Organic light emitting diode display and manufacturing method of organic light emitting diode display
An organic light emitting diode (OLED) display includes: a substrate; an organic light emitting diode on the substrate; and a thin film encapsulation layer including a first inorganic layer having a first density on the substrate and a second inorganic layer having a second density on the first inorganic layer, the second density being different from the first density, and the organic light emitting diode being encapsulated between the thin film encapsulation layer and the substrate.
1. An organic light emitting diode (OLED) display comprising:
a substrate;
an organic light emitting diode on the substrate; and
a thin film encapsulation layer comprising a first inorganic layer having a first density on the substrate and a second inorganic layer having a second density on the first inorganic layer, the second density being different from the first density, and the organic light emitting diode being encapsulated between the thin film encapsulation layer and the substrate,
wherein the thin film encapsulation layer further comprises an intermediate layer between the first inorganic layer and the second inorganic layer,
wherein the intermediate layer is a single layer,
wherein the intermediate layer has a first surface contacting the first inorganic layer and a second surface contacting the second inorganic layer, and
wherein the intermediate layer has a density that gradually changes from the first density at the first surface to the second density at the second surface.
2. The OLED display of claim 1 , wherein the first inorganic layer and the second inorganic layer comprise a same inorganic material.
3. The OLED display of claim 2 , wherein the inorganic material comprises at least one material selected from the group consisting of aluminum oxide (Al 2 O 3 ), titanium oxide (TiO 2 ), zirconium oxide (ZrO), silicon oxide (SiO 2 ), aluminum oxynitride (AION), aluminum nitride (AIN), silicon oxynitride (SiON), silicon nitride (Si 3 N 4 ), zinc oxide (ZnO), tantalum oxide (Ta 2 O 5 ), and combinations thereof.
4. The OLED display of claim 1 , wherein the first-density is greater than the second density, and internal stress of the first inorganic layer is greater than that of the second inorganic layer.
5. The OLED display of claim 1 , wherein the second density is greater than the first density, and internal stress of the second inorganic layer is greater than that of the first inorganic layer.
6. The OLED display of claim 1 , wherein the intermediate layer comprises an inorganic material that is the same as that of the first and second inorganic layers.
7. The OLED display of claim 1 , wherein each of the first and second inorganic layers is formed through an ALD process.