Semiconductor device and ceramic circuit substrate, and producing method of semiconductor device
A semiconductor device comprises a circuit layer composed of a conductive material, and a semiconductor element mounted on the circuit layer, wherein an underlayer having a porosity in the range of 5 to 55% is formed on one surface of the circuit layer, a bonding layer composed of a sintered body of a bonding material including an organic substance and at least one of metal particles and metal oxide particles is formed on the underlayer, and the circuit layer and the semiconductor element are bonded together via the underlayer and the bonding layer.
1. A semiconductor device comprising:
a circuit layer composed of a conductive material; and
a semiconductor element mounted on the circuit layer,
wherein an underlayer having a porosity in the range of 5 to 42% is formed on one surface of the circuit layer, and includes a glass layer and an Ag layer having glass particles dispersed within the Ag layer,
a bonding layer composed of a sintered body of a bonding material including an organic substance and at least one of metal particles and metal oxide particles is formed on the underlayer, and
the circuit layer and the semiconductor element are bonded together via the underlayer and the bonding layer.
2. The semiconductor device according to claim 1 comprises:
a ceramic circuit substrate having the circuit layer and a ceramic substrate disposed on the other surface of the circuit layer,
wherein the semiconductor element is a power semiconductor device.
3. The ceramic circuit substrate used in the semiconductor device according to claim 2 comprises:
a circuit layer composed of a conductive material,
an underlayer formed on one surface of the circuit layer and including a glass layer and an Ag layer having glass particles dispersed within the Ag layer, and
a ceramic substrate disposed on the other surface of the circuit layer,
wherein the porosity of the underlayer is in the range of 5 to 42%.