Wavelength detector and wavelength calibration system

1. A wavelength detector that detects a wavelength of a laser beam outputted from an ultra violet laser device, the wavelength detector comprising:

a discharge tube that includes a cylindrical anode and a cylindrical cathode that each have a through-hole formed therein, and that is configured so that an electrical property between the anode and the cathode changes due to an opto-galvanic effect when a laser beam having a predetermined first wavelength passes through the through-hole of the cathode in a state in which a DC voltage is applied to the anode;

a high-voltage DC power source configured so as to apply the DC voltage to the anode;

an electrical signal processing unit including an electrical signal detection point for detecting a voltage change in a signal level of the cathode; and

a dumper provided downstream from the discharge tube in an optical path of the laser beam and configured to absorb the laser beam that has passed through the discharge tube,

wherein the electrical signal processing unit includes at least one of

an electrical low-pass filter connected to the electrical signal detection point for suppressing a voltage level of a photoelectric effect signal produced when the cathode is irradiated with the laser beam and

an electrical delay circuit that delays an electrical signal detection timing of the voltage level in the electrical signal detection point by a predetermined amount of time in order to start the electrical signal detection of the voltage level at least after the voltage peak of the photoelectric effect signal in the electrical signal detection point, and

wherein the electrical signal processing unit detects the voltage change in the electrical property.

2. A wavelength calibration system comprising:

an ultra violet laser device;

a wavelength control unit that changes a wavelength of a laser beam outputted from the ultra violet laser device in steps within a predetermined wavelength range;

a first wavelength detector that is the wavelength detector according to claim 1 ; and

a second wavelength detector that consecutively detects wavelengths of the laser beams outputted from the ultra violet laser device,

wherein the wavelength control unit calculates a calibration value for a wavelength detection value detected by the second wavelength detector based on a difference between the predetermined first wavelength that is a wavelength based on a material of the cathode, and the wavelength detection value that is a wavelength detected by the second wavelength detector when the electrical property of the discharge tube changes.

3. The wavelength detector according to claim 1 ,

wherein the signal detection timing is delayed for a predetermined amount of time following a timing at which the voltage level observed in the electrical signal detection point has exceeded a predetermined voltage value of a reference voltage; and

the predetermined amount of time and the predetermined voltage value of the reference voltage are determined beforehand.

4. The wavelength detector according to claim 3 ,

wherein the delay circuit includes:

a comparator configured to compare the predetermined voltage value of the reference voltage at the signal detection point with the reference voltage, and to output a logic signal based on a result of the comparison; and

a delay element configured to delay the logic signal inputted from the comparator by the predetermined delay time and output a delayed signal.

5. The wavelength detector according to claim 4 ,

wherein the predetermined delay time is a time spanning from when the voltage level at the signal detection point exceeds the predetermined voltage value of the reference voltage to when a voltage peak of an opto-galvanic signal changing in response to the change in the electrical property occurs.

6. The wavelength detector according to claim 4 ,

wherein the predetermined delay time is a time spanning from when the voltage level at the signal detection point exceeds the predetermined voltage value of the reference voltage to when the voltage level drops below the predetermined voltage value of the reference voltage.

7. The wavelength detector according to claim 1 ,

wherein the dumper has a structure in which multiple light-absorbing members are disposed opposing each other with their absorption surfaces facing inward.

8. The wavelength detector according to claim 1 ,

wherein the dumper is connected to a cooling apparatus.

9. The wavelength detector according to claim 1 , further comprising:

a diffusion element that diffuses the laser beam outputted from the ultra violet laser device;

a light collection optical system provided downstream from the diffusion element;

a member, including an aperture, provided downstream from the light collection optical system; and

a transfer optical system including a first lens and a second lens, provided downstream from the member, that transfers an image in the aperture;

wherein the discharge tube is provided downstream from the member.

10. The wavelength detector according to claim 9 ,

wherein the discharge tube is disposed so that the laser beam that passes through the aperture passes through the through-hole of the cathode of the discharge tube without directly irradiating the cathode,

wherein the discharge tube is disposed so that the image in the aperture transferred by the transfer optical system is formed within the through-hole of the cathode,

wherein the first lens is disposed so that an upstream focal position of the first lens is positioned in a center of the aperture,

wherein the second lens is disposed so that a downstream focal position of the second lens is located within the through-hole of the cathode in the discharge tube,

and wherein the inner diameter D of the through hole of the cathode fulfills the below equation:

D >φ(NAo/NAi)+ L tan(θ i )

wherein φ is a diameter of the aperture, NAo is a numerical aperture of the first lens, NAi is a numerical aperture of the second lens, L is a width of the cathode in the discharge tube, and θi is a entry angle of the laser beam relative to a center axis of the cylindrical cathode.

