IP Library › Granted Patent US 9,468,130
Granted Patent B2
US 9,468,130 · App. 14/252,308 · Granted Oct 11, 2016

Micro channel cooling device, micro channel cooling system, and electronic instrument

Inventors: Osamu Tsuboi (Kawasaki, JP); Norinao Kouma (Atsugi, JP); Yoshihiro Mizuno (Kobe, JP)
Assignee: FUJITSU LIMITED
H05K7/20F25B21/00G06F1/20H01L23/38H01L23/473F25B2321/001H01L2924/0002
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Quick Facts
Patent No.
US 9,468,130
App. No.
14/252,308
Granted
Oct 11, 2016
Kind
B2
Abstract

A microchannel cooling device includes a heat sink having a liquid refrigerant flow channel having a microscopic cross section and connected to a heat source thermally, and a thermoelectric element provided on the heat sink and extending parallel to a direction of extension of the liquid refrigerant flow channel.

Claims (22)

1. A microchannel cooling device, comprising:

a heat sink having a liquid refrigerant flow channel having a microscopic cross section and connected to a heat source thermally; and

a thermoelectric element provided on the heat sink and extending parallel to a direction of extension of the liquid refrigerant flow channel, wherein

the thermoelectric element includes a first electrode at a high temperature side and a second electrode at a low temperature side, and a part of the thermoelectric element between the first and second electrodes extends parallel to the direction of the extension of the liquid refrigerant flow channel.

2. The microchannel cooling device as claimed in claim 1 , wherein the thermoelectric element is provided on a surface at an opposite side of a surface with the heat source thermally connected thereto, with respect to the liquid refrigerant flow channel.

3. The microchannel cooling device as claimed in claim 1 , wherein the thermoelectric element is embedded in an interior of the heat sink.

4. The microchannel cooling device as claimed in claim 3 , wherein the heat sink has a plurality of the liquid refrigerant flow channels extending parallel to one another and the thermoelectric element is arranged between the adjacent liquid refrigerant flow channels.

5. The microchannel cooling device as claimed in claim 1 , wherein the thermoelectric element is an element for generating electric power by utilizing a Seebeck electromotive force of a dissimilar metal junction.

6. The microchannel cooling device as claimed in claim 1 , wherein a Reynold's number of the liquid refrigerant flow channel is less than 2000.

7. The microchannel cooling device as claimed in claim 6 , wherein a cross section of the liquid refrigerant flow channel has a rectangular shape and a length of a diagonal line thereof is less than or equal to 500·m.

8. The microchannel cooling device as claimed in claim 1 , wherein the heat sink is formed of a semiconductor material.

9. The microchannel cooling device as claimed in claim 8 , wherein the heat sink is formed of a semiconductor substrate with a semiconductor integrated circuit formed thereon.

10. A microchannel cooling system, comprising:

an electric component as a heat source;

a microchannel cooling device, wherein the microchannel cooling device includes a heat sink having a liquid refrigerant flow channel having a microscopic cross section and connected to the electronic component thermally; and a thermoelectric element provided on the heat sink and extending parallel to a direction of extension of the liquid refrigerant flow channel; and

an electric circuit for supplying electric power generated by the microchannel cooling device to a motor-driven driving part for the cooling system.

11. The microchannel cooling system as claimed in claim 10 , wherein the motor-driven driving part includes a pump for supplying a liquid refrigerant to the microchannel cooling device and a cooling fan for cooling a heat exchanger for cooling the liquid refrigerant.

12. An electronic instrument, comprising:

an electronic component as a heat source;

a microchannel cooling device, wherein the microchannel cooling device includes a heat sink having a liquid refrigerant flow channel having a microscopic cross section and connected to the electronic component thermally; and a thermoelectric element provided on the heat sink and extending parallel to a direction of extension of the liquid refrigerant flow channel; and

a pump for supplying a liquid refrigerant to the microchannel cooling device,

wherein electric power generated by the microchannel cooling device is supplied to the pump to drive the pump.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jun 13, 2014
From: TSUBOI, OSAMU; KOUMA, NORINAO; MIZUNO, YOSHIHIRO
To: FUJITSU LIMITED
Reel/Frame 033164/0004 →
Continuity (2)
Continuation PCTJP2011075509 · Nov 4, 2011
Related Publication 20140216058A1 · Aug 7, 2014