Method of forming a non volatile memory device using wet etching
In one embodiment, a method of forming a semiconductor device is disclosed. A high-k dielectric is deposited of over a semiconductor body, and a portion of the high-k dielectric is wet etched an etchant selected from the group consisting of hot phos, piranha, and SC1.
1. A method of forming a semiconductor device, the method comprising:
depositing a high-k dielectric over a semiconductor body, the high-k dielectric contacting a top surface of the semiconductor body; and
wet etching the high-k dielectric using an etchant selected from the group consisting of hot phos, piranha, and SC1, wherein the high-k dielectric is not damaged prior to the wet etching, and wherein the etchant selected from the group consisting of hot phos, piranha, and SC1 is selective to the high-k dielectric relative to the semiconductor body.
2. The method of claim 1 , further comprising:
depositing a conducting material over the high-k dielectric; and
depositing an oxide liner on sidewalls of the conducting material prior to the wet etching the high-k dielectric, wherein the oxide liner protects the sidewalls from the etchant.
3. The method of claim 2 , wherein the etchant comprises hot phos.
4. The method of claim 3 , wherein the hot phos comprises a temperature of between about 100° C. and about 200° C.
5. The method of claim 3 , wherein the etchant comprises H 2 O and between about 50% and about 90% H 3 PO 4 .
6. The method of claim 3 , wherein the depositing the oxide liner comprises:
depositing a CVD oxide liner over the conducting material and the high-k dielectric; and
etching the oxide liner using an anisotropic reactive ion etch, wherein the sidewalls of the conducting material remain covered with the oxide liner and a surface of the high-k dielectric is exposed.
7. The method of claim 6 , wherein the liner comprises a thickness of between about 2 nm and about 10 nm.
8. The method of claim 3 , wherein:
the high-k dielectric comprises Al 2 O 3 ; and
the conducting material comprises polysilicon.
9. The method of claim 2 , wherein the etchant comprises SC1.
10. The method of claim 9 , wherein the SC1 comprises a temperature of between about 30° C. and about 90° C.
11. The method of claim 9 , wherein the etchant comprises about 1 part NH 4 OH, between about 1 part and 2 parts H 2 O 2 , and between about 5 parts and 7 parts H 2 O.
12. The method of claim 9 , wherein the depositing the oxide liner comprises:
depositing a CVD oxide liner over the conducting material and the high-k dielectric; and
etching the oxide liner using an anisotropic reactive ion etch, wherein the sidewalls of the conducting material remain covered with the oxide liner and a surface of the high-k dielectric is exposed.
13. The method of claim 12 , wherein the oxide liner comprises a thickness of between 2 nm and 10 nm.
14. The method of claim 9 , wherein:
the high-k dielectric comprises Al 2 O 3 ; and
the conducting material comprises polysilicon.
15. The method of claim 2 , wherein the etchant comprises piranha.
16. The method of claim 15 , wherein the depositing the oxide liner comprises:
depositing a CVD oxide liner over the conducting material and the high-k dielectric; and
etching the oxide liner using an anisotropic reactive ion etch, wherein the sidewalls of the conducting material remain covered with the oxide liner and a surface of the high-k dielectric is exposed.
17. The method of claim 15 , wherein:
the high-k dielectric comprises Al 2 O 3 ; and
the conducting material comprises polysilicon.
18. The method of claim 15 , wherein the piranha comprises H 2 O, between about 60% and 70% H 2 SO 4 , and between about 30% and 40% H 2 O 2 .
19. The method of claim 15 , wherein the wet etching is performed at room temperature.
20. The method of claim 1 , wherein the hot phos comprises H 2 O and between about 50% and about 90% H 3 PO 4 , wherein the piranha comprises H 2 O, between about 60% and 70% H 2 SO 4 , and between about 30% and 40% H 2 O 2 , and wherein the SC1 comprises about 1 part NH 4 OH, between about 1 part and 2 parts H 2 O 2 , and between about 5 parts and 7 parts H 2 O.
21. A method of forming a semiconductor device comprising:
depositing a high-k dielectric over a semiconductor body, the high-k dielectric contacting a top surface of the semiconductor body;
depositing a conducting material over the high-k dielectric;
depositing a liner over the conducting material and the high-k dielectric;
etching the liner using an anisotropic reactive ion etch, wherein sidewalls of the conducting material remain covered with the liner and a surface of the high-k dielectric is exposed; and
etching the high-k dielectric using an etchant selected from the group consisting of hot phos, piranha, and SC1, wherein the high-k dielectric is not damaged prior to etching using the etchant, and wherein the etchant selected from the group consisting of hot phos, piranha, and SC1 is selective to the high-k dielectric relative to the semiconductor body.
22. The method of claim 21 , wherein the liner comprises a CVD oxide.
23. The method of claim 21 , further comprising forming a transistor.
24. The method of claim 23 , wherein the conducting material comprises a polysilicon gate of the transistor and the high-k dielectric comprises a gate dielectric of the transistor.
25. The method of claim 21 , further comprising forming a capacitor.
26. The method of claim 25 , wherein the high-k dielectric comprises a dielectric of the capacitor and the conducting material comprises a plate of the capacitor.
27. The method of claim 21 , wherein the etchant comprises hot phos.
28. The method of claim 27 , wherein the etchant comprises a temperature of between about 100° C. and about 200° C., and wherein the etchant comprises H 2 O and between about 50% and about 90% H 3 PO 4 .
29. The method of claim 21 , wherein the etchant comprises SC1.
30. The method of claim 29 , wherein the etchant comprises a temperature of between about 30° C. and about 90° C., and wherein the etchant comprises about 1 part NH 4 OH, between about 1 part and 2 parts H 2 O 2 , and between about 5parts and 7 parts H 2 O.
