Method of adjusting a threshold voltage of a multi-gate structure device
The present invention discloses a method of adjusting a threshold voltage of a multi-gate structure device, wherein, preparing the multi-gate structure device to be formed to have a channel impurity distribution with high doping on surface and lowly doping inside, where while a threshold voltage is adjusted by using impurity doping, the influences of the Coulomb impurity scattering on the carriers is reduced as much as possible, so that the mobility of the carriers is maintained at a higher level. Firstly, the present solution is able to make a multi-gate device obtain a larger range of a multi-threshold voltage; it is convenient for the various demands of the device in the circuit designing by IC designers. Secondly, in the course of introducing the impurity doping to adjust a threshold voltage, the influences of the Coulomb impurity scattering on the channel carrier are reduced as much as possible, so that the mobility of the charge carriers is maintained at a higher level, and the device is ensured to have a higher drive current. Finally, the present solution is achieved by the process method compatible with a conventional CMOS, and has the potential for a large scale production.
1. A method of adjusting a threshold voltage of a multi-gate structure device, the channel of which includes a channel surface and a channel body spaced from the channel surface and having a higher carrier concentration than that of the channel surface under a full depletion, comprising:
preparing the multi-gate structure device to form the channel surface and the channel body with a lower impurity doping concentration than that of the channel body,
wherein, a process of preparing the multi-gate structure device comprises the steps of:
1) impurities doping to form an ultra-shallow impurity distribution of a 1 nm thickness;
2) depositing a passivation layer to reduce the loss of the doped impurity in a subsequent annealing process;
3) annealing to form an ultra-shallow junction of a 1˜2 nm thickness.
2. The method of adjusting a threshold voltage of a multi-gate structure device according to claim 1 , wherein, the step 1) is achieved by a plasma impurity doping technology, a silicon epitaxial in-situ doping technology or a monolayer doping technology.
3. The method of adjusting a threshold voltage of a multi-gate structure device according to claim 1 , wherein, the step 2) is achieved by an atomic layer deposition or a low pressure chemical vapor deposition method.
4. The method of adjusting a threshold voltage of a multi-gate structure device according to claim 1 , wherein, the step 3) is achieved by a spike annealing, a flash annealing or a laser annealing.
5. The method of adjusting a threshold voltage of a multi-gate structure device according to claim 1 , wherein, the thickness of the passivation layer in the step 2) is 20 nm.