11. A wavelength detector that detects a wavelength of a laser beam outputted from an ultra violet laser device, the wavelength detector, comprising:

a diffusion element that diffuses the laser beam;

a light collection optical system provided downstream from the diffusion element;

a member, including an aperture, provided downstream from the light collection optical system;

a transfer optical system including a first lens and a second lens, provided downstream from the member, that transfers an image in the aperture;

a discharge tube that is provided downstream from the member and that includes a cylindrical anode and a cylindrical cathode that each have a through-hole formed therein, and that is configured so that an electrical property between the anode and the cathode changes due to an opto-galvanic effect when the laser beam having a predetermined first wavelength passes through the through-hole of the cathode in a state in which a DC voltage is applied to the anode;

a high-voltage DC power source configured so as to apply a DC voltage to the anode; and

a dumper provided downstream from the discharge tube in the optical path of the laser beam and configured to absorb the laser beam that has passed through the discharge tube,

wherein the discharge tube is disposed so that the laser beam that passes through the aperture passes through the through-hole of the cathode of the discharge tube without directly irradiating the cathode,

wherein the discharge tube is disposed so that the image in the aperture transferred by the transfer optical system is formed within the through-hole of the cathode,

wherein the first lens is disposed so that an upstream focal position of the first lens is positioned in a center of the aperture,

wherein the second lens is disposed so that a downstream focal position of the second lens is located within the through-hole of the cathode in the discharge tube, and

wherein the inner diameter D of the through hole of the cathode fulfills the below equation:

D >φ(NAo/NAi)+ L tan(θ i )

wherein φ is the diameter of the aperture, NAo is a numerical aperture of the first lens, NAi is a numerical aperture of the second lens, L is a width of the cathode in the discharge tube, and θi is an entry angle of the laser beam relative to a center axis of the cylindrical cathode.

12. A wavelength calibration system, comprising:

an ultra violet laser device;

a wavelength control unit that changes a wavelength of a laser beam outputted from the ultra violet laser device in steps within a predetermined wavelength range;

a first wavelength detector that is the wavelength detector according to claim 11 ; and

a second wavelength detector that consecutively detects wavelengths of the laser beams outputted from the ultra violet laser device,

wherein the wavelength control unit calculates a calibration value for a wavelength detection value detected by the second wavelength detector based on a difference between the predetermined first wavelength that is a wavelength based on the material of the cathode, and the wavelength detection value that is a wavelength detected by the second wavelength detector when the electrical property of the discharge tube changes.

13. The wavelength detector according to claim 11 ,

wherein the dumper has a structure in which multiple light-absorbing members are disposed opposing each other with their absorption surfaces facing inward.

14. The wavelength detector according to claim 11 ,

wherein the dumper is connected to a cooling apparatus.

15. A wavelength detector that detects a wavelength of a laser beam outputted from an ultra violet laser device, the wavelength detector comprising:

a diffusion element that diffuses the laser beam;

a light collection optical system provided downstream from the diffusion element;

a member, including an aperture, provided downstream from the light collection optical system;

a discharge tube that is provided downstream from the member and that includes a cylindrical anode and a cylindrical cathode that each have a through-hole formed therein, and that is configured so that an electrical property between the anode and the cathode changes due to an opto-galvanic effect when a laser beam having a predetermined first wavelength passes through the through-hole of the cathode in a state in which a DC voltage is applied to the anode;

a high-voltage DC power source configured so as to apply the DC voltage to the anode; and

a dumper provided downstream from the discharge tube in an optical path of the laser beam and configured to absorb the laser beam that has passed through the discharge tube,

wherein the discharge tube is disposed so that the laser beam that passes through the aperture passes through the through-hole of the cathode of the discharge tube without directly irradiating the cathode.

16. The wavelength detector according to claim 15 ,

wherein the dumper has a structure in which multiple light-absorbing members are disposed opposing each other with their absorption surfaces facing inward.

17. The wavelength detector according to claim 15 ,

wherein the dumper is connected to a cooling apparatus.

18. The wavelength detector according to claim 15 , further comprising:

a transfer optical system, provided downstream from the member, that transfers an image in the aperture,

wherein the discharge tube is disposed so that the image in the aperture transferred by the transfer optical system is formed within the through-hole of the cathode.

19. The wavelength detector according to claim 18 ,

wherein the discharge tube is disposed so that the image in the aperture is formed on a center axis of the through-hole of the cathode.

20. The wavelength detector according to claim 15 ,

wherein the diffusion element is at least one of a micro flys-eye lens and a diffractive optics element.