Semiconductor devices and methods of fabricating the same
Provided is a semiconductor device including a substrate, first and second gate structures provided on the substrate, a source/drain region provided adjacent to the first gate structure, an interlayered insulating layer provided on the substrate to cover the source/drain region and the first and second gate structures, a source/drain contact hole penetrating the interlayered insulating layer and exposing the source/drain region, a trench formed in the interlayered insulating layer to expose a top surface of the second gate structure, a source/drain contact plug provided in the source/drain contact hole to be in contact with the source/drain region, and a resistor pattern provided in the trench to be in contact with a top surface of the second gate structure.
1. A semiconductor device, comprising:
a substrate;
a first gate structure and a second gate structure on the substrate;
a source/drain region adjacent to the first gate structure;
an interlayered insulating layer on the source/drain region and the first and second gate structures, wherein the interlayered insulating layer comprises a first interlayered insulating layer and a second interlayered insulating layer on the first interlayered insulating layer;
a source/drain contact hole extending through the interlayered insulating layer and exposing the source/drain region;
a trench in the interlayered insulating layer, the trench exposing a top surface of the second gate structure;
a source/drain contact plug in the source/drain contact hole and in contact with the source/drain region; and
a resistor pattern in the trench and in contact with a top surface of the second gate structure.
2. The device of claim 1 , wherein each of the first and second gate structures comprises a gate electrode, an inner gate spacer on a side surface of the gate electrode, and an outer gate spacer on a side surface of the inner gate spacer.
3. The device of claim 2 , wherein the gate electrode comprises a gate insulating pattern, a high-k dielectric pattern, a gate barrier pattern, a gate conductive pattern and a gate capping pattern.
4. The device of claim 3 , wherein the gate capping pattern is in direct contact with the resistor pattern.
5. The device of claim 1 , wherein the source/drain region comprises a lower source/drain region and an upper source/drain region.
6. The device of claim 5 , wherein the lower source/drain region is formed in the substrate and comprises impurity atoms.
7. The device of claim 5 , wherein the upper source/drain region comprises a single crystalline silicon layer that is epitaxially grown from the lower source/drain region and protrudes upward from a top surface of the substrate.
8. The device of claim 1 , wherein the first interlayered insulating layer has a top surface that is at a substantially equal level to top surfaces of the first and second gate structures.
9. The device of claim 1 , wherein the second interlayered insulating layer has a top surface that is at a higher level than a top surface of the resistor pattern.
10. The device of claim 1 , wherein the source/drain contact plug has a top surface that is at a substantially equal level to a top surface of the resistor pattern.
11. The device of claim 1 , wherein the resistor pattern has a top surface that is at a lower level than a top surface of the source/drain contact plug.
12. The device of claim 1 , wherein the source/drain contact plug and the resistor pattern comprises a material.
13. A semiconductor device, comprising:
a substrate;
a first gate structure and a second gate structure on the substrate;
a source/drain region adjacent to the first gate structure;
an interlayered insulating layer on the source/drain region and the first and second gate structures, the interlayered insulating layer comprising a first interlayered insulating layer and a second interlayered insulating layer on the first interlayered insulating layer;
a source/drain contact plug extending through the first and second interlayered insulating layers and being in contact with the source/drain region; and
a resistor pattern extending through the second interlayered insulating layer and being in contact with the second gate structure.
14. The device of claim 13 , wherein the source/drain contact plug has a top surface that is at a substantially equal level to a top surface of the resistor pattern.
15. The device of claim 14 , wherein the source/drain contact plug has a top surface that is at a lower level than a top surface of the second interlayered insulating layer.
16. The device of claim 13 , wherein the source/drain region comprises a lower source/drain region and an upper source/drain region on the lower source/drain region.
17. The device of claim 16 , wherein the upper source/drain region comprises a single crystalline silicon layer that is epitaxially grown from the lower source/drain region and protrudes upward from a top surface of the substrate.
18. The device of claim 13 , wherein the resistor pattern has a top surface that is at a lower level than a top surface of the second interlayered insulating layer.
19. A semiconductor device, comprising:
a substrate including a first region and a second region;
a plurality of gate structures on the first and second regions;
a source/drain contact plug on the first region and between two of the plurality of gate structures; and
a resistor pattern on one of the plurality of gate structures of the second region,
wherein the source/drain contact plug has a top surface that is at a substantially equal level to a top surface of the resistor pattern.