Through-hole electrode substrate
A method of manufacturing a through-hole electrode substrate includes forming a plurality of through-holes in a substrate, forming a plurality of through-hole electrodes by filling a conductive material into the plurality of through-holes, forming a first insulation layer on one surface of the substrate, forming a plurality of first openings which expose the plurality of through-hole electrodes corresponding to each of the plurality of through-hole electrodes, on the first insulation layer and correcting a position of the plurality of first openings using the relationship between a misalignment amount of a measured distance value of an open position of a leaning through-hole among the plurality of through-holes and of a design distance value of the open position of the leaning through-hole among the plurality of through-holes with respect to a center position of the substrate.
1. A through-hole electrode substrate comprising:
a substrate including a plurality of through-holes;
a plurality of through-hole electrodes arranged within each of the plurality of through-holes; and
a first insulation layer arranged on one surface of the substrate;
wherein the first insulation layer includes a plurality of first openings which expose each of the plurality of through-holes, the plurality of through-holes includes a leaning through-hole leaning from one surface to the other surface of the substrate, and each of the plurality of first openings is arranged within an open area of the leaning through-hole,
an outer boundary line of the open area is covered by the first insulation layer, and
the first insulation layer extends beyond the outer boundary line toward the open area to cover a portion of a surface of each of through-hole electrodes located at the open area.
2. The through-hole electrode substrate according to claim 1 , wherein a center position of at least one part of the plurality of openings is separated from a center position of the leaning through-hole.
3. The through-hole electrode substrate according to claim 1 , further comprising:
a second insulation layer arranged on the other surface of the substrate;
wherein the second insulation layer includes a plurality of second openings which expose each of the plurality of through-hole substrates, and the plurality of second openings is arranged within an open area of the leaning through-hole.
4. The through-hole electrode substrate according to claim 1 , wherein a center position of at least one part of the plurality of first openings and a center position of at least one part of the plurality of second openings are separated, and the plurality of first openings and the plurality of second openings are made conductive by the plurality of through-hole electrodes.
5. The through-hole electrode substrate according to claim 1 , further comprising: a third insulation layer arranged in each interior wall of the plurality of through-holes.
6. The through-hole electrode substrate according to claim 1 , further comprising:
a second insulation layer arranged on the other surface of the substrate; and
a third insulation layer arranged in each interior wall of the plurality of through-holes;
wherein either one or all of the first insulation layer, the second insulation layer and the third insulation layer are formed from an insulation resin.
7. An electrical circuit board comprising:
the through-hole electrode substrate in claim 1 ,
a first board arranged on one surface of the through-hole electrode substrate, and electrically connected with the through-hole electrode;
a second board arranged on the other surface of the through-hole electrode substrate, and electrically connected with the through-hole electrode;
a printed circuit board arranged on a surface of the first board, and electrically connected with the first board; and
an IC chip arranged on a surface of the second board, and electrically connected with the second board;
wherein
the printed circuit board and the IC chip are electrically connected via the first board, the through-hole electrode substrate and the second board.
8. An electrical device comprising:
the electrical circuit board according to claim 7 .
9. The through-hole electrode substrate according to claim 1 , wherein each of the plurality of first openings is occupied totally by each of the plurality of through-hole electrodes.