Semiconductor integrated circuit device
Provided is a semiconductor integrated circuit device having pixel regions in a photodiode array region and having, in each of the pixel regions, a waveguide holding hole having a substantially perpendicular sidewall above the photodiode and embedded with a silicon oxide-based sidewall insulating film reaching the bottom surface of the hole and two or more silicon nitride-based insulating films having a higher refractive index on the inner side of the hole. This structure makes it possible to prevent deterioration of pixel characteristics of an imaging device, such as CMOS sensor, which is rapidly decreasing in size.
1. A semiconductor integrated circuit device including a CMOS image sensor, comprising:
a photodiode formed in a semiconductor substrate and configuring a part of the CMOS image sensor;
an interlayer insulating film formed over the photodiode;
a waveguide holding hole formed in the interlayer insulating film above the photodiode;
a first silicon nitride-based insulating film formed over a side surface and a bottom surface of the waveguide holding hole;
a second silicon nitride-based insulating film formed over the first silicon nitride-based insulating film; and
a third silicon nitride-based insulating film formed over the second silicon nitride-based insulating film,
wherein the waveguide holding hole is embedded by the first, second and third silicon nitride-based insulating films,
wherein the second silicon nitride-based insulating film has a refractive index higher than that of the first silicon nitride-based insulating film, and
wherein the third silicon nitride-based insulating film has a refractive index higher than that of the second silicon nitride-based insulating film.
2. A semiconductor integrated circuit device according to the claim 1 ,
wherein a width of the upper portion of the first silicon nitride-based insulating film is smaller than a width of the lower portion thereof, and
wherein a width of the upper portion of the second silicon nitride-based insulating film is smaller than a width of the lower portion thereof.
3. A semiconductor integrated circuit device according to the claim 2 ,
wherein the waveguide holding hole is tapered toward the semiconductor substrate.
4. A semiconductor integrated circuit device according to the claim 1 ,
wherein the waveguide holding hole is tapered toward the semiconductor substrate.
5. A semiconductor integrated circuit device according to the claim 1 ,
wherein an anti-reflective film is formed between the interlayer insulating film and the photodiode.
6. A semiconductor integrated circuit device according to the claim 5 ,
wherein the waveguide holding hole reaches the anti-reflective film.
7. A semiconductor integrated circuit device according to the claim 5 ,
wherein the anti-reflective film includes a silicon nitride film and a silicon oxide film.