High-energy ion implanter

1. A high-energy ion implanter that accelerates an ion beam extracted from an ion source, transports the ion beam to a wafer along a beamline, and implants the ion beam into the wafer, the high-energy ion implanter comprising:

a beam generation unit that includes an ion source and a magnetic field type mass analyzer;

a radio frequency multi-stage linear acceleration unit that accelerates the ion beam so as to generate a high-energy ion beam;

a deflection unit that includes a magnetic field type energy analysis device for filtering ions by a momentum while changing the direction of the high-energy ion beam toward the wafer;

a beam transportation line unit that transports the deflected high-energy ion beam to the wafer; and

a substrate processing/supplying unit that uniformly implants the transported high-energy ion beam into the wafer,

wherein the beam transportation line unit includes a high-energy beam scanner and an electric field type beam collimator for high-energy,

wherein the high-energy ion beam emitted from the deflection unit is scanned by the beam scanner and collimated by the electric field type beam collimator and is implanted into the wafer, and

wherein an electric field type final energy filter that deflects the high-energy scan beam in the vertical direction by an electric field is inserted between the electric field type beam collimator and the wafer, in addition to the magnetic field type mass analyzer and the magnetic field type energy analysis device that operate as momentum filters, and the radio frequency multi-stage linear acceleration unit that operates as a velocity filter.

2. The high-energy ion implanter according to claim 1 ,

wherein the final energy filter includes n pairs, where n is an integer equal to or larger than 1, of deflection electrodes that deflect the scanned ion beam in a direction perpendicular to the scan direction,

wherein the n pairs of deflection electrodes are disposed so that each pair of deflection electrodes is disposed with a gap therebetween along the beamline,

wherein the deflection electrode is a plate-shaped member that is widened in an ion beam traveling direction and a scan direction, and each pair of deflection electrodes is disposed so as to face each other with a predetermined gap therebetween so that the beamline is interposed from the vertical direction, and

wherein the n pairs of deflection electrodes are formed so that the deflection angles gradually increase from the upstream side toward the downstream side of the beamline.

3. The high-energy ion implanter according to claim 2 ,

wherein in the n pairs of deflection electrodes, the n number of upper deflection electrodes disposed above the beamline are configured so as to have the same first potential, and

wherein in the n pairs of deflection electrodes, the n number of lower deflection electrodes disposed below the beamline are configured so as to have the same second potential.

4. The high-energy ion implanter according to claim 3 ,

wherein the n number of upper deflection electrodes have the same shape, and

wherein the n number of lower deflection electrodes have the same shape.

5. The high-energy ion implanter according to claim 3 ,

wherein the n number of upper deflection electrodes include a plurality of deflection electrodes having different lengths in the beam traveling direction.

6. The high-energy ion implanter according to claim 3 ,

wherein then number of lower deflection electrodes include a plurality of deflection electrodes having different lengths in the beam traveling direction.

7. The high-energy ion implanter according to claim 3 ,

wherein the n number of upper deflection electrodes or/and the n number of lower deflection electrodes include a plurality of deflection electrodes having asymmetric vertical shapes and having different gaps with respect to a center orbit of the ion beam.

8. The high-energy ion implanter according to claim 2 ,

wherein the deflection electrode is formed so that its inner surface facing the beamline is formed as a plane, and

wherein the n pairs of deflection electrodes are disposed so that the direction of each inner surface is approximately parallel to a trajectory of the deflected ion beam.

9. The high-energy ion implanter according to claim 2 ,

wherein the n pairs of deflection electrodes includes three pairs of deflection electrodes.

10. The high-energy ion implanter according to claim 2 , further comprising:

an upstream ground electrode and a downstream ground electrode that are disposed at the downstream side of the beamline of the final energy filter and each include an opening in an ion beam passage region; and

a suppression electrode that is disposed between the upstream ground electrode and the downstream ground electrode,

wherein when the width and the length of the opening of the upstream ground electrode are indicated by W 1 and H 1 , the width and the length of an opening of the suppression electrode are indicated by W 2 and H 2 , and the width and the length of the opening of the downstream ground electrode are indicated by W 3 and H 3 , a relation of W 1 <W 2 , a relation of W 3 <W 2 , a relation of H 1 <H 2 , and a relation of H 3 <H 2 are satisfied.

11. The high-energy ion implanter according to claim 10 , further comprising:

a current measurement device that is provided at the downstream side of the deflection electrode and measures a current amount of the implanted ion beam,

wherein the deflection electrode is configured to deflect the scanned high-energy ion beam in a direction perpendicular to the scan direction even in an end region at the outside of a valid implantation region where the ion implantation with respect to the wafer is valid,

wherein the current measurement device is disposed at the downstream side of the end region of the deflection electrode, and

wherein the suppression electrode is configured to suppress the outflow of electrons from the current measurement device.

12. The high-energy ion implanter according to claim 2 ,

wherein the deflection electrode is configured to deflect the scanned high-energy ion beam in a direction perpendicular to the scan direction even in an end region at the outside of a valid implantation region where the ion implantation with respect to the wafer is valid.

13. The high-energy ion implanter according to claim 2 ,

wherein the deflection electrode is disposed inside a vacuum container, and a plurality of holes communicating with a space above or below the beamline are arranged so as to uniformly maintain the electric field.

14. The high-energy ion implanter according to claim 2 ,

wherein the deflection electrode is formed so that its inner surface facing the beamline is formed by graphite.

15. The high-energy ion implanter according to claim 1 ,

wherein the final energy filter includes a pair of deflection electrodes that deflects the scanned ion beam in a direction perpendicular to the scan direction,

wherein the pair of deflection electrodes is disposed with a gap therebetween along the beamline,

wherein the deflection electrodes are plate-shaped members that are widened in an ion beam traveling direction and a scan direction, and are disposed so as to face each other with a predetermined gap therebetween so that the beamline is interposed from the vertical direction, and

wherein in the pair of deflection electrodes, the inner surfaces facing the beamline are formed as circular-arc curved surfaces or multi-stage bended planes so that the deflection angles gradually increase from the upstream side toward the downstream side of the beamline.

16. The high-energy ion implanter according to claim 1 ,

wherein the wafer is a semiconductor wafer.