Apparatus for FinFETs

1. An apparatus comprising:

an isolation region formed in a substrate;

a reverse T-shaped fin formed in the substrate, wherein:

a bottom portion of the reverse T-shaped fin is enclosed by the isolation region, and wherein the bottom portion is trapezoidal in shape and has a first bottom interior angle, and wherein a length of a bottom side of the bottom portion is greater than a length of a top side of the bottom portion;

an upper portion of the reverse T-shaped fin protrudes above a top surface of the isolation region, and wherein the upper portion is trapezoidal in shape and has a second bottom interior angle, and wherein a length of a bottom side of the upper portion is greater than a length of a top side of the upper portion, and wherein the second bottom interior angle is greater than the first bottom interior angle, and wherein the reverse T-shaped fin comprises:

a channel connected between a first drain/source region and a second drain/source region; and

a doping concentration of an upper region of the bottom portion of the reverse T-shaped fin is higher than a doping concentration of an upper region of the upper portion of the reverse T-shaped fin; and

a gate electrode wrapping the channel of the reverse T-shaped fin.

2. The apparatus of claim 1 , wherein:

the reverse T-shaped fin includes a first stage and a second stage; and

the first stage is stacked on the second stage.

3. The apparatus of claim 2 , wherein:

a ratio between a second width of the second stage and a first width of the first stage is greater than or equal to 1.5.

4. The apparatus of claim 2 , wherein a height of the first stage is less than 600 Å.

5. The apparatus of claim 1 , wherein:

the first drain/source region, the second drain/source region and the channel form a p-type FinFET; and

an epitaxial growth material of the first drain/source region and the second drain/source region is selected from a group consisting of SiGe, SiGeC, Ge, Si, III-V compound semiconductor materials and any combinations thereof.

6. The apparatus of claim 1 , wherein:

the first drain/source region, the second drain/source region and the channel form an n-type FinFET; and

wherein an epitaxial growth material of the first drain/source region and the second drain/source region is selected from a group consisting of SiP, SiC, SiPC, Si, III-V compound semiconductor materials and any combinations thereof.

7. The apparatus of claim 1 , wherein the isolation region is a shallow trench isolation structure.

8. The apparatus of claim 1 , wherein:

the reverse T-shaped fin includes a first trapezoid and a second trapezoid; and

the first trapezoid is stacked on the second trapezoid.

9. The apparatus of claim 8 , wherein:

the first trapezoid has an interior angle in a range from about 84 degrees to about 90 degrees; and

the second trapezoid has an interior angle in a range from about 60 degrees to about 84 degrees.

10. The apparatus of claim 1 , wherein:

a width of the first drain/source region from a cross sectional view is wider than a width of the channel; and

a width of the second drain/source region from a cross sectional view is wider than a width of the channel.

11. A device comprising:

an isolation region formed in a substrate;

a first fin structure comprising:

a first two-stage fin formed in the substrate, wherein:

a bottom portion of the first two-stage fin is enclosed by the isolation region, and wherein the bottom portion is trapezoidal in shape, and wherein a length of a bottom side of the bottom portion is greater than a length of a top side of the bottom portion; and

an upper portion of the first two-stage fin protrudes above a top surface of the isolation region, and wherein the upper portion is trapezoidal in shape, and wherein a length of a bottom side of the upper portion is greater than a length of a top side of the upper portion, and wherein the first two-stage fin comprises:

a first channel connected between a first drain/source region and a second drain/source region;

a doping concentration of an upper region of the bottom portion of the first two-stage fin is higher than a doping concentration of an upper region of the upper portion of the first two-stage fin; and

a first gate electrode wrapping the first channel of the first two-stage fin; and

a second fin structure comprising:

a second two-stage fin formed in the substrate, wherein:

a bottom portion of the second two-stage fin is enclosed by the isolation region; and

an upper portion of the second two-stage fin protrudes above a top surface of the isolation region, and wherein the second two-stage fin comprises:

a second channel connected between a third drain/source region and a fourth drain/source region; and

a second gate electrode wrapping the second channel of the second two-stage fin.

12. The device of claim 11 , wherein:

the upper portion of the first two-stage fin comprises a single fin line formed over the bottom portion of the first two-stage fin; and

the upper portion of the second two-stage fin comprises multiple fin lines formed over the bottom portion of the second two-stage fin.

13. The device of claim 12 , wherein:

the single fin line is of a height less than 600 Å; and

the multiple fin lines are of a height less than 600 Å.

14. The device of claim 11 , further comprising a single-stage fin, wherein a channel of the single-stage fin is of a rectangular shape in a cross sectional view.

15. The device of claim 11 , wherein:

the first drain/source region comprises a first epitaxial layer with a first width wider than a width of the first channel;

the second drain/source region comprises a second epitaxial layer with a second width wider than the width of the first channel;

the third drain/source region comprises a third epitaxial layer with a third width wider than a width of the second channel; and

the fourth drain/source region comprises a fourth epitaxial layer with a fourth width wider than the width of the second channel.

16. A device comprising:

an isolation region in a substrate;

a plurality of fins in the substrate, wherein two adjacent fins are separated by the isolation region and at least a fin is a two-stage fin comprising:

a bottom portion enclosed by the isolation region; and

an upper portion protruding above a top surface of the isolation region, wherein a width of the bottom portion is greater than a width of the upper portion, and wherein the bottom portion and the upper portion are trapezoidal in shape, and wherein a length of a bottom side of the bottom portion is greater than a length of a top side of the bottom portion, and wherein a length of a bottom side of the upper portion is greater than a length of a top side of the upper portion, and wherein:

a doping concentration of an upper region of the bottom portion of the two-stage fin is higher than a doping concentration of an upper region of the upper portion of the two-stage fin;

the bottom portion has a first bottom interior angle; and

the upper portion has a second bottom interior angle, and wherein the second bottom interior angle is greater than the first bottom interior angle.

17. The device of claim 16 , wherein:

the fin comprises a channel connected between a first drain/source region and a second drain/source region, and wherein a gate electrode wraps the channel of the fin.

18. The device of claim 16 , wherein:

the upper portion includes a first portion protruding above the top surface of the isolation region and a second portion surrounded by the isolation region.