Sensor structure and yaw rate sensor
A sensor structure includes a substrate having a main extension plane, a first seismic mass and a second seismic mass, the first and the second seismic masses being deflectable relative to the substrate along a direction of deflection essentially perpendicular to the main extension plane. The first and second seismic masses are coupled together via a rigid coupling rocker pivotable around a rocker axis parallel to the main extension plane. The first seismic mass is suspended from the substrate with the aid of a first suspension spring, and an essentially rigid first coupling bar is situated between the first suspension spring and the first seismic mass.
1. A sensor structure, comprising:
a substrate having a main extension plane;
a first seismic mass and a second seismic mass, wherein the first seismic mass and the second seismic mass are deflectable relative to the substrate along a direction of deflection essentially perpendicular to the main extension plane of the substrate;
a rigid coupling rocker which couples together the first seismic mass and the second seismic mass, wherein the rigid coupling rocker is pivotable around a rocker axis parallel to the main extension plane of the substrate;
a first suspension spring, wherein the first seismic mass is suspended from the substrate with the aid of the first suspension spring; and
an essentially rigid first coupling bar connected to the first suspension spring and the first seismic mass, wherein a first end section of the first coupling bar is attached directly to the first seismic mass.
2. The sensor structure as recited in claim 1 , further comprising:
a second suspension spring, wherein the second seismic mass is suspended from the substrate with the aid of the second suspension spring; and
an essentially rigid second coupling bar situated between the second suspension spring and the second seismic mass, wherein the second coupling bar is oriented essentially parallel to the first coupling bar in a rest position of the first seismic mass and the second seismic mass.
3. The sensor structure as recited in claim 1 , wherein:
a second end section of the first coupling bar is attached to the first suspension spring; and
the first coupling bar extends in a rest position of the first seismic mass essentially parallel to the main extension plane and perpendicular to the rocker axis.
4. The sensor structure as recited in claim 3 , wherein the first coupling bar is bendable with respect to the first seismic mass in the first end section around a first bending axis parallel to the rocker axis.
5. The sensor structure as recited in claim 3 , wherein:
a first end section of the second coupling bar is attached to the second seismic mass; and
a second end section of the second coupling bar is attached to the second suspension spring.
6. The sensor structure as recited in claim 5 , wherein the second coupling bar is bendable with respect to the second seismic mass in the first end section of the second coupling bar around a second bending axis parallel to the rocker axis.
7. The sensor structure as recited in claim 1 , wherein at least one of:
(i) the coupling rocker is connected to the substrate with the aid of at least one torsion spring extending parallel to the rocker axis; and
(ii) a clearance between the second end section of the first coupling bar and the substrate along the direction of deflection is essentially identical to a clearance between the second end section of the second coupling bar and the substrate.
8. The sensor structure as recited in claim 1 , wherein:
the first seismic mass includes a first Coriolis element which is drivable with the aid of a first drive unit into a first drive oscillation parallel to the main extension plane of the substrate and perpendicular to the rocker axis; and
the second seismic mass includes a second Coriolis element which is drivable with the aid of a second drive unit into a second drive oscillation antiparallel to the first drive oscillation.
9. The sensor structure as recited in claim 8 , wherein at least one of:
(i) the first drive unit includes a first drive frame at least partially framing the first Coriolis element parallel to the main extension plane, the first drive frame having a first orifice through which the first coupling bar passes and a second orifice through which the coupling rocker passes; and
(ii) the second drive unit includes a second drive frame which at least partially encloses the second Coriolis element parallel to the main extension plane, the second drive frame having a further first orifice through which the second coupling bar passes and a further second orifice through which the coupling rocker passes.
10. The sensor structure as recited in claim 9 , wherein the sensor structure is part of a yaw rate sensor.