Image sensor device and method
A system and method for blocking light from regions around a photodiode in a pixel of an image sensor is provided. In an embodiment a first optical block layer is formed on a first glue layer and a second glue layer is formed on the first optical block layer. The formation of the first optical block layer and the second glue layer is repeated one or more times to form multiple optical block layers and multiple glue layers. As such, if voids open up in the optical block layers during further processing, there is another optical block layer to block any light that may have penetrated through the void.
1. A semiconductor device comprising:
a pixel comprising a substrate and a photodiode within the substrate, the substrate having a first side and a second side opposite the first side, the photodiode below a portion of the substrate and sharing an interface with the first side of the substrate, wherein the substrate comprises a semiconductor material throughout the substrate;
a first optical block layer above the second side of the substrate, wherein the first optical block layer comprises aluminum copper;
a second optical block layer over the first optical block layer, the second optical block layer being separated from the first optical block layer;
a first glue layer between the first optical block layer and the second optical block layer, wherein the first glue layer comprises titanium nitride; and
an opening through the first optical block layer and the second optical block layer to allow light to impinge upon the photodiode.
2. The semiconductor device of claim 1 , further comprising a second glue layer between the first optical block layer and the substrate.
3. The semiconductor device of claim 2 , further comprising a third glue layer over the second optical block layer.
4. The semiconductor device of claim 3 , further comprising a third optical block layer over the third glue layer.
5. The semiconductor device of claim 4 , further comprising a fourth glue layer over the third optical block layer.
6. A semiconductor device comprising:
a light blocking layer adjacent to a first side of a substrate, wherein the light blocking layer comprises a repeating pattern of a optical block layer and a glue layer, wherein the substrate is semiconductor material, and wherein the glue layer comprises titanium nitride; and
an opening through the light blocking layer, the opening exposing the substrate over a photodiode located within the substrate, the photodiode being adjacent to a second side of the substrate opposite the first side of the substrate, wherein the photodiode is arranged within the substrate in a back side illuminated image sensor configuration.
7. The semiconductor device of claim 6 , wherein the repeating pattern has a first optical block layer and a second optical block layer.
8. The semiconductor device of claim 6 , wherein the repeating pattern has a first optical block layer, a second optical block layer, and a third optical block layer.
9. The semiconductor device of claim 8 , wherein the repeating pattern has a first glue layer, a second glue layer, a third glue layer, and a fourth glue layer.
10. The semiconductor device of claim 6 , wherein the optical block layer comprises aluminum copper.
11. The semiconductor device of claim 6 , further comprising a passivation layer between the repeating pattern and the substrate.
12. A method of manufacturing a semiconductor device, the method comprising:
forming a blocking layer over a substrate, wherein the forming the blocking layer further comprises:
forming a optical block layer over the substrate; and
forming a glue layer over the optical block layer, wherein the glue layer comprises titanium nitride;
repeating the forming the blocking layer one or more times to form a blocking region; and
removing a portion of the blocking region to expose the substrate over a photodiode located along an opposite side of a semiconductor portion of the substrate than the optical block layer.
13. The method of claim 12 , wherein the repeating the forming the blocking layer comprises repeating the forming the blocking layer one time.
14. The method of claim 12 , wherein the repeating the forming the blocking layer comprises repeating the forming the blocking layer two times.
15. The method of claim 12 , further comprising forming a passivation layer over the substrate prior to the forming the blocking layer.
16. The method of claim 15 , further comprising forming a first glue layer over the passivation layer prior to the forming the blocking layer.
17. The method of claim 12 , wherein the forming the optical block layer forms a layer of aluminum copper.
18. The semiconductor device of claim 1 , further comprising a passivation layer between the substrate and the first optical block layer.
19. The semiconductor device of claim 1 , further comprising a plurality of pixels located in a pixel region.
20. The semiconductor device of claim 1 , wherein the pixel is a first pixel, the semiconductor device further comprising a second pixel and an isolation region separating the first pixel and the second pixel.