Thin film transistor and display device
Provided is an oxide-semiconductor-based thin film transistor having satisfactory switching characteristics and stress resistance. Change in threshold voltage through stress application is suppressed in the thin film transistor. The thin film transistor of excellent stability comprises a substrate and, formed thereon, at least a gate electrode, a gate insulating film, oxide semiconductor layers, a source-drain electrode, and a passivation film for protecting the gate insulating film, and oxide semiconductor layers, wherein the oxide semiconductor layers are laminated layers comprising a second oxide semiconductor layer consisting of In, Zn, Sn, and O and a first oxide semiconductor layer consisting of In, Ga, Zn, and O. The second oxide semiconductor layer is formed on the gate insulating film. The first oxide semiconductor layer is interposed between the second oxide semiconductor layer and the passivation film.
1. A thin film transistor comprising:
a substrate;
a gate electrode;
a gate insulating film;
oxide semiconductor layers;
a source electrode;
a drain electrode; and
a passivation film configured to protect the oxide semiconductor layers, wherein
the oxide semiconductor layers are laminated layers comprising:
a second oxide semiconductor layer consisting of In, Zn, Sn, and O, and
a first oxide semiconductor layer consisting of In, Ga, Zn, and O,
the second oxide semiconductor layer is formed on the gate insulating film, and
the first oxide semiconductor layer is formed between the second oxide semiconductor layer and the passivation film.
2. The thin film transistor according to claim 1 ,
wherein chemical composition of the second oxide semiconductor layer satisfies the requirements represented by
expression (1) shown below if [In] / ([In] +[Sn]) <0.50, or
expression (2) shown below if [In] / ([In] +[Sn]) >0.50:
[In]/([In]+[Zn]+[Sn]) <1.4 ×{[Zn]/([Zn]+[Sn])}−0.5 (1)
[In]/([In]+[Zn]+[Sn]) <0.3 (2)
wherein [In], [Zn], and [Sn] respectively represent the content in atomic % of In, Zn, and Sn relative to a total content of all metal elements in the oxide.
3. The thin film transistor according to claim 1 , wherein chemical composition of the second oxide semiconductor layer further satisfies the requirements represented by expression (3) shown below:
[Zn]/([In]+[Zn]+[Sn]) <0.830. (3)
4. The thin film transistor according to claim 1 , wherein a third oxide semiconductor layer comprising Ga is formed between the second oxide semiconductor layer and the gate insulating film.
5. The thin film transistor according to claim 4 , wherein the third oxide semiconductor layer consists of In, Ga, Zn, and O.
6. The thin film transistor according to claim 1 , wherein the second oxide semiconductor layer has a thickness of greater than or equal to 3 nm.
7. The thin film transistor according to claim 1 , wherein the oxide semiconductor layers have a total film density of greater than or equal to 6.0 g/cm 3 .
8. A display device comprising the thin film transistor according to claim 1 .
9. A thin film transistor comprising:
a substrate;
a gate electrode;
a gate insulating film;
oxide semiconductor layers;
an etch stopper layer configured to protect a surface of the oxide semiconductor layers, wherein
the oxide semiconductor layers are laminated layers comprising:
a second oxide semiconductor layer consisting of In, Zn, Sn, and O, and
a first oxide semiconductor layer consisting of In, Ga, Zn, and O,
the second oxide semiconductor layer is formed on the gate insulating film, and
the first oxide semiconductor layer is formed between the second oxide semiconductor layer and the etch stopper layer.
10. The thin film transistor according to claim 9 , wherein a third oxide semiconductor layer comprising Ga is formed between the second oxide semiconductor layer and the gate insulating film.
11. The thin film transistor according to claim 10 , wherein the third oxide semiconductor layer consists of In, Ga, Zn, and O.
12. The thin film transistor according to claim 9 , wherein chemical composition of the second oxide semiconductor layer satisfies the requirements represented by
expression (1) shown below if [In] / ([In] +[Sn]) <0.50, or
expression (2) shown below if [In] / ([In] +[Sn]) >0.50:
[In]/([In]+[Zn ]+[Sn])≦1.4 ×{[Zn]/([Zn]+[Sn])}−0.5 (1)
[In]/([In]+[Zn]+[Sn])≦0.3 (2)
wherein [In], [Zn], and [Sn] respectively represent the content in atomic % of In, Zn, and Sn relative to a total content of all metal elements in the oxide.
13. The thin film transistor according to claim 9 , wherein chemical composition of the second oxide semiconductor layer further satisfies the requirements represented by expression (3) shown below:
[Zn]/([In]+[Zn]+[Sn]) <0.830. (3)
14. The thin film transistor according to claim 9 , wherein the second oxide semiconductor layer has a thickness of greater than or equal to 3 nm.
15. The thin film transistor according to claim 9 , wherein the oxide semiconductor layers have a total film density of greater than or equal to 6.0 g/cm 3 .
16. A display device comprising the thin film transistor according to claim 9 .