IP Library › Granted Patent US 9,450,177
Granted Patent B2
US 9,450,177 · App. 13/578,866 · Granted Sep 20, 2016

Magnetoresistive element and magnetic memory

Inventors: Hideo Ohno (Sendai, JP); Shoji Ikeda (Sendai, JP); Fumihiro Matsukura (Sendai, JP); Masaki Endoh (Sendai, JP); Shun Kanai (Sendai, JP); Katsuya Miura (Higashimurayama, JP); Hiroyuki Yamamoto (Shiki, JP)
Assignee: TOHOKU UNIVERSITY
H01L43/08G11C11/161H01L27/228
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Quick Facts
Patent No.
US 9,450,177
App. No.
13/578,866
Granted
Sep 20, 2016
Kind
B2
Abstract

There is provided a magnetoresistive element whose magnetization direction is stable in a direction perpendicular to the film surface and whose magnetoresistance ratio is controlled, as well as magnetic memory using such a magnetoresistive element. By having the material of a ferromagnetic layer forming the magnetoresistive element comprise a ferromagnetic material containing at least one type of 3d transition metal, or a Heusler alloy, to control the magnetoresistance ratio, and by controlling the thickness of the ferromagnetic layer on an atomic layer level, the magnetization direction is changed from being in-plane with the film surface to being perpendicular to the film surface.

Claims (31)

1. A magnetoresistive element comprising:

a reference layer having a fixed magnetization direction and including a ferromagnetic material containing Fe;

one non-magnetic layer that is directly formed on one surface of the reference layer and that includes an insulator containing oxygen;

a recording layer that is directly formed on one surface of the one non-magnetic layer, which is opposite to another surface on which the reference layer is formed, the recording layer having a variable magnetization direction and including a ferromagnetic material containing at least one type of 3d transition metal; and

another non-magnetic layer that is directly formed on another surface of the reference layer so that the reference layer is formed between the one and the other non-magnetic layers and the one and the other non-magnetic layers are both external to the reference layer, the other non-magnetic layer including an insulator containing oxygen, wherein

the reference layer, and the one and the other non-magnetic layers are arranged so that a magnetization direction of the reference layer is controlled to be perpendicular to a layer surface of the reference layer by perpendicular magnetic anisotropy at interfaces between the reference layer and the one non-magnetic layer, and between the reference layer and the other non-magnetic layer, resulting from the reference layer having a predetermined thickness, and

the other non-magnetic layer stabilizes the perpendicularity of magnetization direction of the reference layer to the reference layer surface.

2. The magnetoresistive element according to claim 1 , wherein the predetermined thickness of the reference layer is equal to or less than 3 nm.

3. The magnetoresistive element according to claim 1 , wherein the reference layer further includes at least one of Co and B.

4. The magnetoresistive element according to claim 1 , wherein the one and the other non-magnetic layers further include Mg.

5. The magnetoresistive element according to claim 1 , further comprising an additional non-magnetic layer that is directly formed on one surface of the recording layer, which is opposite to another surface on which the one non-magnetic layer is formed on and that includes an insulator containing oxygen.

6. The magnetoresistive element according to claim 5 , wherein the additional non-magnetic layer further includes Mg.

7. The magnetoresistive element according to claim 1 , wherein

the reference layer has a laminate structure including a plurality of alternating ferromagnetic and non-magnetic laminated layers,

uppermost and lowermost layers of the laminate structure are the ferromagnetic laminated layers, and

the ferromagnetic laminated layer includes a ferromagnetic material containing Fe, and the non-magnetic laminated layer includes an insulator containing oxygen.

8. The magnetoresistive element according to claim 7 , wherein the ferromagnetic laminated layer further includes at least one of Co and B, and the non-magnetic laminated layer further includes Mg.

9. A magnetoresistive element comprising:

a reference layer having a fixed magnetization direction and including a ferromagnetic material containing at least one type of 3d transition metal;

one non-magnetic layer that is directly formed on one surface of the reference layer and that includes an insulator containing oxygen;

a recording layer that is directly formed on one surface of the one non-magnetic layer, which is opposite to another surface on which the reference layer is formed, the recording layer having a variable magnetization direction and including a ferromagnetic material containing Fe; and

another non-magnetic layer that is directly formed on one surface of the recording layer, which is opposite to another surface on which the one non-magnetic layer is formed, so that the recording layer is formed between the one and the other non-magnetic layers and the one and the other non-magnetic layers are both external to the recording layer, the other non-magnetic layer including an insulator containing oxygen, wherein

the recording layer, and the one and the other non-magnetic layers are arranged so that a magnetization direction of the recording layer is controlled to be perpendicular to a layer surface of the recording layer by perpendicular magnetic anisotropy at interfaces between the recording layer and the one non-magnetic layer, and between the recording layer and the other non-magnetic layer, resulting from the recording layer having a predetermined thickness, and

the other non-magnetic layer stabilizes the perpendicularity of magnetization direction of the recording layer to the recording layer surface.

10. The magnetoresistive element according to claim 9 , wherein the predetermined thickness of the recording layer is equal to or less than 3 nm.

11. The magnetoresistive element according to claim 9 , wherein the recording layer further includes at least one of Co and B.

12. The magnetoresistive element according to claim 9 , wherein the one and the other non-magnetic layers further include Mg.

13. The magnetoresistive element according to claim 9 , wherein

the recording layer has a laminate structure including a plurality of alternating ferromagnetic and non-magnetic laminated layers,

uppermost and lowermost layers of the laminate structure are the ferromagnetic laminated layers, and

the ferromagnetic laminated layer includes a ferromagnetic material containing Fe, and the non-magnetic laminated layer includes an insulator containing oxygen.

Assignments (2)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jun 25, 2015
From: HITACHI, LTD.
To: TOHOKU UNIVERSITY
Reel/Frame 035904/0477 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Oct 11, 2012
From: OHNO, HIDEO; IKEDA, SHOJI; MATSUKURA, FUMIHIRO; ENDOH, MASAKI; KANAI, SHUN; MIURA, KATSUYA; YAMAMOTO, HIROYUKI
To: HITACHI, LTD.; TOHOKU UNIVERSITY
Reel/Frame 029109/0615 →
Continuity (1)
Related Publication 20120320666A1 · Dec 20, 2012