IP Library Granted Patent US 9,459,274
Granted Patent B2
US 9,459,274 · App. 13/958,465 · Granted Oct 4, 2016

Round-robin sensing device and method of use

Inventors: Derek Shaeffer (Redwood City, CA); Stanley Wang (Cupertino, CA)
Assignee: INVENSENSE, INC.
G01P1/04G01C19/5776
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Quick Facts
Patent No.
US 9,459,274
App. No.
13/958,465
Granted
Oct 4, 2016
Kind
B2
Abstract

A round-robin sensing device is disclosed. The round-robin sensing device comprises a MEMS device, wherein the MEMS device includes first and second sense electrodes. The round-robin sensing device also comprises a multiplexer coupled to the first and second sense electrodes, at least one sense amplifier coupled to the multiplexer, a demodulator coupled to the at least one sense amplifier, and an integrate and dump circuit coupled to the demodulator. Finally, the round-robin sensing device comprises an analog-to-digital converter (ADC) coupled to the de-multiplexer, wherein the multiplexer, the at least one sense amplifier and the demodulator provide a continuous time sense path during amplification that is resettable and wherein the integrate and dump circuit and the ADC provide a discrete time processing path.

Claims (52)

1. A round-robin sensing device comprising:

a MEMS device; wherein the MEMS device includes first and second sense electrodes;

a multiplexer coupled to the first and second sense electrodes;

at least one sense amplifier coupled to the multiplexer;

a demodulator coupled to the at least one sense amplifier;

an integrate and dump circuit coupled to the demodulator; and

an analog-to-digital converter (ADC) coupled to a de-multiplexer; wherein the multiplexer, the at least one sense amplifier and the demodulator provide a continuous time sense path during amplification that is resettable and wherein the integrate and dump circuit and the ADC provide a discrete time processing path when switching between the first and second sense electrodes.

2. The round-robin sensing device of claim 1 , wherein the first sense electrode senses in a first axis and the second electrode senses in a second axis.

3. The round-robin sensing device of claim 1 , wherein the round-robin sensing device comprises a multi-axis gyroscope.

4. The round-robin sensing device of claim 3 , further comprising a drive system for driving the MEMS device.

5. The round-robin sensing device of claim 4 , further comprising a feed-through capacitor coupled to drive system and the at least one sense amplifier.

6. The round-robin sensing device of claim 1 , wherein the at least one sense amplifier comprises first and second sense amplifiers.

7. The round-robin sensing device of claim 6 , wherein the first sense amplifier includes a first operational amplifier coupled to the multiplexer, a first reset switch and a first feedback capacitor coupled in feedback relationship to the first operational amplifier.

8. The round-robin sensing device of claim 6 , wherein the second sense amplifier includes an input capacitor coupled to the first sense amplifier, a second operational amplifier coupled to the input capacitor, a second reset switch and a second feedback capacitor coupled in feedback relationship with the second operational amplifier.

9. The round-robin sensing device of claim 1 , wherein the integrate and dump circuit comprises:

an input de-multiplexer;

a first and a second integrator coupled to the input de-multiplexer; and

a multiplexer coupled to an output of the first and second integrators.

10. The round-robin sensing device of claim 9 , wherein each of the first and second integrators comprises:

a resistor coupled to the input de-multiplexer;

an operational amplifier coupled to the resistor;

a reset switch coupled in feedback relationship with the operational amplifier; and

a capacitor coupled in feedback relationship with the operational amplifier.

11. The round-robin sensing device of claim 9 , wherein the input de-multiplexer includes a resistor and each of the first and second integrators comprises:

an operational amplifier coupled to the input de-multiplexer;

a reset switch coupled in feedback relationship with the operational amplifier; and

a capacitor coupled in feedback relationship with the operational amplifier.

12. A round-robin sensing device comprising:

a MEMS device; wherein the MEMS device includes first and second sense electrodes;

a plurality of sense amplifiers adapted to be selectively coupled to the first and second sense electrodes;

a demodulator coupled to the plurality of sense amplifiers;

an integrate and dump circuit coupled to the demodulator; and

an analog-to-digital converter (ADC) coupled to a de-multiplexer; wherein the de-multiplexer, the plurality of sense amplifiers and the demodulator provide a continuous time sense path during amplification that is resettable and wherein the integrate and dump circuit and the ADC provide a discrete time processing path when switching between the first and second sense electrodes.

13. The round-robin sensing device of claim 12 , wherein the first sense electrode senses in a first axis and the second electrode senses in a second axis.

14. The round-robin sensing device of claim 12 , wherein the plurality of sense amplifiers comprises first and second sensor amplifiers.

15. The round-robin sensing device of claim 12 , wherein each of the plurality of sense amplifiers includes a first operational amplifier coupled to one of the first and second sense electrodes, a reset switch and a first feedback capacitor coupled in feedback relationship to the first operational amplifier.

16. The round-robin sensing device of claim 12 , wherein the round-robin sensing device comprises a multi-axis gyroscope.

17. The round-robin sensing device of claim 16 , further comprising a drive system for driving the MEMS device.

18. The round-robin sensing device of claim 17 , further comprising a feed-through capacitor coupled to drive system and the at least one sense amplifier.

19. The round-robin sensing device of claim 12 , wherein the integrate and dump circuit comprises:

an input de-multiplexer;

first and second integrators coupled to the input de-multiplexer; and

a multiplexer coupled to an output of the first and second integrators.

20. The round-robin sensing device of claim 19 , wherein each of the first and second integrators comprises:

a resistor coupled to the input de-multiplexer;

an operational amplifier coupled to the resistor;

a reset switch coupled in feedback relationship with the operational amplifier; and

a capacitor coupled in feedback relationship with the operational amplifier.

21. The round-robin sensing device of claim 19 , wherein the input de-multiplexer includes a resistor and each of the first and second integrators comprises:

an operational amplifier coupled to the input de-multiplexer;

a reset switch coupled in feedback relationship with the operational amplifier; and

a capacitor coupled in feedback relationship with the operational amplifier.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Aug 2, 2013
From: SHAEFFER, DEREK; WANG, STANLEY
To: INVENSENSE, INC.
Reel/Frame 030935/0696 →
Continuity (2)
Provisional Application 61780371 · Mar 13, 2013
Related Publication 20140260619A1 · Sep 18, 2014