Electrostatic member in forming touch display apparatus and method of manufacturing the same
A touch display apparatus includes a base substrate, a light blocking semiconductor pattern disposed on the base substrate and configured to block a visible light and transmit an infrared light, a sensing element disposed on the light blocking semiconductor pattern and configured to detect a touch position using an incident infrared light, a driving element configured to drive the sensing element, a signal line electrically connected with the sensing element or the driving element, and a wiring connecting part disposed under the signal line and including a same material as the light blocking semiconductor pattern.
1. A touch display apparatus comprising:
a base substrate;
a light blocking semiconductor pattern on the base substrate, and configured to block a visible light and transmit an infrared light;
a sensing element on the light blocking semiconductor pattern and configured to detect a touch position using an incident infrared light;
a driving element configured to drive the sensing element;
a signal line electrically connected with the sensing element or the driving element; and
a wiring connecting part under the signal line and comprising a same material as that of the light blocking semiconductor pattern.
2. The touch display apparatus of claim 1 , wherein the light blocking semiconductor pattern comprises amorphous silicon germanium.
3. The touch display apparatus of claim 1 , wherein the sensing element comprises:
a semiconductor pattern on the light blocking semiconductor pattern;
a source electrode overlapping a first end of the semiconductor pattern;
a drain electrode spaced apart from the source electrode and overlapping a second end of the semiconductor pattern opposing the first end; and
a gate electrode on the source electrode and the drain electrode.
4. The touch display apparatus of claim 1 , wherein the wiring connecting part comprises amorphous silicon germanium.
5. The touch display apparatus of claim 1 , wherein the light blocking semiconductor pattern and the wiring connecting part are in a same layer.
6. A method of manufacturing a touch display apparatus, comprising:
providing a semiconductor layer on a base substrate, the semiconductor layer comprising:
a light blocking semiconductor pattern configured to block a visible light and transmit an infrared light,
a wiring connecting part in a display area of the apparatus and comprising a same material as that of the light blocking semiconductor pattern, and
a guard ring in a peripheral area of the apparatus and connected with the wiring connecting part;
providing a metal pattern comprising a signal line on the wiring connecting part and lengthwise extending in a direction; and
providing a sensing element on the metal pattern, and configured to detect a touch position using an incident infrared light.
7. The method of claim 6 , wherein the providing the sensing element comprises:
providing a semiconductor pattern on the light blocking semiconductor pattern;
providing a source electrode and a drain electrode on the semiconductor pattern;
providing an insulation layer on the source electrode and the drain electrode; and
providing a gate electrode on the insulation layer.
8. The method of claim 7 , wherein the providing the insulation layer comprises partially removing the guard ring and the wiring connecting part.
9. The method of claim 6 , wherein the metal pattern further comprises:
a common voltage wiring in the peripheral area and lengthwise extending in a direction crossing the signal line; and
a pad part in the peripheral area, and spaced apart from the signal line.
10. The method of claim 6 , wherein the semiconductor layer comprises amorphous silicon germanium.
11. The method of claim 9 , further comprising forming a connecting electrode connecting the signal line and the pad part to each other,
wherein the connecting electrode is in a same layer as the gate electrode.
12. The method of claim 9 , wherein the wiring connecting part connects the guard ring with the signal line and connects the guard ring with the pad part.