wherein the first insulating film has one of an Oxide-Nitride-Oxide structure, an Oxide-Nitride-Oxide-Nitride-Oxide structure, an Oxide-Silicon-Oxide structure, and an Oxide-Silicon-Oxide-Silicon-Oxide structure.
6. A memory according to claim 1 , wherein the charge storage film contains Si X N (x>0.75).
7. A memory according to claim 1 , wherein the second insulating film contains lanthanum aluminum silicon oxide.
8. A memory according to claim 1 , wherein the semiconductor region contains crystallized amorphous silicon.
9. A memory according to claim 1 , wherein the charge storage film contains boron-doped polycrystalline silicon.