Fin formation in fin field effect transistors
A method of forming a semiconductor device that includes forming a silicon including fin structure and forming a germanium including layer on the silicon including fin structure. Germanium is then diffused from the germanium including layer into the silicon including fin structure to convert the silicon including fin structure to silicon germanium including fin structure.
1. A method of forming a semiconductor device comprising:
forming a silicon including fin structure having an upper surface that is planar to a (100) crystal plane and a sidewall surface that is planar to a (100) crystal plane, wherein the silicon including fin structure includes a plurality of silicon including fin structures;
forming a germanium including layer on the upper surface and sidewalls surface of the silicon including fin structure; and
diffusing germanium from the germanium including layer into the silicon including fin structure to convert the silicon including fin structure to silicon germanium including fin structure to form a plurality of silicon germanium including fin structures, wherein the method further comprises forming dielectric regions between adjacent fin structures of the plurality of silicon including fin structures prior to diffusing germanium from the germanium including layer into the plurality of the silicon including fin structure to form the plurality of silicon germanium including fin structures;
removing an entirety of the dielectric regions after forming said plurality of silicon germanium including fin structures;
forming a gate structure on the plurality of silicon germanium including fin structures;
and
forming a source region and a drain region on at least one of the plurality of silicon germanium including fin structures on opposing sides of the gate structure.
2. The method of claim 1 , wherein said forming the silicon including fin structure comprises:
rotating a semiconductor substrate so that a notch in the semiconductor substrate is rotated 45° from a <110> direction to a <100> direction.
3. The method of claim 1 , wherein the forming the plurality of the silicon including fin structures comprises etching a semiconductor on insulator (SOI) layer of a semiconductor on insulator (SOI) substrate selectively to an insulator layer of the SOI substrate, wherein a remaining portion of the SOI layer provides the plurality of the silicon including fin structures.
4. The method of claim 1 , wherein the forming of the germanium including layer on the plurality of fin silicon including structures comprises conformably depositing a semiconductor material selected from the group consisting of germanium, silicon germanium, silicon germanium doped with carbon, hydrogenated germanium, hydrogenated silicon germanium, hydrogenated silicon germanium doped with carbon and combinations thereof.
5. The method of claim 1 , wherein the forming of the dielectric regions between adjacent fin structures of the plurality of silicon including fin structures comprises:
depositing an oxide between the adjacent fin structures of the plurality of silicon including fin structures; and
planarizing an upper surface of the oxide to be planar with an upper surface of the plurality of silicon including fin structures.
6. The method of claim 1 , wherein the diffusing of the germanium from the germanium including layer into the plurality of silicon including fin structures comprises:
annealing the plurality of silicon including fin structure and the germanium including layer at a temperature ranging from 550° C. to 1100° C.; and
etching to remove the dielectric regions and to remove an oxide including surface from the plurality of silicon germanium including fin structures.