Liquid ejecting head, liquid ejecting apparatus, and piezoelectric element
Provided is a piezoelectric element comprising a first electrode; a piezoelectric body layer provided on the first electrode, the piezoelectric body layer including 50 mol % or more of at least bismuth and iron, and the piezoelectric body layer having a current density-time curve obtained by applying a voltage to the first electrode and the second electrode including a plurality of inflection points; and a second electrode provided on the piezoelectric body layer.
1. A piezoelectric element comprising:
a first electrode;
a second electrode; and
a piezoelectric body layer between the first electrode and the second electrode, the piezoelectric body layer including 50 mol % or more of at least bismuth and iron, and the piezoelectric body layer having a current density-time curve obtained by applying a voltage to the first electrode and the second electrode including a plurality of inflection points.
2. The piezoelectric element according to claim 1 ,
wherein, one of the plurality of inflection points is convex upwards with respect to an absolute value of an amount of a current.
3. The piezoelectric element according to claim 1 ,
wherein, one of the plurality of inflection points is convex downwards with respect to an absolute value of an amount of a current.
4. The piezoelectric element according to claim 1 ,
wherein, the plurality of inflection points includes a first inflection point which is convex upwards with respect to an absolute value of an amount of a current and a second inflection point which is convex downwards with respect to an absolute value of an amount of a current.
5. The piezoelectric element according to claim 4 ,
wherein, an absolute value of an amount of a current at the first inflection point is greater than or equal to an absolute value of an amount of a current at the second inflection point.
6. The piezoelectric element according to claim 1 ,
wherein the piezoelectric body layer is formed by firing films including at least bismuth and iron, in a nitrogen atmosphere.
7. The piezoelectric element according to claim 1 ,
wherein the piezoelectric body layer further includes barium and titanium.
8. The piezoelectric element according to claim 1 ,
wherein the piezoelectric body layer further includes manganese.
9. A liquid ejecting head comprising the piezoelectric element according to claim 1 .
10. A liquid ejecting apparatus comprising the liquid ejecting head according to claim 9 .
11. The piezoelectric element according to claim 1 , wherein the piezoelectric body layer is formed by firing films including at least bismuth and iron, in a pressurized nitrogen atmosphere.