31. The method of claim 21 , wherein the etchant comprises piranha.
32. The method of claim 31 , wherein the etchant comprises H 2 O, between about 60% and 70% H 2 SO 4 , and between about 30% and 40% H 2 O 2 .
33. The method of claim 21 , wherein the hot phos comprises H 2 O and between about 50% and about 90% H 3 PO 4 , wherein the hot phos comprises a temperature of between about 100° C. and about 200° C., wherein the piranha comprises H 2 O, between about 60% and 70% H 2 SO 4 , and between about 30% and 40% H 2 O 2 , wherein the SC1 comprises about 1 part NH 4 OH, between about 1 part and 2 parts H 2 O 2 , and between about 5 parts and 7 parts H 2 O, and wherein the SC1 comprises a temperature of between about 30° C. and about 90° C.
34. A method for fabricating a semiconductor circuit, the method comprising;
forming a first dielectric over a semiconductor body;
forming a first conducting material over the first dielectric;
forming a second dielectric over the first conducting material, the second dielectric contacting a top surface of the first conducting material, wherein the second dielectric comprises a high-k material;
forming a second conducting material over the second dielectric;
etching a portion of the second conducting material, wherein a portion of the second dielectric becomes exposed;
forming a liner over sidewalls of the second conducting material; and
wet etching the second dielectric using a etchant selected from the group consisting of hot phos, piranha, and SC1, wherein the second dielectric is not damaged prior to the wet etching, and wherein the etchant selected from the group consisting of hot phos, piranha, and SC1 is selective to the second dielectric relative to the semiconductor body.
35. The method of claim 34 , wherein forming the liner over the sidewalls comprises:
forming a CVD oxide over the second conducting material and the exposed second dielectric; and
removing the CVD oxide from a surface of the second dielectric, wherein the liner remains disposed on the sidewalls of the second conducting material.
36. The method of claim 35 , wherein the removing the CVD oxide from the surface of the second dielectric comprises an anisotropic reactive ion etch.
37. The method of claim 34 , wherein the second dielectric comprises the high-k dielectric comprises Al 2 O 3 , and wherein the second conducting material comprises polysilicon.
38. The method of claim 34 , wherein the etchant comprises hot phos.
39. The method of claim 38 , wherein the etchant comprises a temperature of between about 100° C. and about 200° C., and wherein the etchant comprises H 2 O and between about 50% and about 90% H 3 PO 4 .
40. The method of claim 34 , wherein the etchant comprises SC1.
41. The method of claim 40 , wherein the etchant comprises a temperature of between about 30° C. and about 90° C., and wherein the etchant comprises about 1 part NH 4 OH, between about 1 part and 2 parts H 2 O 2 , and between about 5 parts and 7 parts H 2 O.
42. The method of claim 34 , wherein the etchant comprises piranha.
43. The method of claim 42 , wherein the etchant comprises H 2 O, between about 60% and 70% H 2 SO 4 , and between about 30% and 40% H 2 O 2 .
44. The method of claim 34 , wherein the hot phos comprises H 2 O and between about 50% and about 90% H 3 PO 4 , wherein the hot phos comprises a temperature of between about 100° C. and about 200° C., wherein the piranha comprises H 2 O, between about 60% and 70% H 2 SO 4 , and between about 30% and 40% H 2 O 2 , wherein the SC1 comprises about 1 part NH 4 OH, between about 1 part and 2 parts H 2 O 2 , and between about 5 parts and 7 parts H 2 O, and wherein the SC1 comprises a temperature of between about 30° C. and about 90° C.
45. A method of forming a semiconductor device, the method comprising:
depositing a high-k dielectric over a semiconductor body, the high-k dielectric contacting a top surface of the semiconductor body; and
wet etching the high-k dielectric using an etchant comprising about 1 part NH 4 OH, between about 1 part and 2 parts H 2 O 2 , and between about 5 parts and 7 parts H 2 O, wherein the high-k dielectric is not damaged prior to the wet etching, and wherein, during the wet etching, the etchant is selective to the high-k dielectric relative to the semiconductor body.
46. The method of claim 45 , further comprising:
depositing a conducting material over the high-k dielectric; and
depositing an oxide liner on sidewalls of the conducting material prior to the wet etching the high-k dielectric, wherein the oxide liner protects the sidewalls from the etchant.
47. The method of claim 46 , where the high-k dielectric is Al 2 O 3 , and the conducting material comprises polysilicon.
48. The method of claim 47 , wherein the etchant comprises a temperature of between about 100° C. and about 200° C.
49. The method of claim 45 , wherein the etchant comprises a temperature of between about 30° C. and about 90° C.
50. A method of forming a semiconductor device, the method comprising:
depositing a high-k dielectric over a semiconductor body, the high-k dielectric contacting a top surface of the semiconductor body; and
wet etching the high-k dielectric using an etchant comprising H 2 O and between about 50% and about 90% H 3 PO 4 , wherein the high-k dielectric is not damaged prior to the wet etching, and wherein, during the wet etching, the etchant is selective to the high-k dielectric relative to the semiconductor body.
51. The method of claim 50 , further comprising:
depositing a conducting material over the high-k dielectric; and
depositing an oxide liner on sidewalls of the conducting material prior to the wet etching the high-k dielectric, wherein the oxide liner protects the sidewalls from the etchant.
52. The method of claim 51 , where the high-k dielectric is Al 2 O 3 , and the conducting material comprises polysilicon.