Dual-metal gate CMOS devices and method for manufacturing the same

1. A method for manufacturing a dual metal gate CMOS device, comprising the steps of:

a) forming a first type metal work function modulation layer in a first gate trench and a second gate trench, wherein the first gate trench is used to form a gate of a first type device, and the second gate trench is used to form a gate of a second type device;

b) forming a second type work function metal diffusion source layer in the first gate trench and the second gate trench;

c) forming a gap fill metal in the first gate trench and the second gate trench;

d) forming a heat isolation layer that shields the region of the first type device; and

e) thermally annealing the region in which the first type device and the second type device are located such that metal ions in the second type work function metal diffusion source layer in the region of the second type device are diffused into the first type metal work function modulation layer, and the first type metal work function modulation layer is converted to a second type metal work function modulation layer.

2. The method according to claim 1 , wherein prior to the step a), the method further comprises:

providing a substrate;

forming a first dummy gate stack and a second dummy gate stack on the substrate, each of the first dummy gate stack and the second dummy gate stack at least comprising a dummy gate, wherein the first dummy gate stack is used to form a gate of the first type device, and the second dummy gate stack is used to form a gate of the second type device;

forming a source/drain region of the first type device on both sides of the first dummy gate stack, and forming a source/drain region of the second type device on both sides of the second dummy gate stack;

forming an interlayer dielectric layer to cover the source/drain regions and the dummy gate stacks; and

removing part of the interlayer dielectric layer to expose the dummy gates, and removing the dummy gates to form the first gate trench corresponding to the first dummy gate stack and the second gate trench corresponding to the second dummy gate stack.

3. The method according to claim 1 , wherein:

the material of the heat isolation layer comprises one of oxides, nitrides, Si:C, SiGe, amorphous silicon, polycrystalline silicon, germanium, M x , M x N y , M x Si y N z , M x Al y N z , and MaAl x Si y N z , or any combination thereof, wherein M is one of Al, Ta, Ti, Hf, Zr, Mo and W, Cu, or any combination thereof.

4. The method according to claim 1 , wherein after the step a), the method further comprises:

forming a metal diffusion barrier layer on the first type metal work function modulation layer in the first gate trench.

5. The method according to claim 4 , wherein:

the material of the metal diffusion barrier layer comprises one or more of M x N y , M x Si y N z , M x Al y N z , and MaAl x Si y N z , wherein M is one of Al, Ta, Ti, Hf, Zr, Mo, W, and Cu, or any combination thereof.

6. The method according to claim 1 , wherein:

the thermal annealing comprises transient laser annealing, pulsed high-temperature annealing or furnace annealing.

7. The method according to claim 1 , wherein the material of the first type metal work function modulation layer comprises:

i) one or more of M x N y , M x Si y N z , M x Al y N z , and MaAl x Si y N z , in which M is one of Al, Ta, Ti, Hf, Zr, Mo, W, and Cu, or any combination thereof;

ii) Co, Ni, Cu, Al, Pd, Pt, Ru, Re, Mo, Ta, Ti, Hf, Zr, W, Ir, Eu, Nd, Er, and La; and/or

iii) doped i) material with Co, Ni, Cu, Al, Pd, Pt, Ru, Re, Mo, Ta, Ti, Hf, Zr, W, Ir, Eu, Nd, Er, or La implantation.

8. The method according to claim 1 , wherein:

the first type device is a PMOS device, and the first type metal work function modulation layer has a work function of greater than 4.55 eV; and

the second type device is an NMOS device, and the second type metal work function modulation layer has a work function of less than 4.55 eV.

9. The method according to claim 1 , wherein the material of the second type work function metal diffusion source layer comprises:

i) one or more of M x N y , M x Si y N z , M x Al y N z , and MaAl x Si y N z , in which M is one of Al x Ta, Ti, Hf, Zr, Mo, W, and Cu, or any combination thereof;

ii) one or more of Co, Ni, Cu, Al, Pd, Pt, Ru, Re, Mo, Ta, Ti, Hf, Zr, W, Ir, Eu, Nd, Er, and La; and/or

iii) doped i) material with Co, Ni, Cu, Al, Pd, Pt, Ru, Re, Mo, Ta, Ti, Hf, Zr, W, Ir, Eu, Nd, Er, or La implantation;

wherein the diffused element in the second type work function metal diffusion source layer has a higher concentration than that of the corresponding element in the first type metal work function modulation layer.

10. The method according to claim 1 , wherein:

the material of the gap fill metal are one or more of M x N y , M x Si y N z , M x Al y N, and MaAl x Si y N z , in which M is one of Al, Ta, Ti, Hf, Zr, Mo, and W, or a combination thereof; or

the material of the gap fill metal are one of Co, Ni, Cu, Al, Pd, Pt, Ru, Re, Mo, Ta, Ti, Hf, Zr, W, Ir, Eu, Nd, Er, and La, or any combination thereof; or

the material of the gap fill metal comprises a metal alloy of one or more of Si, Ge and SiGe; or

the material of the gap fill metal comprises metal oxides conductors; or

the material of the gap fill metal comprises one or more of polycrystalline silicon, amorphous silicon, polycrystalline germanium, and polycrystalline silicon-germanium.