Patterned opto-electrical substrate and method for manufacturing the same
The present invention relates to a patterned opto-electrical substrate, comprising a substrate, the substrate has a first patterned structure, a spacer region and a second patterned structure, wherein the second patterned structure is formed on one or both of the first patterned structure and the spacer region, and the first patterned structure is a micron-scale protruding structure or a micron-scale recessing structure, while the second patterned structure is a submicron-scale recessing structure. The present invention also relates to a method for manufacturing the aforementioned patterned opto-electrical substrate and light emitting diodes having the aforementioned patterned opto-electrical substrate.
1. A method for manufacturing a patterned opto-electrical substrate, comprising following steps:
(A) providing a substrate;
(B) forming a first patterned structure and a spacer region on a surface of the substrate by a first etching treatment;
(C) forming a first metal layer and a second metal layer on surfaces of the first patterned structure and the spacer region on the substrate;
(D) forming a second patterned structure on the second metal layer by an anodic aluminum oxide treatment, wherein the second patterned structure is disposed on one or both of the first patterned structure and the spacer region;
(E) transferring the second patterned structure down to the first metal layer and parts of the surfaces of the substrate by a second etching treatment; and
(F) removing the first metal layer and the second metal layer from the substrate by an acid treatment to form the substrate having the first patterned structure and the second patterned structure.
2. The method for manufacturing a patterned opto-electrical substrate of claim 1 , wherein, in the steps (B) and (E), the first etching treatment or the second etching treatment is isotropic etching or anisotropic etching.
3. The method for manufacturing a patterned opto-electrical substrate of claim 1 , wherein, in the steps (B) and (E), the first etching treatment or the second etching treatment is inductively coupled plasma reactive ion etching, chemical etching, dry etching, plasma etching, or laser processing.
4. The method for manufacturing a patterned opto-electrical substrate of claim 1 , in the step (B), further comprising providing a first photoresist layer on a part of the surface of the substrate, so as to selectively remove a part of the substrate by the first etching treatment.
5. The method for manufacturing a patterned opto-electrical substrate of claim 1 , wherein, in the step (B), the first patterned structure is a micron-scale protruding structure or a micron-scale recessing structure.
6. The method for manufacturing a patterned opto-electrical substrate of claim 1 , wherein, in the step (C), the first metal layer or the second metal layer is formed by coating method, chemical plating method, sputtering method, evaporation method, cathode arc method, or chemical vapor deposition method.
7. The method for manufacturing a patterned opto-electrical substrate of claim 1 , wherein, in the step (C), the first metal layer is at least one selected from the group consisting of: titanium, chromium, molybdenum, or combinations thereof, and the first metal layer has a thickness of 1 nm to 1 μm.
8. The method for manufacturing a patterned opto-electrical substrate of claim 1 , wherein, in the step (C), the second metal layer is aluminum having a thickness of the 10 nm to 100 μm.
9. The method for manufacturing a patterned opto-electrical substrate of claim 1 , in the step (D), further comprising: providing a second photoresist layer on a surface of the second metal layer over the first patterned structure, so as to selectively remove a part of the second metal layer over the spacer region by the anodic aluminum oxide treatment.
10. The method for manufacturing a patterned opto-electrical substrate of claim 1 or 9 , wherein the second patterned structure is formed on the second metal layer over the spacer region.
11. The method for manufacturing a patterned opto-electrical substrate of claim 1 , in the step (D), further comprising: providing the second photoresist layer on a surface of the second metal layer over the spacer region, so as to selectively remove a part of the second metal layer over the first patterned structure by the anodic aluminum oxide treatment.
12. The method for manufacturing a patterned opto-electrical substrate of claim 1 , wherein the second patterned structure is formed on the second metal layer over the first patterned structure.
13. The method for manufacturing a patterned opto-electrical substrate of claim 1 , wherein, in the step (E), the second patterned structure is a submicron-scale recessing structure.
14. The method for manufacturing a patterned opto-electrical substrate of claim 1 , after the step (F), further comprising: providing a buffer layer and an opto-electrical device on the substrate.