TSVs connected to ground and combined stimulus and testing leads
This disclosure describes a novel method and apparatus for testing TSVs within a semiconductor device. According to embodiments illustrated and described in the disclosure, a TSV may be tested by stimulating and measuring a response from a first end of a TSV while the second end of the TSV held at ground potential. Multiple TSVs within the semiconductor device may be tested in parallel to reduce the TSV testing time according to the disclosure.
1. A semiconductor apparatus comprising:
A. plural test circuits connected in series between a scan input and a scan output, each test circuit including a control input to each test circuit of the plural test circuits, a voltage reference input to each test circuit of the plural test circuits, and a combined test stimulus and response lead; and
B. a through silicon via associated with each test circuit, each through silicon via having a first end connected to the combined stimulus and response signal lead of a respective one of the test circuits and a second end connected to a grounding means, wherein the combined stimulus and response lead of the respective one of the test circuits is enabled to stimulate the first end of the through silicon via associated with each test circuit with a current or voltage and receive a response of the through silicon via associated with each test circuit.
2. The semiconductor apparatus of claim 1 in which the voltage reference input is a variable voltage reference input.