Photonic device structure and fabrication method thereof
Various embodiments of a photonic device and fabrication method thereof are described herein. A device may include a substrate, a bottom contact layer, a current confinement layer, an intrinsic layer, an absorption layer, and a top contact layer. The bottom contact layer may be of a first polarity and may be disposed on the substrate. The current confinement layer may be disposed on the bottom contact layer. The intrinsic layer may be disposed on the current confinement layer. The absorption layer may be disposed on the intrinsic layer. The top contact layer may be of a second polarity and may be disposed on the absorption layer. The second polarity is opposite to the first polarity.
1. A device, comprising:
a substrate;
a bottom contact layer of a first polarity and disposed on the substrate;
a current confinement layer disposed on the bottom contact layer;
an intrinsic layer disposed on the current confinement layer;
an active layer disposed on the intrinsic layer; and
a top contact layer of a second polarity and disposed on the active layer, the second polarity opposite to the first polarity.
2. The device of claim 1 , wherein the current confinement layer comprises a central region and an edge region surrounding the central region, wherein the current confinement layer is doped with first-type dopants of the first polarity, and wherein a concentration of the first-type dopants in the central region is higher than a concentration of the first-type dopants in the edge region.
3. The device of claim 1 , wherein the substrate comprises a bulk silicon (Si) wafer a silicon-on-insulator (SOI) wafer.
4. The device of claim 1 , wherein the bottom contact layer is made of Si and is heavily doped with first-type dopants of the first polarity.
5. The device of claim 1 , wherein the current confinement layer is made of Si.
6. The device of claim 1 , wherein the intrinsic layer comprises an intrinsic Si layer.
7. The device of claim 1 , wherein the active layer comprises a germanium (Ge), GeSi, GeSn, or other III-V material active layer.
8. The device of claim 1 , wherein the first polarity is p and the second polarity is n.