Method for forming a lithium-ion type battery
A method for manufacturing a lithium-ion type battery including the steps of forming in a substrate a recess having lateral walls having a re-entrant profile; depositing, by successive non-conformal physical vapor depositions, a stack of the different layers forming a lithium-ion battery, this stack having a thickness smaller than the depth of the recess; depositing on the structure a filling layer filling the space remaining in the recess; and planarizing the structure to expose the upper surface of the stack.
1. A method for manufacturing a lithium-ion type battery comprising:
forming in a substrate a recess having lateral walls having an opening narrowed with respect to its largest lateral dimension;
depositing without using a shadow mask, by successive non-conformal physical vapor depositions, a stack of different layers forming the lithium-ion type battery, the stack having a thickness smaller than a depth of the recess;
depositing a filling layer filling a space remaining in the recess; and
planarizing to expose an upper surface of the stack.
2. The method of claim 1 , wherein the substrate comprises silicon, uniformly coated with an insulating layer after the forming of the recess.
3. The method of claim 1 , wherein the stack comprises at least a cathode collector layer, a cathode layer, an electrolyte layer, an anode layer, and an anode collector layer.
4. The method of claim 3 , wherein the substrate comprises doped silicon or metal, the cathode collector layer comprises titanium, tungsten, molybdenum, tantalum, platinum, aluminum, copper, or any combination thereof, the cathode layer comprises lithium titanium oxysulphide, lithium cobalt oxide, vanadium oxide, or any material having lithium, the electrolyte layer comprises lithium phosphorus oxynitride, LiSON, LiSiPON, the anode layer comprises silicon, germanium, carbon, metal Li, TiOx, or any combination thereof, and the anode collector layer comprises copper or aluminum.
5. The method of claim 1 , wherein the cathode collector layer has a thickness ranging between 100 and 500 nm, the cathode layer comprises a thickness between 1 and 10 μm, the electrolyte layer has a thickness between 1 and 3 μm, and the anode layer has a thickness between 10 and 800 nm.
6. A method for manufacturing a lithium-ion type battery comprising:
forming in a substrate a recess having lateral walls that diverge from an upper surface of the substrate to define a narrowed opening;
forming, without using a shadow mask, a stack of different layers defining the lithium-ion type battery;
forming a filling layer over the stack in the recess to form a structure; and
planarizing the structure to expose an upper surface of the stack.
7. The method of claim 6 , wherein the lateral walls are planar.
8. The method of claim 6 , wherein the lateral walls are inclined.
9. The method of claim 6 , wherein the stack comprises a cathode collector layer, a cathode layer, an electrolyte layer, an anode layer, and an anode collector layer.